Traditional MEMS (microelectromechanical system) design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification for ...Traditional MEMS (microelectromechanical system) design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification for surface mi- cro-machined MEMS is proposed, which is based on the geometric model of a MEMS device. The emphasis is focused on syn- thesizing the masks at the basis of the layer model generated from the geometric model of the MEMS device. The method is comprised of several steps: the correction of the layer model, the generation of initial masks and final masks including multi-layer etch masks, and mask simulation. Finally some test results are given.展开更多
基金Project supported by the National Natural Science Foundation of China (Nos. 60273057 and 60403049) and the National Basic Re-search Program (973) of China (No. 2002CB312106)
文摘Traditional MEMS (microelectromechanical system) design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification for surface mi- cro-machined MEMS is proposed, which is based on the geometric model of a MEMS device. The emphasis is focused on syn- thesizing the masks at the basis of the layer model generated from the geometric model of the MEMS device. The method is comprised of several steps: the correction of the layer model, the generation of initial masks and final masks including multi-layer etch masks, and mask simulation. Finally some test results are given.
