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MEMS/NEMS表面3-D轮廓测量中基于模板的相位解包裹方法 被引量:2
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作者 黄玉波 栗大超 +3 位作者 胡小唐 胡春光 张文栋 徐临燕 《传感技术学报》 CAS CSCD 北大核心 2006年第05A期1488-1492,共5页
相位解包裹是使用相移显微干涉法测量MEMS/NEMS表面3-D轮廓时的重要步骤.本文针对普通的相位解包裹方法在复杂轮廓或包含非理想数据区的表面轮廓测量中的局限性,提出一种基于模板的广度优先搜索相位展开方法.通过模板的使用,先将非相容... 相位解包裹是使用相移显微干涉法测量MEMS/NEMS表面3-D轮廓时的重要步骤.本文针对普通的相位解包裹方法在复杂轮廓或包含非理想数据区的表面轮廓测量中的局限性,提出一种基于模板的广度优先搜索相位展开方法.通过模板的使用,先将非相容区域标记出来,在相位解包裹的过程中绕过这些区域,即可得到准确可靠的相位展开结果.通过具体的应用实例可以证明,使用不同模板可以根据不同应用的需要灵活而准确地实现微纳结构表面3-D轮廓测量中的相位展开. 展开更多
关键词 mems/nems 表面轮廓测量 模板 相位解包裹 边缘检测
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振动驱动微能源技术研究进展 被引量:14
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作者 张亚婷 丑修建 +1 位作者 郭涛 熊继军 《微纳电子技术》 CAS 北大核心 2012年第4期242-247,共6页
首先介绍了微能源的几种类型,比较了不同类型微能源的优缺点。振动式微能源具有体积小、重量轻、能量密度高、寿命长、无污染和对环境适应性强等优点,详细描述了静电转换型、电磁转换型和压电转换型三种振动驱动微能源技术的原理和特点... 首先介绍了微能源的几种类型,比较了不同类型微能源的优缺点。振动式微能源具有体积小、重量轻、能量密度高、寿命长、无污染和对环境适应性强等优点,详细描述了静电转换型、电磁转换型和压电转换型三种振动驱动微能源技术的原理和特点。系统综述了三种振动驱动微能源技术的国内外研究现状,包括微能源的结构和采集、存储电路。分析了其存在的技术和应用瓶颈问题,例如微能源使用的材料和结构不完善、转换效率较低、微加工和微装配技术不成熟、难以应用于实际环境、振动环境对其寿命的影响等问题,并且展望了微能源未来的发展趋势。 展开更多
关键词 mems/nems 静电转换 磁电转换 压电转换 微能源技术
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单晶硅表面改性及其微观摩擦学性能研究进展 被引量:15
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作者 孙蓉 徐洮 薛群基 《摩擦学学报》 EI CAS CSCD 北大核心 2004年第4期382-385,共4页
评述了单晶硅表面改性及其微观摩擦磨损性能研究现状和进展,就单晶硅微观机械性能和摩擦磨损性能、单晶硅表面沉积薄膜和氧化层的微观机械和摩擦学性能及硅材料表面离子注入和表面纳米化等相关研究进行了归纳总结;指出应当继续深化硅材... 评述了单晶硅表面改性及其微观摩擦磨损性能研究现状和进展,就单晶硅微观机械性能和摩擦磨损性能、单晶硅表面沉积薄膜和氧化层的微观机械和摩擦学性能及硅材料表面离子注入和表面纳米化等相关研究进行了归纳总结;指出应当继续深化硅材料表面改性技术及改性层微观摩擦学性能的研究,特别是应当加强硅材料表面离子注入及表面纳米化的研究,从而满足MEMS/NEMS等高技术领域的应用和发展需要. 展开更多
关键词 mems/nems 硅材料 表面改性 微观摩擦学性能
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硅基微机械表面粘附及摩擦性能的AFM试验研究 被引量:4
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作者 解国新 丁建宁 +1 位作者 范真 付永忠 《中国机械工程》 EI CAS CSCD 北大核心 2006年第2期200-203,共4页
在Si(1 0 0)基片上制备了十八烷基三氯硅烷(OTS)分子润滑膜,并用原子力显微镜(AFM)对比研究了施加OTS膜前后的硅表面的粘附、摩擦磨损性能。试验考虑了相对湿度和扫描速度对粘附、摩擦性能的影响。结果表明,相对于硅构件来讲,OTS膜表面... 在Si(1 0 0)基片上制备了十八烷基三氯硅烷(OTS)分子润滑膜,并用原子力显微镜(AFM)对比研究了施加OTS膜前后的硅表面的粘附、摩擦磨损性能。试验考虑了相对湿度和扫描速度对粘附、摩擦性能的影响。结果表明,相对于硅构件来讲,OTS膜表面粘附力较小,具有较小的摩擦因数,呈现较好的润滑性能;硅构件受湿度变化的影响比OTS膜明显。微构件的摩擦性能由于水合化学作用生成Si(OH)4润滑膜,使得其受相互间运动速度影响很大。OTS膜不仅是一种耐磨性较好的润滑膜,而且有良好的稳定性。 展开更多
关键词 原子力显微镜(AFM) 微/纳机电器件(mems/nems) 粘附 摩擦磨损
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基于微纳加工技术的生物传感器研究进展 被引量:5
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作者 李杜娟 陈慧旖 +2 位作者 刘超然 樊凯 王高峰 《电子学报》 EI CAS CSCD 北大核心 2021年第6期1228-1236,共9页
微/纳电子机械系统MEMS/NEMS(Micro/Nano Electro-Mechanical Systems)技术作为一种成熟的微结构制造技术,可实现硅基纳米级传感器器件的批量化、集成化制造,形成具有体积小、质量轻、性能高的微型传感器及其测试系统.生物传感技术可以... 微/纳电子机械系统MEMS/NEMS(Micro/Nano Electro-Mechanical Systems)技术作为一种成熟的微结构制造技术,可实现硅基纳米级传感器器件的批量化、集成化制造,形成具有体积小、质量轻、性能高的微型传感器及其测试系统.生物传感技术可以将生物敏感反应信号转化为光电等信号而被检测.与其他生物传感器相比,采用MEMS/NEMS技术制备的生物传感器,灵敏度更高、响应时间更短、检测性能更强,更为实现自动化高通量的医学诊断提供了有力的支持.本文着重探讨MEMS/NEMS生物传感器常见的器件类型和对应器件的制备工艺、材料、传感机理、分类及其传感局限,通过综述MEMS/NEMS生物传感器及其国内外研究进展,最后总结MEMS/NEMS生物传感器关键的技术难点与重点,并展望未来MEMS/NEMS生物传感技术的发展前景以及存在的挑战. 展开更多
关键词 mems/nems技术 生物传感技术 器件 传感机理 技术难点
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芯片级集成微系统发展现状研究 被引量:9
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作者 李晨 张鹏 李松法 《中国电子科学研究院学报》 2010年第1期1-10,共10页
概要介绍了芯片级集成微系统的内涵和近期发展态势,分析了它的技术特点,对相关的新技术、新结构和新器件的技术问题作了初步的分析与探讨,为发展新一代微小型电子武器系统提供一部分技术信息。
关键词 微电子器件 光电子/光子器件 mems/nems器件 异构集成 三维集成 芯片级集成微系统
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Casimir效应对微纳机械开关稳定性的影响 被引量:1
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作者 童梓洋 秦苏梅 郭明 《科技信息》 2008年第8期72-73,共2页
在微/纳机械系统中的一个重要问题就是粘附效应(stiction)。在亚微米尺寸下,Casimir力对于粘附效应的影响是最为严重的。本文分析了Casimir效应对于微纳机械开关中与粘附效应相关的两个参数临界初始距离Lmin和临界电压(pull-involtage)... 在微/纳机械系统中的一个重要问题就是粘附效应(stiction)。在亚微米尺寸下,Casimir力对于粘附效应的影响是最为严重的。本文分析了Casimir效应对于微纳机械开关中与粘附效应相关的两个参数临界初始距离Lmin和临界电压(pull-involtage)的影响。在临界电压的分析计算过程中重点讨论了材料性质所产生的作用。随着微纳构件之间距离的减小,材料的导电性和表面粗糙程度对器件的稳定性的影响也越来越大。在微/纳机械系统的制造中,通过选择不同的材料可以极大地改善系统的稳定性。 展开更多
关键词 CASIMIR效应 微纳机械开关(mems/nems swkches) 粘附效应(stiction)
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量子微型推进器的设计模型
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作者 程广贵 丁建宁 王权 《纳米技术与精密工程》 CAS CSCD 2005年第4期295-298,共4页
在航空航天领域飞行器的微型化进程中,各种推进器必须携带燃料,这增加了系统的复杂性.有效提取真空中的“零点能”并以此作为驱动能源,可以消除长期以来微型飞行器须携带燃料的问题.从理论上阐述了真空“零点能”及Casimir力,对真空... 在航空航天领域飞行器的微型化进程中,各种推进器必须携带燃料,这增加了系统的复杂性.有效提取真空中的“零点能”并以此作为驱动能源,可以消除长期以来微型飞行器须携带燃料的问题.从理论上阐述了真空“零点能”及Casimir力,对真空中的两平行平板结构和矩形腔等结构内的Casimir力、真空“零点能”进行了研究,得到不同边界下力随距离的变化规律,提出以Casimir力作为驱动力的量子微型推进系统设计模型,利用该模型可有效地提取真空零点能. 展开更多
关键词 CASIMIR 零点能 微型推进器 mems/nems
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Static analysis of ultra-thin beams based on a semi-continuum model 被引量:5
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作者 Cheng Li Zhi-Jun Zheng +1 位作者 Ji-Lin Yu C.W. Lim 《Acta Mechanica Sinica》 SCIE EI CAS CSCD 2011年第5期713-719,共7页
A linear semi-continuum model with discrete atomic layers in the thickness direction was developed to investigate the bending behaviors of ultra-thin beams with nanoscale thickness.The theoretical results show that th... A linear semi-continuum model with discrete atomic layers in the thickness direction was developed to investigate the bending behaviors of ultra-thin beams with nanoscale thickness.The theoretical results show that the deflection of an ultra-thin beam may be enhanced or reduced due to different relaxation coefficients.If the relaxation coefficient is greater/less than one,the deflection of micro/nano-scale structures is enhanced/reduced in comparison with macro-scale structures.So,two opposite types of size-dependent behaviors are observed and they are mainly caused by the relaxation coefficients.Comparisons with the classical continuum model,exact nonlocal stress model and finite element model (FEM) verify the validity of the present semi-continuum model.In particular,an explanation is proposed in the debate whether the bending stiffness of a micro/nano-scale beam should be greater or weaker as compared with the macro-scale structures.The characteristics of bending stiffness are proved to be associated with the relaxation coefficients. 展开更多
关键词 Bending stiffness · mems/nems · Relaxation coefficient · Semi-continuum model · Size-dependence
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Surface effects of adsorption-induced resonance analysis on micro/nanobeams via nonlocal elasticity
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作者 徐晓建 邓子辰 《Applied Mathematics and Mechanics(English Edition)》 SCIE EI 2013年第1期37-44,共8页
The governing differential equation of micro/nanbeams with atom/molecule adsorption is derived in the presence of surface effects using the nonlocal elasticity. The effects of the nonlocal parameter, the adsorption de... The governing differential equation of micro/nanbeams with atom/molecule adsorption is derived in the presence of surface effects using the nonlocal elasticity. The effects of the nonlocal parameter, the adsorption density, and the surface parameter on the resonant frequency of the micro/nanobeams are investigated. It is found that, in ad- dition to the nonlocal parameter and the surface parameter, the bending rigidity and the adsorption-induced mass exhibit different behaviors with the increase in the adsorption density depending on the adatom category and the substrate material. 展开更多
关键词 micro- and nano-electromechanical system mems/nems sensor nonlocalelasticity surface effect VIBRATION atom/molecule adsorption
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Photo Acoustic Energy Applications for the Detection of Human Arterial Blockages via Multiple Skin/Bone Layers, a Non-Invasive Approach
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作者 Monika Kakani Neeraj Rathi +4 位作者 Ahdy Helmy Ashok Kumar Thella M. D. James Rizkalla Paul Salama Maher E. Rizkalla 《World Journal of Cardiovascular Diseases》 2017年第8期251-270,共20页
The impact of arterial narrowing/blocking caused by plaque buildup in arteries leads to many life-threatening consequences. This is recognized as a cause in heart attacks and peripheral vascular disease. Diagnosing th... The impact of arterial narrowing/blocking caused by plaque buildup in arteries leads to many life-threatening consequences. This is recognized as a cause in heart attacks and peripheral vascular disease. Diagnosing the illness is only feasible after symptoms have presented to the patient. Currently, the standard for visualizing coronary arteries is through angiography, which may have complications, and impact on the healthcare system. Furthermore, cardiac catheterization may also places high health risks, given its overall invasiveness. Cardiac arrhythmias, infection, and contrast dye nephrotoxicity are recognized complications within this process. Therefore, a noninvasive approach may have potentials to reduce patient complications, finances surrounding healthcare, and more efficient patient care through earlier screening and diagnosing. This research addresses a new approach using photoacoustic (PA) imaging. The transmission properties of atherosclerosis within walls of arteries, can be exploited using photo acoustics, to better visualize and characterize the degree and severity of atherosclerosis. The delivered energy is absorbed by components of the vascular tissue converted into heat, leading to transient thermos elastic expansion, which creates an acoustic emission. The thermal response was analyzed for its fall and recovery times that are attributed to the artery fat type. The control parameters, including the frequency, penetration depth, energy levels, and tissue layer sizes, for multilayered structures were considered. The structures investigated were fatty infiltrate within the artery, blood, bones, and skin, within frequency range from 1 MHz to 3 MHz, and typical tissue sizes in the milli to centimeter range. As high as 14 MPas in the acoustic pressure at 1 MHz, resulted in temperature difference of up to 3.4 K. When the operating frequency was altered to 2 MHz, the temperature changed to 23 K. Furthermore, when the frequency was changed to 3 MHz, the temperature moved to 43 K. The changes in temperatures were for nearly 1 second duration. The results obtained in this study suggest that there is high potential for practical models using flexible substrate with infra-red sensors and acoustic devices. 展开更多
关键词 Acoustic Thermal CARDIOVASCULAR Diagnosis mems/nems COMSOL MULTILAYERS NON-INVASIVE
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On-chip mechanical computing:status,challenges,and opportunities
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作者 Luming Wang Pengcheng Zhang +2 位作者 Zuheng Liu Zenghui Wang Rui Yang 《Chip》 2023年第1期58-72,共15页
With increasing challenges towards continued scaling and improve-ment in performance faced by electronic computing,mechanical com-puting has started to attract growing interests.Taking advantage of the mechanical degr... With increasing challenges towards continued scaling and improve-ment in performance faced by electronic computing,mechanical com-puting has started to attract growing interests.Taking advantage of the mechanical degree of freedom in solid state devices,micro/nano-electromechanical systems(MEMS/NEMS)could provide alternative solutions for future computing and memory systems with ultralow power consumption,compatibility with harsh environments,and high reconfigurability.In this review,MEMS/NEMS-enabled memories and logic processors were surveyed,and the prospects and challenges for future on-chip mechanical computing were also analyzed. 展开更多
关键词 mems/nems switch mems/nems resonator Mechanical computing Mechanical memory Low-power computing
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Extraordinary piezoelectric effect induced in two-dimensional rare earth monochalcogenides via reducing system dimensionality
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作者 Neveen I.Atallah Maged El-Kemary +1 位作者 Fabien Pascale Khaled E.El-Kelany 《Journal of Materiomics》 SCIE CSCD 2023年第1期72-81,共10页
Piezoelectricity is pivotal for applications in micro/nanoelectromechanical systems(MEMS/NEMS).Inducing such a property in 2D systems via the reduction of the dimensionality of their corresponding 3D bulk is here expl... Piezoelectricity is pivotal for applications in micro/nanoelectromechanical systems(MEMS/NEMS).Inducing such a property in 2D systems via the reduction of the dimensionality of their corresponding 3D bulk is here explored.Based on DFT theory and Gaussian-type-localized basis sets,the structural,electronic,mechanical,and piezoelectric properties of both 3D and 2D rare earth monochalcogenides RmX(Rm=Tm,Yb,Lu,and X=S,Se,Te)are investigated using the CRYSTAL code.Most intriguingly,the 2D LuX compounds display a buckled structure,where the Lu and X atoms protrude from the monolayer surface leading to an additional out-of-plane piezoelectric effect;(e_(31)=2104.84,1770.28,1689.79 pC/m,and d31=56.37,49.76,and 147.90 pm/V for LuS,LuSe,and LuTe,respectively).Such piezoelectric response is two orders of magnitude larger than the one of recently reported 2D ferroelectric MXenes,and is nearly thirty times larger than the commonly used AlN and GaN bulk structures.Furthermore,the reduced elastic constants obtained,when compared to other 2D materials,confirm the flexibility and softness of the considered 2D systems. 展开更多
关键词 2D materials Rare earth monochalcogenides DFT Gaussian basis CRYSTAL code Piezoelectric effect mems/nems
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