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Model of Polysilicon Electro-thermal Micro Actuator and Research of Micro Scale Effect 被引量:2
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作者 张永宇 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2004年第B10期59-62,共4页
A type of crank beam electro-thermal micro actuator was prescribed. Mechanical model of the actuator was established, and the static characteristic was analyzed.Comparing the theoretical analysis with experimental dat... A type of crank beam electro-thermal micro actuator was prescribed. Mechanical model of the actuator was established, and the static characteristic was analyzed.Comparing the theoretical analysis with experimental data, it is found that the thermodynamic character of material in micro actuator has a different variable regularity contrasted to that used in macro scale machines. It is the micro scale effect that results in the deviation between the simulating result and experimental results. The thermodynamic expression of polysilicon, which was fitted by means of the experimental data concerned, was used to modify the mechanical model. The modified model, in which the micro scale thermodynamic characteristic was considered, was more reasonable and could make the optimal design and control strategies analyzing the straight-line micro actuator more feasible. 展开更多
关键词 MEMS electro-thermal micro actuator micro scale effect thermal expansion coefficient
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Encryption/decryption and microtarget capturing by pH-driven Janus microstructures fabricated by the same femtosecond laser printing parameters 被引量:4
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作者 Zhaoxin Lao Rui Sun +6 位作者 Dongdong Jin Zhongguo Ren Chen Xin Yachao Zhang Shaojun Jiang Yiyuan Zhang Li Zhang 《International Journal of Extreme Manufacturing》 EI 2021年第2期89-97,共9页
Several natural organism can change shape under external stimuli. These natural phenomena have inspired a vast amount of research on exploration and implementation of reconfigurable shape transformation. The Janus str... Several natural organism can change shape under external stimuli. These natural phenomena have inspired a vast amount of research on exploration and implementation of reconfigurable shape transformation. The Janus structure is a promising approach to achieve shape transformation based on its heterogeneous chemical or physical properties on opposite sides.However, the heterogeneity is generally realized by multi-step processing, different materials,and/or different processing parameters. Here, we present a simple and flexible method of producing p H-sensitive Janus microactuators from a single material, using the same laser printing parameters. These microactuators exhibit reversible structural deformations with large bending angles of ~31°and fast response(~0.2 s) by changing the p H value of the aqueous environment. Benefited from the high flexibility of the laser printing technique and the spatial arrangements, pillar heights, and bending directions of microactuators are readily controlled,enabling a variety of switchable ordered patterns and complex petal-like structures on flat surfaces and inside microchannels. Finally, we explore the potential applications of this method in information encryption/decryption and microtarget capturing. 展开更多
关键词 micro actuator smart material pH hydrogel Janus structure laser printing
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ANALYZING ON THE VIBRATION CHARACTERISTICS OF A MICRO PIEZOELECTRIC ROBOT IN PIPELINE
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作者 刘方湖 马培荪 陈建平 《Journal of Shanghai Jiaotong university(Science)》 EI 2001年第1期1-5,共5页
The mathematical model of a micro piezoelectric elastic legged robot in pipeline was founded. The robotic resonant frequency worked out with the mathematical model is nearly equal to the frequency from experiment. It ... The mathematical model of a micro piezoelectric elastic legged robot in pipeline was founded. The robotic resonant frequency worked out with the mathematical model is nearly equal to the frequency from experiment. It indicates that the mathematical model of the robot is correct. Besides, it studied the piezoelectric robotic structure parameters’ effect on the robotic performance. The result of the analysis on the robot constructs the base of an optimal design of a piezoelectric robot. 展开更多
关键词 micro robot micro electromechanical system new elastic walking mechanism piezoelectric micro actuator
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