Development of Wearable Micro-actuator Array for 3-D Virtual Tactile Displays

A novel 4 by 4 array of electromagnetic micro-actuators operating on the principle of voice-coil actuators is presented. The intended application of the array is dynamic tactile stimulation, where multiple actuators generate an illusion of touching a moving pattern. In comparison to earlier designs [1-3], the device has smaller dimensions of 2.28 mm in diameter and 7 mm in length, which allowed its use in an array capable of hosting up to a 5 by 5 set of actuators with a rectangular shape covering an area of 18 mm by 21 mm. Using finite element analysis of several conceptual designs of actuators [1,4,5], it was established that the voice-coil type device (where the coil is the moving part) has most beneficial characteristics for the envisioned application. These include sufficient force over a relatively large distance, allowing tactile stimulation of surfaces with irregular shape, fast response, and small foot-print that matches the density of the tactile sensory neurons in the human finger. Eexperimental evaluation of the operation of neighboring actuators spaced at 3.3 mm apart, indicates that there is no crosstalk between the actuators. The resulting density exceeds that of previously reported alternative designs based on moveable permanent magnets [4,6]. Static force measurement indicate that each micro-actuator can produce at least 26 mN of repulsive force over a stroke of 2100 μm with a peak force of 34 mN. The driving circuit operates at 13.5V and generates a vibration frequency of up to 265 Hz without significant change of the force-displacement characteristics. In the higher frequency range (above 100 Hz) the actuator provides at least 15 mN of force over a slightly reduced stroke of 2300 μm, and a peak force of 21 mN. All of the above parameters meet the required threshold values of tactile human perception known from [2] and [3].

电流变柔性微执行器的操纵机制研究

利用电流变液体的电压－粘性－刚性特性设计的柔性微执行器，具有可控性好、易于操作等特点。本文介绍了电流变液体柔性微执行器的操纵机制．讨论了控制电压与柔性微执行器单元的位移、力、力矩之间的关系．

Biomimetic Cilia Based on MEMS Technology

A review on the research of Micro Electromechanical Systems （MEMS） technology based biomimetic cilia is presented. Biomimetic cilia, enabled by the advancement of MEMS technology, have been under dynamic development for the past decade. After a brief description of the background of cilia and MEMS technology, different biomimetic cilia applications are reviewed. Biomimetic cilia micro-actuators, including micromachined polyimide bimorph biomimetic cilia micro-actuator, electro-statically actuated polymer biomimetic cilia micro-actuator, and magnetically actuated nanorod array biomimetic cilia micro-actuator, are presented. Subsequently micromachined underwater flow biomimetic cilia micro-sensor is studied, followed by acoustic flow micro-sensor. The fabrication of these MEMS-based biomimetic cilia devices, characterization of their physical properties, and the results of their application experiments are discussed.

Theoretical Analysis of Nano Displacement of Nanometer Precision Actuator and Its Application

The kind of micro-/nano-meter precision actuator in cludes a piezoelectric one, an electric deformation one, a magnetic deformation one, a mechanical one, and a mechanical and electrical one. This paper puts forw ard a mechanical and electrical step actuator of nanometer precision, which cons ists of a step motor of large fine-dividing number of step angle, shaft couplin gs, a decelerator of large decelerating ratio, a screw mechanism and a pole of U shape, and has the minimum step displacement of 10 nm, the step displac ement precision of 1 nm, the step frequency of 4 kHz, the maximum loadability of 20 kg. In order to achieve the nano displacement of nano precision by this actu ator, the theoretical analysis of stress and strain must be made on the transmit ting course of nano displacement of the actuator, and their numerical simulation is done by computer. The paper establishes the constitutive equation of 3-D stress and the strain co ordinate equation of the composing system of the nanometer precision actuator. A s a result, the theoretical relation among stress and strain and displacement is set up. The torque of the step motor produces a thrust to transmit the displace ment of the above system of the parts and assemblies to output the needed nano d isplacement. In the case of concrete analysis and calculating, the comparing met hod of film-roof is applied to analyze and calculate the motor axis, decelerato r axes, the screw pole and the nut. The analysis method of plane stress and stra in is used to analyze and calculate the shaft couplings and gears. The analysis method of beam stress and strain is used to do the pole of U shape. These calcul ation is belong to the physical non-linear problem. Under the condition of smal l deformation, the analysis way of the finite element can be combined with the a bove analyses and calculations. The elementary analysis results show that the na nometer precision actuator can be applied in STM nanofabrication.

Achieving room-temperature M_(2)-phase VO_(2) nanowires for superior thermal actuation

Vanadium dioxide (VO_(2)) has emerged as a promising micro-actuator material for its large amplitude and high work density across the transition between the insulating (M_(1) and M_(2)) and metallic (R) phase. Even though M_(2)–R transition offers about 70% higher transformation stress than M_(1)–R structural phase transition, the application of the M_(2) phase in the micro-actuators is hindered by the fact that previously, M_(2) phase can only stay stable under tensile stress. In this work, we propose and verify that by synthesizing the VO_(2) nanowires under optimized oxygen-rich conditions, stoichiometry change can be introduced into the nanowires (NWs) which in turn yield a large number free-standing single-crystalline M_(2)-phase NWs stable at room temperature. In addition, we demonstrate that the output stress of the M_(2)-phase NWs is about 65% higher than that of the M_(1)-phase NWs during their transition to R phase, quite close to the theoretical prediction. Our findings open new avenues towards enhancing the performance of VO_(2)-based actuators by using M_(2)–R transition.