In recent years,a large number of small volume,low cost micro electro mechanical systems（MEMS）digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these...In recent years,a large number of small volume,low cost micro electro mechanical systems（MEMS）digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these kinds of gyroscopes have poor performances in initial zero-bias,temperature drift,In-Run bias stability,bias repeatability,etc.,their output errors need to be compensated before being used.Based on a lot of experiments,the temperature drift and the initial zero-bias are the major error sources in the MEMS gyroscopes output data.Due to the poor repeatability of temperature drift,the temperature compensation coefficients need to be recalculated every time before using.In order to recalculate parameters of the temperature compensation model quickly,a 1st-order polynomial model of temperature is established,then a forgetting factor recursive least squares estimator will be adopted to identify the model parameters in real time.Static and dynamic experimental data shows that this method removed/compensated the temperature drift and initial zero-bias from the output of the gyroscopes effectively.展开更多
MEMS gyroscopes are widely used in the underwater vehicles owing to their excellent performance and affordable costs.However,the temperature sensitivity of the sensor seriously affects measurement accuracy.Therefore,i...MEMS gyroscopes are widely used in the underwater vehicles owing to their excellent performance and affordable costs.However,the temperature sensitivity of the sensor seriously affects measurement accuracy.Therefore,it is significantly to accurately identify the temperature compensation model in this paper,the calibration parameters were first extracted by using the fast calibration algorithm based on the Persistent Excitation Signal Criterion,and then,MEMS gyro temperature compensation model was established by utilizing the thin plate spline interpolation method,and the corresponding identification results were compared with the results from the polynomial fitting method.The effectiveness of the proposed algorithm has been validated through the comparative experiment.展开更多
Based on the asymmetric base region transistor, a pressure sensor with temperature compensation circuit is proposed in this paper. The pressure sensitive structure of the proposed sensor is constructed by a C-type sil...Based on the asymmetric base region transistor, a pressure sensor with temperature compensation circuit is proposed in this paper. The pressure sensitive structure of the proposed sensor is constructed by a C-type silicon cup and a Wheatstone bridge with four piezoresistors（R_1, R_2, R_3 and R_4/locating on the edge of a square silicon membrane. The chip was designed and fabricated on a silicon on insulator（SOI） wafer by micro electromechanical system（MEMS） technology and bipolar transistor process. When the supply voltage is 5.0 V, the corresponding temperature coefficient of the sensitivity（TCS） for the sensor before and after temperature compensation are -1862 and -1067 ppm/℃, respectively. Through varying the ratio of the base region resistances r_1 and r_2, the TCS for the sensor with the compensation circuit is -127 ppm/℃. It is possible to use this compensation circuit to improve the temperature characteristics of the pressure sensor.展开更多
文摘In recent years,a large number of small volume,low cost micro electro mechanical systems（MEMS）digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these kinds of gyroscopes have poor performances in initial zero-bias,temperature drift,In-Run bias stability,bias repeatability,etc.,their output errors need to be compensated before being used.Based on a lot of experiments,the temperature drift and the initial zero-bias are the major error sources in the MEMS gyroscopes output data.Due to the poor repeatability of temperature drift,the temperature compensation coefficients need to be recalculated every time before using.In order to recalculate parameters of the temperature compensation model quickly,a 1st-order polynomial model of temperature is established,then a forgetting factor recursive least squares estimator will be adopted to identify the model parameters in real time.Static and dynamic experimental data shows that this method removed/compensated the temperature drift and initial zero-bias from the output of the gyroscopes effectively.
文摘MEMS gyroscopes are widely used in the underwater vehicles owing to their excellent performance and affordable costs.However,the temperature sensitivity of the sensor seriously affects measurement accuracy.Therefore,it is significantly to accurately identify the temperature compensation model in this paper,the calibration parameters were first extracted by using the fast calibration algorithm based on the Persistent Excitation Signal Criterion,and then,MEMS gyro temperature compensation model was established by utilizing the thin plate spline interpolation method,and the corresponding identification results were compared with the results from the polynomial fitting method.The effectiveness of the proposed algorithm has been validated through the comparative experiment.
基金supported by the National Natural Science Foundation of China(No.61471159)the Natural Science Foundation of Heilongjiang Province(No.F201433)+1 种基金the University Nursing Program for Young Scholars with Creative Talents in Heilongjiang Province(No.2015018)the Special Funds for Science and Technology Innovation Talents of Harbin in China(No.2016RAXXJ016)
文摘Based on the asymmetric base region transistor, a pressure sensor with temperature compensation circuit is proposed in this paper. The pressure sensitive structure of the proposed sensor is constructed by a C-type silicon cup and a Wheatstone bridge with four piezoresistors（R_1, R_2, R_3 and R_4/locating on the edge of a square silicon membrane. The chip was designed and fabricated on a silicon on insulator（SOI） wafer by micro electromechanical system（MEMS） technology and bipolar transistor process. When the supply voltage is 5.0 V, the corresponding temperature coefficient of the sensitivity（TCS） for the sensor before and after temperature compensation are -1862 and -1067 ppm/℃, respectively. Through varying the ratio of the base region resistances r_1 and r_2, the TCS for the sensor with the compensation circuit is -127 ppm/℃. It is possible to use this compensation circuit to improve the temperature characteristics of the pressure sensor.
