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Atomic-scale insights of indium segregation and its suppression by GaAs insertion layer in InGaAs/AlGaAs multiple quantum wells 被引量:1
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作者 马淑芳 李磊 +8 位作者 孔庆波 徐阳 刘青明 张帅 张西数 韩斌 仇伯仓 许并社 郝晓东 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第3期544-548,共5页
The In segregation and its suppression in InGaAs/AlGaAs quantum well are investigated by using high-resolution x-ray diffraction(XRD)and photoluminescence(PL),combined with the state-of-the-art aberration corrected sc... The In segregation and its suppression in InGaAs/AlGaAs quantum well are investigated by using high-resolution x-ray diffraction(XRD)and photoluminescence(PL),combined with the state-of-the-art aberration corrected scanning transmission electron microscopy(Cs-STEM)techniques.To facility our study,we grow two multiple quantum wells(MQWs)samples,which are almost identical except that in sample B a thin GaAs layer is inserted in each of the InGaAs well and AlGaAs barrier layer comparing to pristine InGaAs/AlGaAs MQWs(sample A).Our study indeed shows the direct evidences that In segregation occurs in the InGaAs/AlGaAs interface,and the effect of the Ga As insertion layer on suppressing the segregation of In atoms is also demonstrated on the atomic-scale.Therefore,the atomic-scale insights are provided to understand the segregation behavior of In atoms and to unravel the underlying mechanism of the effect of GaAs insertion layer on the improvement of crystallinity,interface roughness,and further an enhanced optical performance of InGaAs/AlGaAs QWs. 展开更多
关键词 Ingaas/algaas quantum well gaas insertion layer In segregation scanning transmission electron microscopy
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基于MOCVD技术的长波AlGaAs/GaAs量子阱红外焦平面探测器 被引量:10
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作者 李献杰 刘英斌 +6 位作者 冯震 过帆 赵永林 赵润 周瑞 娄辰 张世祖 《红外与激光工程》 EI CSCD 北大核心 2007年第4期435-438,共4页
采用n型掺杂背面入射AlGaAs/GaAs量子阱结构,用MOCVD外延生长和GaAs集成电路工艺,设计制作了大面积AlGaAs/GaAs QWIP单元测试器件和128×128、128×160、256×256 AlGaAs/GaAsQWIP焦平面探测器阵列。用液氮温度下的暗电流... 采用n型掺杂背面入射AlGaAs/GaAs量子阱结构,用MOCVD外延生长和GaAs集成电路工艺,设计制作了大面积AlGaAs/GaAs QWIP单元测试器件和128×128、128×160、256×256 AlGaAs/GaAsQWIP焦平面探测器阵列。用液氮温度下的暗电流和傅里叶红外响应光谱对单元测试器件进行了评估,针对不同材料结构,实现了9μm和10.9μm的截止波长;黑体探测率最高达到2.6×109 cm.Hz1/2.W-1。将128×128 AlGaAs/GaAs QWIP阵列芯片与CMOS读出电路芯片倒装焊互连,成功演示了室温环境下目标的红外热成像;并进一步讨论了提高QWIP组件成像质量的途径。 展开更多
关键词 mocvd algaas/gaas 量子阱红外探测器 红外热成像
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MOCVD与MBE生长GaAs/AlGaAs量子阱材料的红外探测器特性比较 被引量:5
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作者 李娜 李宁 +9 位作者 陆卫 窦红飞 陈张海 刘兴权 沈学础 H.H.Tan LanFu C.Jagadish M.B.Johnston M.Gal 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2000年第5期441-444,共4页
用金属有机物化学气相沉积法 ( MOCVD)生长 Ga As/Al Ga As量子阱材料 ,并制成红外探测器 .测量了材料的光致发光光谱和探测器的光电流响应光谱及其它光电特性 ,峰值波长7.9μm,响应率达到 6× 1 0 3V/W,与分子束外延法 ( MBE)生长... 用金属有机物化学气相沉积法 ( MOCVD)生长 Ga As/Al Ga As量子阱材料 ,并制成红外探测器 .测量了材料的光致发光光谱和探测器的光电流响应光谱及其它光电特性 ,峰值波长7.9μm,响应率达到 6× 1 0 3V/W,与分子束外延法 ( MBE)生长的材料和相关器件进行了比较 ,MOCVD法可满足量子阱材料和器件的要求 . 展开更多
关键词 algaas 量子阱 红外探测器 mocvd 砷化镓
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MOCVD生长GaAs/AlGaAs量子阱研究 被引量:1
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作者 任红文 黄柏标 +3 位作者 刘士文 刘立强 徐现刚 蒋民华 《固体电子学研究与进展》 CAS CSCD 北大核心 1992年第1期4-7,共4页
利用常压MOCVD技术在较低生长速率下生长出多种GaAs/AlGaAs多量子阱结构材料,利用低温PL谱和TEM对材料结构进行了表征。所得势阱和势垒结构厚度均匀平整,最窄阱宽为1.8nm。本研究表明,低速率(γ≤0.5nm/s)连续生长工艺能够避免杂质在界... 利用常压MOCVD技术在较低生长速率下生长出多种GaAs/AlGaAs多量子阱结构材料,利用低温PL谱和TEM对材料结构进行了表征。所得势阱和势垒结构厚度均匀平整,最窄阱宽为1.8nm。本研究表明,低速率(γ≤0.5nm/s)连续生长工艺能够避免杂质在界面富集,优于间断生长工艺,且在掺si n^+-GaAs衬底上所得量子阱发光强度高于掺Cr SI-GaAs衬底上的结果。 展开更多
关键词 生长 量子阱 mocvd gaas/algaas
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MOCVD生长GaAs/AlGaAs掺杂量子异质结构工艺评价 被引量:1
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作者 任红文 刘士文 +2 位作者 徐现刚 黄柏标 蒋民华 《人工晶体学报》 EI CAS CSCD 1993年第2期132-135,共4页
对常压 MOCVD 生长 GaAs/AIGaAs 掺杂多量子阱、超晶格及双极异质晶体管(HBT)和双势垒量子共振隧穿二极管(DBRTD)的生长工艺与结构性能的关系进行了研究。连续生长的量子阱材料载流子低温光荧光(PL)发光波长较间断生长结果蓝移,但强度... 对常压 MOCVD 生长 GaAs/AIGaAs 掺杂多量子阱、超晶格及双极异质晶体管(HBT)和双势垒量子共振隧穿二极管(DBRTD)的生长工艺与结构性能的关系进行了研究。连续生长的量子阱材料载流子低温光荧光(PL)发光波长较间断生长结果蓝移,但强度为后者的10倍,且谱线也较窄。透射电镜(TEM)观察发现,间断生长界面间断处有一因组分波动和杂质吸附产生的亮条纹,且 AlGaAs/GaAs 和 GaAs/AlGaAs 两种异质界面不等同。利用连续生长工艺得到了间断生长未能实现的较高性能的 HBT、DBRTD 器件。 展开更多
关键词 化学汽相沉积 晶体 砷化镓 algaas
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MOCVD Growth of Doped GaAs/AlGaAs Quantum Heterostructures
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作者 任红文 徐现刚 +2 位作者 黄柏标 刘士文 蒋民华 《Rare Metals》 SCIE EI CAS CSCD 1993年第1期25-29,共5页
The influences of growth techniques of AP-MOCVD GaAs/AlGaAs silicon-doped multi-quantum wells (MQWs), heterostructure bipolar transistors (HBTs), double barrier resonant tunneling diodes(DBRTDs) on their structures an... The influences of growth techniques of AP-MOCVD GaAs/AlGaAs silicon-doped multi-quantum wells (MQWs), heterostructure bipolar transistors (HBTs), double barrier resonant tunneling diodes(DBRTDs) on their structures and performances were studied. Continuously grown MQWs, that is, no growth interruption at the heterointerfaces, shown blue-shifted, narrower and stronger photoluminescence(PL) compared with interruptedly grown ones.TEM examination of the interrupted interfaces revealed a bright line corresponding to the compositional fluctuation and impurity adsorption, and indicated noncommutative structures of AlGaAs/GaAs and GaAs/AlGaAs interfaces. High performance HBTs and DBRTDs were obtained by continuously grown method while growth interruption caused performance degradation. It was concluded that growth interruption may cause accumulation of residua1 impurities in the ambient as well as compositional fluctuation while continuous growth at very low growth rates can overcome such problems. 展开更多
关键词 mocvd Interrupted growth gaas / algaas Hetero-interface
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MOCVD生长的高质量掺碳GaAs/AlGaAs材料的特性研究
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作者 廉鹏 邹德恕 +8 位作者 高国 殷涛 陈昌华 徐遵图 陈建新 沈光地 曹青 马骁宇 陈良惠 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2000年第1期44-50,共7页
利用低压金属有机化合物汽相淀积方法,以液态CCl4 为掺杂源生长了高质量的碳掺杂GaAs/AlGaAs外延材料,研究了CCl4 流量、生长温度和Ⅴ/Ⅲ比等因素对外延材料中的碳掺杂水平的影响.采用电化学CV 方法、范德堡... 利用低压金属有机化合物汽相淀积方法,以液态CCl4 为掺杂源生长了高质量的碳掺杂GaAs/AlGaAs外延材料,研究了CCl4 流量、生长温度和Ⅴ/Ⅲ比等因素对外延材料中的碳掺杂水平的影响.采用电化学CV 方法、范德堡霍耳方法、低温光致发光谱和X射线双晶衍射回摆曲线测量等方法对碳掺杂外延材料的电学、光学特性进行了研究.实验制备了空穴浓度高达1.9×1020cm - 3的碳掺杂GaAs 外延材料和低温光致发光谱半宽小于5nm 的高质量碳掺杂Al0.3Ga0.7As 外延层.在材料研究的基础上,我们以碳为P型掺杂剂生长了GaAs/AlGaAs/InGaAs应变量子阱980nm 大功率半导体激光器结构,并获得了室温连续工作1W 以上的光功率输出. 展开更多
关键词 gaas/algaas mocvd 碳掺杂 砷化镓
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优质GaAs/Si和AlGaAs/Si材料的MOCVD生长研究
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作者 高鸿楷 龚平 +2 位作者 王海滨 朱作云 李跃进 《光子学报》 EI CAS CSCD 1993年第2期189-192,共4页
用自制常压MOCVD装置,在Si衬底上生长GaAs和AlGaAs外延层,在高温去除Si衬底表面氧化膜之后,采用两步法,即低温生长过渡层,再提高温度生长外延层。得到了表面镜面光亮的优质GaAs和AlGaAs外延层。X射线双晶衍射仪测试GaAs外延层,其回摆曲... 用自制常压MOCVD装置,在Si衬底上生长GaAs和AlGaAs外延层,在高温去除Si衬底表面氧化膜之后,采用两步法,即低温生长过渡层,再提高温度生长外延层。得到了表面镜面光亮的优质GaAs和AlGaAs外延层。X射线双晶衍射仪测试GaAs外延层,其回摆曲线半峰宽是200孤秒,GaAs和AlGaAs外延层在77K温度下,PL谱半峰宽分别是17meV和24meV。 展开更多
关键词 mocvd 异质结 砷化镓 外延生长
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透射式GaAs光电阴极AlGaAs/GaAs外延层MOCVD过程中应变结构形成的研究
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作者 李晓峰 张景文 +1 位作者 高鸿楷 侯洵 《光子学报》 EI CAS CSCD 北大核心 2002年第2期205-208,共4页
本文介绍了 Al Ga As/ Ga As外延层生长的应变状况的生长温度控制模型 ,并根据Al Ga As/ Ga As外延层 X射线衍射摇摆曲线的分析从实验上验证了 Al Ga As/ Ga
关键词 应变结构 晶格常量 透射式gaas光电阴极 X射线衍射 algaas/gaas外延层 mocvd 镓铝砷化合物 砷化镓 生长温度控制模型
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GaAs插入层对InGaAs/AlGaAs量子阱发光性质的影响
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作者 于海鑫 王海珠 +4 位作者 郎天宇 吕明辉 徐睿良 范杰 邹永刚 《发光学报》 EI CAS CSCD 北大核心 2023年第11期1967-1973,共7页
InGaAs/AlGaAs多量子阱(MQWs)作为一种常见的Ⅲ-Ⅴ族外延材料,通常应用于半导体激光器和太阳能电池等领域。然而,由于量子阱的势阱层和势垒层生长温度不同,铟原子的偏析和多量子阱生长质量较差等问题尚未得到很好的解决。本文设计了一... InGaAs/AlGaAs多量子阱(MQWs)作为一种常见的Ⅲ-Ⅴ族外延材料,通常应用于半导体激光器和太阳能电池等领域。然而,由于量子阱的势阱层和势垒层生长温度不同,铟原子的偏析和多量子阱生长质量较差等问题尚未得到很好的解决。本文设计了一种砷化镓(GaAs)材料作为插入层(ISL),并用于InGaAs/AlGaAs MQWs的结构。PL、XRD、AFM测试表明,GaAs插入层保证了MQWs结构中更多的辐射复合,阻止了铟原子的偏析。但GaAs插入层的引入也会产生“局域态”,影响量子阱的发光性质。本研究可以加深对InGaAs/AlGaAs多量子阱辐射复合机制的理解,并且对引入GaAs插入层的InGaAs/AlGaAs多量子阱发光性质的研究具有重要意义。 展开更多
关键词 Ingaas/algaas多量子阱 局域态 插入层 金属有机化合物气相外延(mocvd)
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The High Quantum Efficiency of Exponential-Doping AlGaAs/GaAs Photocathodes Grown by Metalorganic Chemical Vapor Deposition 被引量:2
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作者 张益军 赵静 +3 位作者 邹继军 牛军 陈鑫龙 常本康 《Chinese Physics Letters》 SCIE CAS CSCD 2013年第4期88-91,共4页
An exponential-doping structure is successfully applied to the preparation of AlGaAs/GaAs photocathodes through the metalorganic chemical vapor deposition(MOCVD)technique.The experimental results show that the quantum... An exponential-doping structure is successfully applied to the preparation of AlGaAs/GaAs photocathodes through the metalorganic chemical vapor deposition(MOCVD)technique.The experimental results show that the quantum efficiency in the entire waveband region for the exponential-doping photocathodes grown by MOCVD is remarkably enhanced as compared to those grown by molecular beam epitaxy.As a result of the improved built-in electric fields and cathode performance parameters,the photoemission characteristics for the MOCVD-grown transmission-mode and reflection-mode AlGaAs/GaAs photocathodes are different over the wavelength region of interest. 展开更多
关键词 algaas/gaas mocvd MODE
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QUANTUM MECHANICAL MODEL AND SIMULATION OF GaAs/AlGaAs QUANTUM WELL INFRARED PHOTO-DETECTOR-ⅠOPTICAL ASPECTS 被引量:2
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作者 Fu Y Willander M +1 位作者 Li Ning Lu W 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2002年第5期321-326,共6页
A complete quantum mechanical model for GaAs?AlGaAs quantum well infrared photodetectors(QWIPs) is presented here. The model consisted of four parts: (1) Starting with the description of the electromagnetic field of t... A complete quantum mechanical model for GaAs?AlGaAs quantum well infrared photodetectors(QWIPs) is presented here. The model consisted of four parts: (1) Starting with the description of the electromagnetic field of the infrared radiation in the QWIP, effective component of the vector potential <| A z |> along the QWIP growth direction ( z axis) due to the optical diffraction grating was calculated. (2) From the wave transmissions and the occupations of the electronic states, it was discussed that the dark current in the QWIP is determined by the drift diffusion current of carriers thermally excited from the ground sublevel in the quantum well to extended states above the barrier. (3) The photocurrent was investigated by the optical transition (absorption coefficient between the ground state to excited states due to the nonzero <| A z |> ). (4) By studying the inter diffusion of the Al atoms across the GaAs?AlGaAs heterointerfaces,the mobility of the drift diffusion carriers in the excited states was calculated, so the measurement results of the dark current and photocurrent spectra can be explained theoretically. With the complete quantum mechanical descriptions of (1 4), QWIP device design and optimization are possible. 展开更多
关键词 gaas/algaas PHOTODETECTOR quantum well infrared photodetector(QWIP) quantum mechanical model
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Effect of growth interruption and strain buffer layer on PL performance of AlGaAs/GaAs/InGaAs quantum well for 1065 nm wavelength lasers
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作者 PANJiaoqing HUANGBaibiao +3 位作者 ZHANGXiaoyang YUEJinshun YUYongqin WEIJiyong 《Rare Metals》 SCIE EI CAS CSCD 2004年第1期64-67,共4页
Strained InGaAs/GaAs quantum well (QW) was grown by low-pressuremetallorganic chemical vapor deposition (MOCVD). Growth interruption and strain buffer layer wereintroduced to improve the photoluminescence (PL) perform... Strained InGaAs/GaAs quantum well (QW) was grown by low-pressuremetallorganic chemical vapor deposition (MOCVD). Growth interruption and strain buffer layer wereintroduced to improve the photoluminescence (PL) performance of the InGaAs/GaAs quantum well. GoodPL results were obtained under condition of growth an interruption of 10 s combined with a moderatestrain buffer layer. Wavelength lasers of 1064 nm using the QW were grown and processed intodevices. Broad area lasers (100 μm x 500 μm) show very low threshold current densities (43 A/cm^2)and high slop efficiency (0.34 W/A, per facet). 展开更多
关键词 algaas/gaas/Ingaas strained quantum well mocvd strain buffer layer growthinterruption laser diodes
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Tuning of the Electron Spin Relaxation Anisotropy via Optical Gating in GaAs/AlGaAs Quantum Wells
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作者 牛秉慧 闫腾飞 +2 位作者 倪海桥 牛智川 张新惠 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第10期120-123,共4页
The carrier-density-dependent spin relaxation dynamics for modulation-doped GaAs/Al0.3 Gao,TAs quantum wells is studied using the time-resolved magneto-Kerr rotation measurements. The electron spin relaxation time and... The carrier-density-dependent spin relaxation dynamics for modulation-doped GaAs/Al0.3 Gao,TAs quantum wells is studied using the time-resolved magneto-Kerr rotation measurements. The electron spin relaxation time and its in-plane anisotropy are studied as a function of the optically injected electron density, Moreover, the relative strength of the Rashba and the Dresselhaus spin-rbit coupling fields, and thus the observed spin relaxation time anisotropy, is further tuned by the additional excitation of a 532nm continuous wave laser, demonstrating an effective spin relaxation manipulation via an optical gating method. 展开更多
关键词 gaas on is Tuning of the Electron Spin Relaxation Anisotropy via Optical Gating in gaas/algaas quantum Wells of in
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Partial Disordering of GaAs/AlGaAs Quantum Well by Rapid Thermal Annealing
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作者 WANG Jian-hua YU Guang-rui +1 位作者 JIN Feng LI De-jie 《Chinese Physics Letters》 SCIE CAS CSCD 1996年第7期531-533,共3页
The partial disordering of GaAs/AlGaAs quantum well(QW)material has been obtained by rapid thermal annealing with SO2 dielectric capping film.In this case,the absorption edge of QW material was shifted apparently.A la... The partial disordering of GaAs/AlGaAs quantum well(QW)material has been obtained by rapid thermal annealing with SO2 dielectric capping film.In this case,the absorption edge of QW material was shifted apparently.A laser and a modulator were integrated on a same chip by partial disordering process on the select4d area of QW wafer which was grown by molecular beam epitaxy. 展开更多
关键词 gaas/algaas MODULATOR quantum
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Demonstration of Far-Infrared GaAs/AlGaAs Quantum Well Photodetectors for Broadband Wavelength Detection
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作者 沈文忠 Perera A.G.U 《Chinese Physics Letters》 SCIE CAS CSCD 2000年第12期921-923,共3页
We discuss the realization of broadband wavelength detection by demonstrating the longest cutoff wavelength(λc=28.6μm)far-infrared GaAs/AIGaAs quantum well infrared photodetectors(QWIPs).The responsivity is comparab... We discuss the realization of broadband wavelength detection by demonstrating the longest cutoff wavelength(λc=28.6μm)far-infrared GaAs/AIGaAs quantum well infrared photodetectors(QWIPs).The responsivity is comparable to that of mid-infrared GaAs/AIGaAs and InGaAs/GaAs QWIPs,with a responsivity of 0.265 A/W and detectivity of 3.4x109 cm.Hz1/2/W at the peak wavelength of 26.9μm at 4.2K.Based on the temperature-dependent dark current and response results,it is expected that similar performance can be obtained at least up to 20 K.Several ways to expand the wavelength coverage are also addressed. 展开更多
关键词 gaas/algaas Infrared quantum
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Femtosecond Reflections of Bulk GaAs and GaAs/AlGaAs Multiple Quantum Wells
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作者 LI Wei-liang QIU Zhi-ren +3 位作者 PENG Wen-ji HUANG Xu-guang ZHOU Jian-ying YU Zhen-xin 《Chinese Physics Letters》 SCIE CAS CSCD 1996年第3期237-240,共4页
We present room temperature femtosecond rejection studies on the photocarrier dynamics of GaAs and GaAs/AlGaAs multiple quantum wells(MQW).A rising wing with a time constant of about.5 ps and an increased amplitude pe... We present room temperature femtosecond rejection studies on the photocarrier dynamics of GaAs and GaAs/AlGaAs multiple quantum wells(MQW).A rising wing with a time constant of about.5 ps and an increased amplitude per carrier is observed for the MQW sample at carrier densities lower than 5×10^(11) cm^(-2).This phenomenon is explained as the saturation of the excitonic transitions. 展开更多
关键词 gaas/algaas FEMTO quantum
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PHOTOREFLECTANCE STUDY OF GaAs/AlGaAs MULTI-QUANTUM WELLS
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作者 汤寅生 江德生 +1 位作者 庄蔚华 陈宗圭 《Chinese Physics Letters》 SCIE CAS 1987年第10期477-479,共3页
Using photoreflectance(PR)at room temperature,we have studied GaAs/AlGaAs multi-quantum wells(MQWs)grown by molecular beam epitaxy.Analysis shows that the modulation mechanism of PR of MQWs is Stark shift of the subba... Using photoreflectance(PR)at room temperature,we have studied GaAs/AlGaAs multi-quantum wells(MQWs)grown by molecular beam epitaxy.Analysis shows that the modulation mechanism of PR of MQWs is Stark shift of the subbands produced by photo-injection of carriers,which has first derivative functional lineshapes.By fitting the experimental spectra,an unusual transition coming from the interfaces in MQWs was observed. 展开更多
关键词 gaas/algaas reflectance quantum
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InGaAs/AlGaAs量子阱中量子尺寸效应对PL谱的影响 被引量:3
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作者 于永芹 黄柏标 +7 位作者 尉吉勇 潘教青 周海龙 齐云 陈文澜 秦晓燕 张晓阳 任忠祥 《量子电子学报》 CAS CSCD 北大核心 2003年第3期345-349,共5页
本文采用金属有机物化学气相淀积(MOCVD)方法设计并生长了两组InGaAs/AlGaAs应变多量子阱,量子阱的厚度分别为3nm和6nm,对其光致发光谱(PL)进行了研究,二者的发光波长分别为843nm和942nm,用有限深单量子阱理论近似计算了由于量子尺寸效... 本文采用金属有机物化学气相淀积(MOCVD)方法设计并生长了两组InGaAs/AlGaAs应变多量子阱,量子阱的厚度分别为3nm和6nm,对其光致发光谱(PL)进行了研究,二者的发光波长分别为843nm和942nm,用有限深单量子阱理论近似计算了由于量子尺寸效应和应变效应引起的InGaAs/AlGaAs量子阱带隙的改变,这解释了两组样品室温下PL发射波长变化的原因。 展开更多
关键词 Ingaas/algaas量子阱 量子尺寸效应 mocvd 应变效应 金属有机物化学气相淀积 铟钙砷化合物 铝钙砷
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9μm截止波长128×128AlGaAs/GaAs量子阱红外焦平面探测器阵列(英文) 被引量:4
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作者 李献杰 刘英斌 +6 位作者 冯震 过帆 赵永林 赵润 周瑞 娄辰 张世祖 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2006年第8期1355-1359,共5页
报道了128×128 Al GaAs/GaAs量子阱红外焦平面探测器阵列的设计和制作.采用金属有机化学气相淀积外延技术生长外延材料,并在GaAs集成电路工艺线上完成工艺制作.为得到器件参数,设计制作了台面尺寸为300μm×300μm的大面积测... 报道了128×128 Al GaAs/GaAs量子阱红外焦平面探测器阵列的设计和制作.采用金属有机化学气相淀积外延技术生长外延材料,并在GaAs集成电路工艺线上完成工艺制作.为得到器件参数,设计制作了台面尺寸为300μm×300μm的大面积测试器件;77K下2V偏压时暗电流密度为1·5×10-3A/cm2;80K工作温度下,器件峰值响应波长为8·4μm,截止波长为9μm,黑体探测率DB*为3·95×108(cm·Hz1/2)/ W.将128×128元Al GaAs/GaAs量子阱红外焦平面探测器阵列芯片与相关CMOS读出电路芯片倒装焊互连,在80K工作温度下实现了室温环境目标的红外热成像,盲元率小于1%. 展开更多
关键词 algaas/gaas 量子阱红外探测器 红外热成像
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