Radio-frequency(RF)micro-electro-mechanical-system(MEMS)switches are widely used in communication devices and test instruments.In this paper,we demonstrate the structural design and optimization of a novel RF MEMS swi...Radio-frequency(RF)micro-electro-mechanical-system(MEMS)switches are widely used in communication devices and test instruments.In this paper,we demonstrate the structural design and optimization of a novel RF MEMS switch with a straight top electrode.The insertion loss,isolation,actuator voltage,and stress distribution of the switch are optimized and explored simultaneously by HFSS and COMSOL software,taking into account both its RF and mechanical properties.Based on the optimized results,a switch was fabricated by a micromachining process compatible with conventional IC processes.The RF performance in the DC to 18 GHz range was measured with a vector network analyzer,showing isolation of more than 21.28 dB over the entire operating frequency range.Moreover,the required actuation voltage was about 9.9 V,and the switching time was approximately 33μs.A maximum lifetime of 109 switching cycles was obtained.Additionally,the dimension of the sample is 1.8 mm×1.8 mm×0.3 mm,which might find application in the current stage.展开更多
Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system(MEMS)single-pole double-throw(SPDT)switches are presented in this paper.The short-open-load-th...Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system(MEMS)single-pole double-throw(SPDT)switches are presented in this paper.The short-open-load-through(SOLT)calibration states can be completed simultaneously by using the MEMS electronic calibration,and the electronic calibrator can be reused 10^(6) times.The simulation results show that this novel electronic calibration can be used in a frequency range of 0.1 GHz–20 GHz,the return loss is less than 0.18 dB and 0.035 dB in short-circuit and open-circuit states,respectively,and the insertion loss in through(thru)state is less than 0.27 dB.On the other hand,the size of this novel calibration kit is only 6 mm×2.8 mm×0.8 mm.Our results demonstrate that the calibrator with integrated radiofrequency microelectromechanical system(RF MEMS)switches can not only provide reduced size,loss,and calibration cost compared with traditional calibration kit but also improves the calibration accuracy and efficiency.It has great potential applications in millimeter-wave measurement and testing technologies,such as device testing,vector network analyzers,and RF probe stations.展开更多
An approximate analytical model for calculating the pull-in voltage of a stepped cantilever-type radio frequency （RF） micro electro-mechanical system （MEMS） switch is developed based on the Euler-Bernoulli beam an...An approximate analytical model for calculating the pull-in voltage of a stepped cantilever-type radio frequency （RF） micro electro-mechanical system （MEMS） switch is developed based on the Euler-Bernoulli beam and a modified couple stress theory, and is validated by comparison with the finite element results. The sensitivity functions of the pull-in voltage to the designed parameters are derived based on the proposed model. The sensitivity investigation shows that the pull-in voltage sensitivities increase/decrease nonlinearly with the increases in the designed parameters. For the stepped cantilever beam, there exists a nonzero optimal dimensionless length ratio, where the pull-in voltage is insensitive. The optimal value of the dimensionless length ratio only depends on the dimensionless width ratio, and can be obtained by solving a nonlinear equation. The determination of the designed parameters is discussed, and some recommendations are made for the RF MEMS switch optimization.展开更多
This paper details the design and simulation of a novel low-loss four-bit reconfigurable bandpass filter that integrates microelectromechanical system(MEMS)switches and comb resonators.A T-shaped reconfigurable resona...This paper details the design and simulation of a novel low-loss four-bit reconfigurable bandpass filter that integrates microelectromechanical system(MEMS)switches and comb resonators.A T-shaped reconfigurable resonator is reconfigured in a'one resonator,multiple MEMS switches'configuration and used to gate the load capacitances of comb resonators so that a multiple-frequency filtering function is realized within the 7-16 GHz frequency range.In addition,the insertion loss of the filter is less than 1.99 dB,the out-of-band rejection is more than 18.30 dB,and the group delay is less than 0.25 ns.On the other hand,the size of this novel filter is only 4.4 mm×2.5 mm×0.4 mm.Our results indicate that this MEMS reconfigurable filter,which can switch 16 central frequency bands through eight switches,achieves a low insertion loss compared to those of traditional MEMS filters.In addition,the advantages of small size are obtained while achieving high integration.展开更多
The finite-difference time-domain method is used to simulate the optical characteristics of an in-plane switching blue phase liquid crystal display.Compared with the matrix optic methods and the refractive method,the ...The finite-difference time-domain method is used to simulate the optical characteristics of an in-plane switching blue phase liquid crystal display.Compared with the matrix optic methods and the refractive method,the finite-difference timedomain method,which is used to directly solve Maxwell＇s equations,can consider the lateral variation of the refractive index and obtain an accurate convergence effect.The simulation results show that e-rays and o-rays bend in different directions when the in-plane switching blue phase liquid crystal display is driven by the operating voltage.The finitedifference time-domain method should be used when the distribution of the liquid crystal in the liquid crystal display has a large lateral change.展开更多
The squeeze-film air damping exists in a lot of micro-electronic-mechanical system (MEMS) devices unavoidably. The effects of air damping in traditional inertial switch with spring-mass system can be ignored for its l...The squeeze-film air damping exists in a lot of micro-electronic-mechanical system (MEMS) devices unavoidably. The effects of air damping in traditional inertial switch with spring-mass system can be ignored for its large volume and mass. But, many properties of MEMS switch, such as sensitivity, resolution and contact time, are affected by the air damping caused from the squeezed air film between two parallel plates moving relatively. Based on the conservation laws for mass and flux and the nonlinear Reynolds equation, the coefficient of squeeze-film damping was derived. The dynamic responses of the inertial switch with and without squeeze-film damping were simulated by using software ANSYS. The simulated results show that the sensitivity and contact time of the switch descend by about 5% and 15%, respectively, when the effects of squeeze-film damping are considered.展开更多
Effective probing current-induced magnetization switching is highly required in the study of emerging spin-orbit torque(SOT)effect.However,the measurement of in-plane magnetization switching typically relies on the gi...Effective probing current-induced magnetization switching is highly required in the study of emerging spin-orbit torque(SOT)effect.However,the measurement of in-plane magnetization switching typically relies on the giant/tunneling magnetoresistance measurement in a spin valve structure calling for complicated fabrication process,or the non-electric approach of Kerr imaging technique.Here,we present a reliable and convenient method to electrically probe the SOT-induced in-plane magnetization switching in a simple Hall bar device through analyzing the MR signal modified by a magnetic field.In this case,the symmetry of MR is broken,resulting in a resistance difference for opposite magnetization orientations.Moreover,the feasibility of our method is widely evidenced in heavy metal/ferromagnet(Pt/Ni_(20)Fe_(80) and W/Co_(20)Fe_(60)B_(20))and the topological insulator/ferromagnet(Bi_(2)Se_(3)/Ni_(20)Fe_(80)).Our work simplifies the characterization process of the in-plane magnetization switching,which can promote the development of SOT-based devices.展开更多
基金supported by the Equipment Development Department of the New Product Project,the Shanxi Province Postgraduate Education Reform Project,the Double First-Class Disciplines,the National First-class Curriculum Construction,and the Province Future Technology Project (Grant Nos.2019XW0010,11012103,11012133,11013168,and 11013169).
文摘Radio-frequency(RF)micro-electro-mechanical-system(MEMS)switches are widely used in communication devices and test instruments.In this paper,we demonstrate the structural design and optimization of a novel RF MEMS switch with a straight top electrode.The insertion loss,isolation,actuator voltage,and stress distribution of the switch are optimized and explored simultaneously by HFSS and COMSOL software,taking into account both its RF and mechanical properties.Based on the optimized results,a switch was fabricated by a micromachining process compatible with conventional IC processes.The RF performance in the DC to 18 GHz range was measured with a vector network analyzer,showing isolation of more than 21.28 dB over the entire operating frequency range.Moreover,the required actuation voltage was about 9.9 V,and the switching time was approximately 33μs.A maximum lifetime of 109 switching cycles was obtained.Additionally,the dimension of the sample is 1.8 mm×1.8 mm×0.3 mm,which might find application in the current stage.
基金Project supported by the National Defense Technology Industry Strong,China (Grant No. JCKY2018408B006)the Information System New Items Project,China (Grant Nos. 2018XW0026 and 2019XW0010)the Information System Pre-research Project,China (Grant No. 31513060101)
文摘Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system(MEMS)single-pole double-throw(SPDT)switches are presented in this paper.The short-open-load-through(SOLT)calibration states can be completed simultaneously by using the MEMS electronic calibration,and the electronic calibrator can be reused 10^(6) times.The simulation results show that this novel electronic calibration can be used in a frequency range of 0.1 GHz–20 GHz,the return loss is less than 0.18 dB and 0.035 dB in short-circuit and open-circuit states,respectively,and the insertion loss in through(thru)state is less than 0.27 dB.On the other hand,the size of this novel calibration kit is only 6 mm×2.8 mm×0.8 mm.Our results demonstrate that the calibrator with integrated radiofrequency microelectromechanical system(RF MEMS)switches can not only provide reduced size,loss,and calibration cost compared with traditional calibration kit but also improves the calibration accuracy and efficiency.It has great potential applications in millimeter-wave measurement and testing technologies,such as device testing,vector network analyzers,and RF probe stations.
基金supported by the National Natural Science Foundation of China(Nos.51505089 and61204116)the Opening Project of the Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory(Nos.ZHD201207 and 9140C030605140C03015)the Pearl River S&T Nova Program of Guangzhou(No.2014J2200086)
文摘An approximate analytical model for calculating the pull-in voltage of a stepped cantilever-type radio frequency （RF） micro electro-mechanical system （MEMS） switch is developed based on the Euler-Bernoulli beam and a modified couple stress theory, and is validated by comparison with the finite element results. The sensitivity functions of the pull-in voltage to the designed parameters are derived based on the proposed model. The sensitivity investigation shows that the pull-in voltage sensitivities increase/decrease nonlinearly with the increases in the designed parameters. For the stepped cantilever beam, there exists a nonzero optimal dimensionless length ratio, where the pull-in voltage is insensitive. The optimal value of the dimensionless length ratio only depends on the dimensionless width ratio, and can be obtained by solving a nonlinear equation. The determination of the designed parameters is discussed, and some recommendations are made for the RF MEMS switch optimization.
基金Project supported by the National Defense Technology Industry Strong Foundation Project of China (Grant No. JCKY2018* * **06)the Information System New items Project (Grant Nos. 2018****26 and 2019****10)the Key Laboratory of Instrumentation Science and Dynamic Measurement for their support
文摘This paper details the design and simulation of a novel low-loss four-bit reconfigurable bandpass filter that integrates microelectromechanical system(MEMS)switches and comb resonators.A T-shaped reconfigurable resonator is reconfigured in a'one resonator,multiple MEMS switches'configuration and used to gate the load capacitances of comb resonators so that a multiple-frequency filtering function is realized within the 7-16 GHz frequency range.In addition,the insertion loss of the filter is less than 1.99 dB,the out-of-band rejection is more than 18.30 dB,and the group delay is less than 0.25 ns.On the other hand,the size of this novel filter is only 4.4 mm×2.5 mm×0.4 mm.Our results indicate that this MEMS reconfigurable filter,which can switch 16 central frequency bands through eight switches,achieves a low insertion loss compared to those of traditional MEMS filters.In addition,the advantages of small size are obtained while achieving high integration.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.11304074,61475042,and 11274088)the Natural Science Foundation of Hebei Province,China(Grant Nos.A2015202320 and GCC2014048)the Key Subject Construction Project of Hebei Province University,China
文摘The finite-difference time-domain method is used to simulate the optical characteristics of an in-plane switching blue phase liquid crystal display.Compared with the matrix optic methods and the refractive method,the finite-difference timedomain method,which is used to directly solve Maxwell＇s equations,can consider the lateral variation of the refractive index and obtain an accurate convergence effect.The simulation results show that e-rays and o-rays bend in different directions when the in-plane switching blue phase liquid crystal display is driven by the operating voltage.The finitedifference time-domain method should be used when the distribution of the liquid crystal in the liquid crystal display has a large lateral change.
文摘The squeeze-film air damping exists in a lot of micro-electronic-mechanical system (MEMS) devices unavoidably. The effects of air damping in traditional inertial switch with spring-mass system can be ignored for its large volume and mass. But, many properties of MEMS switch, such as sensitivity, resolution and contact time, are affected by the air damping caused from the squeezed air film between two parallel plates moving relatively. Based on the conservation laws for mass and flux and the nonlinear Reynolds equation, the coefficient of squeeze-film damping was derived. The dynamic responses of the inertial switch with and without squeeze-film damping were simulated by using software ANSYS. The simulated results show that the sensitivity and contact time of the switch descend by about 5% and 15%, respectively, when the effects of squeeze-film damping are considered.
基金Project supported by the National Natural Science Foundation of China (Grant Nos. 11904017, 11974145, 51901008, and 12004024)Shandong Provincial Natural Science Foundation, China (Grant No. ZR2020ZD28)+1 种基金platform from Qingdao Science and Technology Commissionthe Fundamental Research Funds for the Central Universities of China
文摘Effective probing current-induced magnetization switching is highly required in the study of emerging spin-orbit torque(SOT)effect.However,the measurement of in-plane magnetization switching typically relies on the giant/tunneling magnetoresistance measurement in a spin valve structure calling for complicated fabrication process,or the non-electric approach of Kerr imaging technique.Here,we present a reliable and convenient method to electrically probe the SOT-induced in-plane magnetization switching in a simple Hall bar device through analyzing the MR signal modified by a magnetic field.In this case,the symmetry of MR is broken,resulting in a resistance difference for opposite magnetization orientations.Moreover,the feasibility of our method is widely evidenced in heavy metal/ferromagnet(Pt/Ni_(20)Fe_(80) and W/Co_(20)Fe_(60)B_(20))and the topological insulator/ferromagnet(Bi_(2)Se_(3)/Ni_(20)Fe_(80)).Our work simplifies the characterization process of the in-plane magnetization switching,which can promote the development of SOT-based devices.
