Using an improved inflexion point method（IIPM）,we investigate atmosphere boundary layer（ABL） height evolution over Hefei during the total solar eclipse on July 22,2009.A lidar ceilometer is used in ground-based ob...Using an improved inflexion point method（IIPM）,we investigate atmosphere boundary layer（ABL） height evolution over Hefei during the total solar eclipse on July 22,2009.A lidar ceilometer is used in ground-based observations.Estimations of ABL heights before,during,and after the solar eclipse are analyzed using the IIPM.Results indicate that the IIPM,which is less sensitive to background noise,is more suitable in detecting ABL height and temporal evolution.Data demonstrate that the total solar eclipse resultes in a decrease in ABL height,indicating a suppression of turbulence activity,similar to that observed during the sunset hours.Changes in ABL height are associated with a slow change in temperature,indicating a significant weakening of penetrative convection and a time lag between ABL response and the reduction in solar radiation.展开更多
Integrated scatterometer for qualification of superpolished substrates for laser-gyro by surface scatter loss measurement is constructed. Different from the qualification of substrate by surface roughness, the scatter...Integrated scatterometer for qualification of superpolished substrates for laser-gyro by surface scatter loss measurement is constructed. Different from the qualification of substrate by surface roughness, the scatterometer measures the forward surface scatter loss to check whether the mirror made of the substrate will be suitable for the required laser-gyro lock-in specification. The scatterometer utilizes convex lens instead of integrating sphere to collect scatter light. Special sample support and baffle are designed to block unwanted light. The result of stability test is given, which is about 0.4% over 10 h.展开更多
A novel angle-resolved scatterometer based on pupil optimization for feature profile measurement in a photolithography process is proposed.The impact of image sensor errors is minimized by optimizing the intensity dis...A novel angle-resolved scatterometer based on pupil optimization for feature profile measurement in a photolithography process is proposed.The impact of image sensor errors is minimized by optimizing the intensity distribution of the incident light using a spatial light modulator.The scatterometry sensitivity of feature measurement at different polarization conditions is calculated using the rigorous coupled-wave and first-order analyses,and the reproducibility of the scatterometer is evaluated.The results show that the sensitivity and reproducibility of the angle-resolved scatterometer increase by 90% and 40% with pupil optimization,respectively.展开更多
基金supported by the New Technology Research Foundation of the Chinese Meteorological Bureau under Grant No.GYHY200706023.
文摘Using an improved inflexion point method（IIPM）,we investigate atmosphere boundary layer（ABL） height evolution over Hefei during the total solar eclipse on July 22,2009.A lidar ceilometer is used in ground-based observations.Estimations of ABL heights before,during,and after the solar eclipse are analyzed using the IIPM.Results indicate that the IIPM,which is less sensitive to background noise,is more suitable in detecting ABL height and temporal evolution.Data demonstrate that the total solar eclipse resultes in a decrease in ABL height,indicating a suppression of turbulence activity,similar to that observed during the sunset hours.Changes in ABL height are associated with a slow change in temperature,indicating a significant weakening of penetrative convection and a time lag between ABL response and the reduction in solar radiation.
文摘Integrated scatterometer for qualification of superpolished substrates for laser-gyro by surface scatter loss measurement is constructed. Different from the qualification of substrate by surface roughness, the scatterometer measures the forward surface scatter loss to check whether the mirror made of the substrate will be suitable for the required laser-gyro lock-in specification. The scatterometer utilizes convex lens instead of integrating sphere to collect scatter light. Special sample support and baffle are designed to block unwanted light. The result of stability test is given, which is about 0.4% over 10 h.
文摘A novel angle-resolved scatterometer based on pupil optimization for feature profile measurement in a photolithography process is proposed.The impact of image sensor errors is minimized by optimizing the intensity distribution of the incident light using a spatial light modulator.The scatterometry sensitivity of feature measurement at different polarization conditions is calculated using the rigorous coupled-wave and first-order analyses,and the reproducibility of the scatterometer is evaluated.The results show that the sensitivity and reproducibility of the angle-resolved scatterometer increase by 90% and 40% with pupil optimization,respectively.
