In this paper,we propose an in-process measurement method of the diameter of micro-optical fiber such as a tapered optical fiber.The proposed technique is based on analyzing optically scattered light generated by stan...In this paper,we propose an in-process measurement method of the diameter of micro-optical fiber such as a tapered optical fiber.The proposed technique is based on analyzing optically scattered light generated by standing wave illumination.The proposed method is significant in that it requires an only limited measurement range and does not require a high dynamic range sensor.These properties are suitable for in-process measurement.This experiment verified that the proposed method could measure a fiber diameter as stable as±0.01μm under an air turbulence environment.As a result of comparing the measured diameter distribution with those by scanning electron microscopy,it was confirmed that the proposed method has a measurement accuracy better than several hundred nanometers.展开更多
基金supported by A-STEP from JST and MEXT/JSPS KAKENHI(No.18K18803,20H02040)The authors thank Assistant Professor L.Jin from RCAST,the University of Tokyo,for providing the measured tapered optical fiber.
文摘In this paper,we propose an in-process measurement method of the diameter of micro-optical fiber such as a tapered optical fiber.The proposed technique is based on analyzing optically scattered light generated by standing wave illumination.The proposed method is significant in that it requires an only limited measurement range and does not require a high dynamic range sensor.These properties are suitable for in-process measurement.This experiment verified that the proposed method could measure a fiber diameter as stable as±0.01μm under an air turbulence environment.As a result of comparing the measured diameter distribution with those by scanning electron microscopy,it was confirmed that the proposed method has a measurement accuracy better than several hundred nanometers.
