Investigation of Plasma Polymerized Maleic Anhydride Film in a Middle Frequency Dielectric Barrier Discharge

Plasma polymerized maleic anhydride （MA） was carried out by using maleic anhydride supersaturated ethanol solution as a precursor in a dielectric barrier discharge （DBD）. The film properties were characterized by water contact angle （WCA）, Fourier transfer infrared （FTIR）, X-ray photoelectron spectroscopy （XPS）, atomic force microscope （AFM） analysis, and a thickness profilometer. The influence of the processing parameters on the film properties such as tile power frequency and polymerization zone was investigated. The results show that anhydride group incorporated into the growing films is favorable at the frequency of 80 kHz and working pressure of 50 Pa. The poly （maleic anhydride） film is uniform and compact at an average deposition rate of 8 nm/min.

中频DBD等离子体聚合马来酸酐薄膜的研究

用马来酸酐乙醇溶液为单体,采用脉冲介质阻挡放电(DBD)合成聚马来酸酐薄膜,研究了放电的不同频率,聚合的区域对聚合薄膜性能的影响。通过对薄膜性能的表征:接触角、红外光谱、表面形貌、薄膜厚度,发现在频率为80 kHz,气压50 Pa能聚合表面连续致密的聚马来酸酐薄膜,薄膜的生长速率为8 nm/min。