The importance of point defects in semiconductor and function materials has been studied in detail, but effective means for detecting point defects has notbeen available for a long time. The end of range defects in St...The importance of point defects in semiconductor and function materials has been studied in detail, but effective means for detecting point defects has notbeen available for a long time. The end of range defects in St, produced by 140keVGe+ implantation, were investigated as detectors for measuring the interstitial concentration created by 42 keV B+ implantation. The concentration of interstitial resultingfrom the B+ implantation and the behavior of the interstitial flux under different annealing condition were given. The enhanced diffusion in the boron doped EPI marker,resulting from mobile non-equilibrium interstitials was demonstrated to be transient.Interstitial fluxes arising from processing can be detected by transient enhanced diffusion (TED) of doped marker layers as well.展开更多
针对爆堆岩块图像中因粘连、堆叠、边缘模糊等造成的错误分割问题,提出基于岩块轮廓属性的爆堆图像自适应分割方法。首先对爆堆图像进行预处理,然后采用Phansalkar方法进行二值分割,并采用形态学优化和面积滤波去除噪点,再利用爆堆岩块...针对爆堆岩块图像中因粘连、堆叠、边缘模糊等造成的错误分割问题,提出基于岩块轮廓属性的爆堆图像自适应分割方法。首先对爆堆图像进行预处理,然后采用Phansalkar方法进行二值分割,并采用形态学优化和面积滤波去除噪点,再利用爆堆岩块的轮廓坚实度和迭代腐蚀相结合的方法来标记种子点,最后基于标记的种子点利用分水岭算法对图像进行分割。将该方法用于爆堆图像分割,种子点标记结果表明基于岩块轮廓坚实度的种子点标记方法可避免部分噪点的影响,提高对爆堆岩块标记效率。分割结果表明该方法获得的面积累计曲线与人工分割的面积累计曲线高度相似,3个特征面积参数的最大相对误差仅为4.32%,对于100 cm 2以上的岩块,分割准确率为98.33%。相较于其他用于岩块分割的分水岭改进方法有效地减小了错误分割的可能,实现了基于岩块灰度特征和轮廓特征的爆堆图像高精度自适应分割。展开更多
文摘The importance of point defects in semiconductor and function materials has been studied in detail, but effective means for detecting point defects has notbeen available for a long time. The end of range defects in St, produced by 140keVGe+ implantation, were investigated as detectors for measuring the interstitial concentration created by 42 keV B+ implantation. The concentration of interstitial resultingfrom the B+ implantation and the behavior of the interstitial flux under different annealing condition were given. The enhanced diffusion in the boron doped EPI marker,resulting from mobile non-equilibrium interstitials was demonstrated to be transient.Interstitial fluxes arising from processing can be detected by transient enhanced diffusion (TED) of doped marker layers as well.
文摘针对爆堆岩块图像中因粘连、堆叠、边缘模糊等造成的错误分割问题,提出基于岩块轮廓属性的爆堆图像自适应分割方法。首先对爆堆图像进行预处理,然后采用Phansalkar方法进行二值分割,并采用形态学优化和面积滤波去除噪点,再利用爆堆岩块的轮廓坚实度和迭代腐蚀相结合的方法来标记种子点,最后基于标记的种子点利用分水岭算法对图像进行分割。将该方法用于爆堆图像分割,种子点标记结果表明基于岩块轮廓坚实度的种子点标记方法可避免部分噪点的影响,提高对爆堆岩块标记效率。分割结果表明该方法获得的面积累计曲线与人工分割的面积累计曲线高度相似,3个特征面积参数的最大相对误差仅为4.32%,对于100 cm 2以上的岩块,分割准确率为98.33%。相较于其他用于岩块分割的分水岭改进方法有效地减小了错误分割的可能,实现了基于岩块灰度特征和轮廓特征的爆堆图像高精度自适应分割。
基金国家高技术研究发展计划(863)(the National High-Tech Research and Development Plan of China under Grant No.2006AA01Z324)西北工业大学研究生创业种子基金(the Graduate Starting Seed Fund of Northwestern Polytechnical UniversityNo.Z200752)。