For photovoltaic applications,low-cost SiNx-coated metallurgical grade silicon（MG-Si） wafers were used as substrates for polycrystalline silicon（poly-Si） thick films deposition at temperatures ranging from 640 to8...For photovoltaic applications,low-cost SiNx-coated metallurgical grade silicon（MG-Si） wafers were used as substrates for polycrystalline silicon（poly-Si） thick films deposition at temperatures ranging from 640 to880 ℃ by thermal chemical vapor deposition.X-ray diffraction and Raman results indicated that high-quality poly-Si thick films were deposited at 880 ℃.To obtain n-type poly-Si,the as-deposited poly-Si films were annealed at 880 ℃ capped with a phosphosilicate glass.Electrical properties of the n-type poly-Si thick films were investigated by four-probe and Hall measurements.The carrier concentration and electron mobility of the n-type poly-Si film was estimated to be 1.7 x 1019cm-3and 68.1 cm2V-1s-1,respectively.Highquality poly-Si thick films deposited on MG-Si wafers are very promising for photovoltaic applications.展开更多
基金supported by the National Natural Science Foundation of China (No. 11104288)the Ningbo Natural Science Foundation (No. 2013A610129)Zhejiang Province Preferential Post-doctor Funding Project (No. BSH1302050)
文摘For photovoltaic applications,low-cost SiNx-coated metallurgical grade silicon（MG-Si） wafers were used as substrates for polycrystalline silicon（poly-Si） thick films deposition at temperatures ranging from 640 to880 ℃ by thermal chemical vapor deposition.X-ray diffraction and Raman results indicated that high-quality poly-Si thick films were deposited at 880 ℃.To obtain n-type poly-Si,the as-deposited poly-Si films were annealed at 880 ℃ capped with a phosphosilicate glass.Electrical properties of the n-type poly-Si thick films were investigated by four-probe and Hall measurements.The carrier concentration and electron mobility of the n-type poly-Si film was estimated to be 1.7 x 1019cm-3and 68.1 cm2V-1s-1,respectively.Highquality poly-Si thick films deposited on MG-Si wafers are very promising for photovoltaic applications.
