HIGH PERFORMANCE ELECTRIC FIELD MICRO SENSOR WITH COMBINED DIFFERENTIAL STRUCTURE

This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill.

A 2-Dimensional Micro Flow Sensor with Wide Range Flow Sensing Properties

A new silicon micro flow sensor with multiple temperature sensing elements was proposed and numerically simulated in considering wide range flow measuring properties.The micro flow sensor has three pairs of temperature sensing elements with a central heater compared with typical sensor which has only a temperature sensing element on each side of a central heater.A numerical analysis of the micro flow sensor by Finite Difference Formulation for Heat Transfer Equation was performed.The nearest pair of temperature sensor showed very good linear sensitivity between 0 to 0.4m/s flow and saturated from 0.75m/s flow.However the furthest pair of temperature sensor showed some flow sensitivity even though the flow rate of 2.0m/s.Thus,this suggested new micro flow meter with multiple temperature sensing elements could be used as a thermal mass flow sensor which has accuracy sensitivity for very wide flow range.

Design and implementation of a hybrid circuit system for micro sensor signal processing

This paper covers a micro sensor analog signal processing circuit system（MASPS） chip with low power and a digital signal processing circuit board implementation including hardware connection and software design. Attention has been paid to incorporate the MASPS chip into the digital circuit board.The ultimate aim is to form a hybrid circuit used for mixed-signal processing,which can be applied to a micro sensor flow monitoring system.

Micro Gas Sensor Array for Monitoring Highly Toxic Gases

Recently,the possibility of a disaster due to the improper use of highly toxic gases which are known as agents throughout the world has been increased.Therefore,the development of technology for countermeasure against CWA has been highly demanded.In this study,thick film SnO_2-based gas sensing devices were prepared and the sensing properties for the four different kinds of simulants such as dimethyl methyl phosphonate (DMMP),acetonitrile,dichloromethane and dipropylene glycol methyl ether have been investigated.And a micro sensor array consists of six devices was prepared using MEMS technology to provide high selective and reliable sensing system for the detection of chemical warfare agents.The micro gas sensor array prepared showed good sensitivity and selectivity to CWA.

Study on Temperature Modulation Techniques for Micro Gas Sensors

The sensitivity and selectivity of gas sensors are related with not only sensing material,but also their operating temperatures.Applying this property,temperature modulation technique has been proposed to improve the selectivity of gas sensors.With a newly developed alumina based micro gas sensor,the sensitivity to CO and CH_4 at different operating temperatures was investigated.By modulating the temperature of the sensor at pulse and sine wave modes with different frequencies and amplitudes,the dynamic responses of the sensor were measured and processed.Results show that the modulating waveshape plays an important role in the improvement of selectivity,while the influence of frequency is small at the suitable sampling frequency in the range of 25 mHz～200 mHz.

Micro thermal shear stress sensor based on vacuum anodic bonding and bulk-micromachining

This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass （Corning 7740）. This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.

New low noise interface circuit for detecting weak current of micro-sensors

A new low noise interface circuit for detecting weak current of micro-sensors is designed.By using the transimpedance amplifier to substitute the charge amplifier,the closed-loop circuit can avoid the phase error of the charge amplifier.Therefore,the phase compensation devices will be cancelled,because there is no phase transformation through the transimpedance amplifier.As well as,by using CCCII devices to implement the high value feedback resistor of the impedance amplifier,the noise of the I-V transformation devices is reduced,comparing with the passive resistor.The floating resistor is easy to be integrated into chips,making the integration of the interface circuit of the intelligent sensors increase.Through the simulation,the phase error of the charge amplifier is almost 9°at 2 kHz and it changes with the working frequency of the micro-sensors making the phase compensation not easy.The value of the floating resistor is 250 kΩ where the bias current is 50 μA.The noise of the active resistor is 0.037 fV2/Hz,comparing with the noise of the passive resistor,which is 4.14 fV2/Hz.

Axial Micro-Strain Sensor Based on FM-FBG via Dual-Mode ML-FMF in Sensor Networks

An in-fiber axial micro-strain sensor based on a Few Mode Fiber Bragg Grating (FM-FBG) is proposed and experimentally characterized. This FM-FBG is in inscribed in a multi-layer few-mode fiber (ML-FMF), and could acquire the change of the axial strain along fibers, which depends on the transmission dips. On account of the distinct dual-mode property, a good stability of this sensor is realized. The two transmission dips could have the different sensing behaviors. Both the propagation characteristics and operation principle of such a sensor are demonstrated in detail. High sensitivity of the FM-FBG, ~4 pm/με and ~4.5 pm/με within the range of 0 με - 1456 με, is experimentally achieved. FM-FBGs could be easily scattered along one fiber. So this sensor may have a great potential of being used in sensor networks.

A Micro-Payment Based Isolation ofMisbehavior Secure Routing for Sensor Network

In this paper, we present a Micro-payment based Isolation of Misbehavior(MIM) secure routing protocol. The protocol contains three parts: micro-payment scheme, routingdiscovery and malicious nodes detection The micro-payment scheme proposed in MIM is the firstvirtual currency system that can be suit lor sensor network environment, Based on the micro-paymentscheme, we device an energy aware routing protocol, which forwards packets by auction. Furthermore,the base station can detect and isolate misbehave or non-cooptrare nodes according to the routinginformation.

COMPACT PHASE GRATING INTERFERENCE SENSOR FOR MICRO-DISPLACEMENT

On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.

Design of a Silicon Beam Resonator for a Novel Gas Sensor

A new silicon beam resonator design for a novel gas sensor based on simultaneous conductivity and mass change measurement is investigated. High selectivity and sensitivity in gas detection can be obtained by measuring the charge-to-mass ratio of gas molecules. Structures of silicon beam resonators are designed, simulated, and optimized. This gas sensor is fabricated using sacrificial layer microelectronmechanical system technology, and the resonant frequency of the microbeam is measured.

基于micro_bit智能家居系统的设计

随着现代科技的飞速发展,通过远程智能化技术来控制智能家居的方式已越来越贴近于人们的生活。设计将采用开源硬件micro_bit和Yeelink物联网云平台进行监测系统的搭建,并搭载多种传感器如温湿度测量模块、烟雾传感器、火焰传感器、人体红外热释电运动传感器,分别对室内的温度、湿度、火源和烟尘度等进行检测并将各项环境信息显示在LCD1602液晶显示屏上,同时利用无线通信Wi-Fi模块将采集到的环境参数实时传输到Yeelink网络平台,进而实现远程的实时监控,为用户打造便捷、舒适、安全的居家生活体验。实验结果表明,设计的智能家居系统,具有一定的安全性、使用性和推广性。

Quaternion-Based Kalman Filter for Micro-machined Strapdown Attitude Heading Reference System

A Kalman filter used in strapdown AHRS (Attitude Heading Reference System) based on micro machined inertial sensors is introduced. The composition and principle of the system are described. The attitude algorithm and error model of the system are derived based on the quaternion formulation. The real time quaternion based Kalman filter is designed. Simulation results show that accuracy of the system is better than 0.04 degree without disturbance of lateral acceleration and reduced to 0.44 degree with l...

Novel Resonant Accelerometer with Micro Leverage Fabricated by MEMS Technology

For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-resolution inertial-grade novel micro resonant accelerometer is studied.Based on the detecting theory of the resonant sensors,the accelerometer is designed,fabricated,and tested.The accelerometer consists of one proofmass,two micro leverages and two double-ended-tuning-fork （DETF） resonators.The sensing principle of this accelerometer is based on that the natural frequency of the DETF resonator shifts with its axial load which is caused by inertial force.The push-pull configuration of the DETF is for temperature compensation.The two-stage micro leverage mechanisms are employed to amplify the force and increase the sensitivity of the accelerometer.The micro leverage and the resonator are modeled for static analysis and nonlinear modal analysis via theory method and finite element method （FEM）,respectively.The geometrical parameters of them are optimized.The amplification factor of the leverage is 102,and the sensitivity of the resonator on theory is about 62 Hz/g.The samples of the accelerometer are fabricated with deep reactive ion etching （DRIE） technology which can get a high-aspect ratio structure for contributing a greater sensing-capacitance.The measuring results of the samples by scanning electron microscopy （SEM） show that the process is feasible,because of the complete structure,the sound combs and micro leverages,and the acceptable errors.The frequency of the resonator and the sensitivity of the accelerometer are tested via printed circuit board （PCB）,respectively.The result of the test shows that the frequency of the push-resonator is about 54 530 Hz and the sensitivity of the accelerometer is about 55 Hz/g.The amplification factor of the leverage is calculated more accurately because the coupling of the two stages leverage is considered during derivation of the analysis formula.In addition,the novel differential structure of the accelerometer can greatly improve the sensitivity of the accelerometers.

Improvement of a Real Gas-Sensor for the Origin of Methane Selectivity Degradation by l-XAFS Investigation

We have directly investigated the chemical state of the Pd species in a real l-gas sensor device by examining the l-fluorescence X-ray absorption fine structure. The l-gas sensor device was heavily damaged by a heating process in which the temperature was ill-controlled, resulting in decrease of methane selectivity. We found that the Pd O in the fresh l-gas sensor was reduced to Pd metal particles as the methane selectivity decreased. Based on the investigation results, we modified the device structure so as to heat up homogeneously. The lifetime of the sensor was then successfully increased by more than 5 years.

Metal–Organic Framework-Based Sensors for Environmental Contaminant Sensing

Increasing demand for timely and accurate environmental pollution monitoring and control requires new sensing techniques with outstanding performance, i.e.,high sensitivity, high selectivity, and reliability. Metal–organic frameworks(MOFs), also known as porous coordination polymers, are a fascinating class of highly ordered crystalline coordination polymers formed by the coordination of metal ions/clusters and organic bridging linkers/ligands. Owing to their unique structures and properties,i.e., high surface area, tailorable pore size, high density of active sites, and high catalytic activity, various MOF-based sensing platforms have been reported for environmental contaminant detection including anions, heavy metal ions,organic compounds, and gases. In this review, recent progress in MOF-based environmental sensors is introduced with a focus on optical, electrochemical, and field-effect transistor sensors. The sensors have shown unique and promising performance in water and gas contaminant sensing. Moreover, by incorporation with other functional materials, MOF-based composites can greatly improve the sensor performance. The current limitations and future directions of MOF-based sensors are also discussed.

Carbon nanotube cuprous oxide composite based pressure sensors

In this paper, we present the design, the fabrication, and the experimental results of carbon nanotube （CNT） and Cu20 composite based pressure sensors. The pressed tablets of the CNT Cu20 composite are fabricated at a pressure of 353 MPa. The diameters of the multiwalled nanotubes （MWNTs） are between 10 nm and 30 nm. The sizes of the Cu20 micro particles are in the range of 3-4 μm. The average diameter and the average thickness of the pressed tablets are 10 mm and 4.0 mm, respectively. In order to make low resistance electric contacts, the two sides of the pressed tablet are covered by silver pastes. The direct current resistance of the pressure sensor decreases by 3.3 times as the pressure increases up to 37 kN/m^2. The simulation result of the resistance-pressure relationship is in good agreement with the experimental result within a variation of ±2%.

Micro-arc oxidization fabrication and ethanol sensing performance of Fe-doped TiO_2 thin films

In-situ pure TiO2 and Fe-doped TiO2 thin films were synthesized on Ti plates via the micro-arc oxidation （MAO） technique. The as-fabricated anatase TiO2 thin film-based conductometric sensors were employed to measure the gas sensitivity to ethanol. The results showed that Fe ions could be easily introduced into the MAO-TiO2 thin films by adding precursor K4（FeCN）6＇3H20 into the NaaPO4 electrolyte. The amount of doped Fe ions increased almost linearly with the concentration of Kg（FeCN）63H20 increasing, eventually affecting the ethanol sensing performances of TiO2 thin films. It was found that the enhanced sensor signals obtained had an optimal concentration of Fe dopant （1.28at%）, by which the maximal gas sensor signal to 1000 ppm ethanol was estimated to be 7.91 at 275℃. The response time was generally reduced by doped Fe ions, which could be ascribed to the increase of oxygen vacancies caused by Fe3＋ substituting for Ti4＋.

A NOVEL MICRO-PELLISTOR BASED ON NANOPOROUS ALUMINA BEAM SUPPORT

The traditional design of the catalytic combustion gas sensor in Micro ElectroMechanical Systems (MEMS) micro-hotplate employs a Pt resistive track as the micro-heater. The realized structure and fabrication are the key elements of the micro-hotplate. Directly fabrication of micro-pellsitor catalyst is very difficult because of the small dimensions of the active area. In this paper, a novel micro-pellistor was designed by combining micro fabrication technique and nano technology. The supporting beams and micro-hotplate of the micro-pellistor were made of nonoporous alumina film. The active area of the designed and fabricated micro-pellistors ranges from 200×200 μm2 to 450×300 μm2. The micro- pellistor was heated by platinum thin film heater and the Pd catalyst was deposited by dipping the PdCl2 solution on the detecting element. The lowest power consumption is 50 mW at 500 °C and the maximum temperature can reach 900 °C before rupture. The response of the devices to methane is also tested. The new design provides a new way to fabricate micro-pellistor.