In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon tech...In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine （NMM）. The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.展开更多
To satisfy the measuring demands for the micro components of the industry, micro/nano probing systems with various ball tips have been developed. However, most of them cannot be used to measure the real micro geometri...To satisfy the measuring demands for the micro components of the industry, micro/nano probing systems with various ball tips have been developed. However, most of them cannot be used to measure the real micro geometrical features high precisely because the parameters of the ball tips are not appropriate. The ball tips with a diameter of less than 100 μm, a sphericity and eccentricity of far less than 1 μm are required urgently. A review on the state-of-the-art of ball tips of micro/nano probing systems is presented. The material characteristics and geometric parameters of now available ball tips are introduced sepa- rately. The existing fabrication methods for the ball tips are demonstrated and summarized. The ball tips＇ future trends, which are smaller diameter, better sphericity and smaller eccentricity, are proposed in view of the practical requirements of high-precision measurement for micro geometrical features. Some challenges have to be faced in future, such as the promotion and high-precision measurement for the small ball tip＇s sphericity and eccentricity. Fusion method without the gravity effect when the molten ball tip solidifying is a more suitable way to fabricate a small diameter ball tip together with a shaft.展开更多
Abstract: A new setup of measuring temperature is developed, which the probe is a micro- power consumptive one with CMOS circuit and is driven by optical power. For transmitting the measured signal and optical power s...Abstract: A new setup of measuring temperature is developed, which the probe is a micro- power consumptive one with CMOS circuit and is driven by optical power. For transmitting the measured signal and optical power signal in a long distance, the fiber technology is applied in this setup.展开更多
为解决微电子机械系统(MEMS)器件三维尺寸高精度测量的难题,研制了一种适用于微纳米三坐标测量机的新型高精度三维接触触发式探头。该探头只用了一个基于四象限感测器的二维角度传感器即可同时实现对测球三维运动的高精度感测。介绍了...为解决微电子机械系统(MEMS)器件三维尺寸高精度测量的难题,研制了一种适用于微纳米三坐标测量机的新型高精度三维接触触发式探头。该探头只用了一个基于四象限感测器的二维角度传感器即可同时实现对测球三维运动的高精度感测。介绍了探头的结构和原理,建立了探头的灵敏度模型和刚度模型,用最优化方法得出了探头结构参数的最优解。对探头的刚度、感测范围、灵敏度、稳定性及触发重复性等性能指标进行了测试。实验结果表明:探头的刚度在三轴方向基本相同,约为1 m N/μm;允许触碰范围超过12μm;灵敏度大于0.5 m V/nm;在恒温环境(20±0.025)℃下,1.3 h内的位移漂移量约为20 nm;触发测量重复性小于40 nm(K=2)。该探头具有精度高、测力小、体积小、成本低、装调方便等优点,可被用于微纳米三坐标测量机。展开更多
基金supported by the Nano Special Projects of Shanghai Science and Technology Commission of China(Grant No.11nm0560800)the Young Scientists Fund of the National Natural Science Foundation of China(Grant No.11104284)
文摘In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine （NMM）. The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.
基金Supported by National Natural Science Foundation of China(Grant Nos.51675157,51475131)State Key Laboratory of Precision Measuring Technology and Instruments of China(Grant No.PIL1401)
文摘To satisfy the measuring demands for the micro components of the industry, micro/nano probing systems with various ball tips have been developed. However, most of them cannot be used to measure the real micro geometrical features high precisely because the parameters of the ball tips are not appropriate. The ball tips with a diameter of less than 100 μm, a sphericity and eccentricity of far less than 1 μm are required urgently. A review on the state-of-the-art of ball tips of micro/nano probing systems is presented. The material characteristics and geometric parameters of now available ball tips are introduced sepa- rately. The existing fabrication methods for the ball tips are demonstrated and summarized. The ball tips＇ future trends, which are smaller diameter, better sphericity and smaller eccentricity, are proposed in view of the practical requirements of high-precision measurement for micro geometrical features. Some challenges have to be faced in future, such as the promotion and high-precision measurement for the small ball tip＇s sphericity and eccentricity. Fusion method without the gravity effect when the molten ball tip solidifying is a more suitable way to fabricate a small diameter ball tip together with a shaft.
文摘Abstract: A new setup of measuring temperature is developed, which the probe is a micro- power consumptive one with CMOS circuit and is driven by optical power. For transmitting the measured signal and optical power signal in a long distance, the fiber technology is applied in this setup.
文摘为解决微电子机械系统(MEMS)器件三维尺寸高精度测量的难题,研制了一种适用于微纳米三坐标测量机的新型高精度三维接触触发式探头。该探头只用了一个基于四象限感测器的二维角度传感器即可同时实现对测球三维运动的高精度感测。介绍了探头的结构和原理,建立了探头的灵敏度模型和刚度模型,用最优化方法得出了探头结构参数的最优解。对探头的刚度、感测范围、灵敏度、稳定性及触发重复性等性能指标进行了测试。实验结果表明:探头的刚度在三轴方向基本相同,约为1 m N/μm;允许触碰范围超过12μm;灵敏度大于0.5 m V/nm;在恒温环境(20±0.025)℃下,1.3 h内的位移漂移量约为20 nm;触发测量重复性小于40 nm(K=2)。该探头具有精度高、测力小、体积小、成本低、装调方便等优点,可被用于微纳米三坐标测量机。
