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Influence of Parameters in the Design of a Faceted Structure for Incoherent Beam Shaping
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作者 Lihong Liu Thierry Engel- +4 位作者 Huwen Ding Yuanzhi Cui Jing Zhang Yayi Wei Manuel Flury 《Journal of Microelectronic Manufacturing》 CAS 2021年第4期1-11,共11页
A reflective faceted structure is proposed to reshaping an incoherent light beam into two focalized spots-To obtain the desired irradiance distribution on a detector,custom optimization function is written,and the two... A reflective faceted structure is proposed to reshaping an incoherent light beam into two focalized spots-To obtain the desired irradiance distribution on a detector,custom optimization function is written,and the two dimensional tilt angles of each facet are optimized automatically in a pure non-sequential mode in Zemax OpticStudio 16.The result is also confirmed inside LightTools&2 from Synopsys.For measuring the quality of the optimization result in the case of two spots focalization,four factors including efficiency on the detector,uniformity,the root mean square error and the correlation coefficient are calculated.These four factors are used to evaluate the influence of several parameters on the irradiance distribution.These parameters include the incidence angle,the divergence angle,the facet size,the source type and the resolution of the facet angular positions.Finally,an analysis of those parameters is made and the performance of this type of component is demonstrated. 展开更多
关键词 Incoherent beam shaping micro lens array custom optimization
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