Photoacoustic imaging(PAI)is a new biomedical imaging technology that provides a mixed contrast mechanism and excellent spatial resolution in biological tissues.It is a non-invasive technology that can provide in vivo...Photoacoustic imaging(PAI)is a new biomedical imaging technology that provides a mixed contrast mechanism and excellent spatial resolution in biological tissues.It is a non-invasive technology that can provide in vivo anatomical and functional information.This technology has great application potential in microscopic imaging and endoscope system.In recent years,the devel-opment of micro electro mechanical system(MEMS)technology has promoted the improvement and miniaturization of the photoacoustic imaging system,as well as its preclinical and clinical appli-cations.This paper introduces the research progress of MEMS technology in photoacoustic micro-scope systems and the miniaturization of photoacoustic endoscope ultrasonic transducers,and points out the shortcomings of existing technology and the direction of future development.展开更多
In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system （MEMS） gyroscope are analyzed in principle. A novel drive circuit for...In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system （MEMS） gyroscope are analyzed in principle. A novel drive circuit for the MEMS gyroscope in digital closed-loop control is proposed, which utilizes a digital phase-locked loop （PLL） in frequency control and an automatic gain control （AGC） method in amplitude control. A digital processing circuit with a field programmable gate array （FPGA） is designed and the experiments are carried out. The results indicate that when the temperature changes, the drive frequency can automatically track the resonant frequency of gyroscope in drive mode and that of the oscillating amplitude holds at a set value. And at room temperature, the relative deviation of the drive frequency is 0.624 ×10^-6 and the oscillating amplitude is 8.0 ×10^-6, which are 0. 094% and 18. 39% of the analog control program, respectively. Therefore, the control solution of the digital PLL in frequency and the AGC in amplitude is feasible.展开更多
To improve the reliability and accuracy of the global po- sitioning system （GPS）/micro electromechanical system （MEMS）- inertial navigation system （INS） integrated navigation system, this paper proposes two diff...To improve the reliability and accuracy of the global po- sitioning system （GPS）/micro electromechanical system （MEMS）- inertial navigation system （INS） integrated navigation system, this paper proposes two different methods. Based on wavelet threshold denoising and functional coefficient autoregressive （FAR） model- ing, a combined data processing method is presented for MEMS inertial sensor, and GPS attitude information is also introduced to improve the estimation accuracy of MEMS inertial sensor errors. Then the positioning accuracy during GPS signal short outage is enhanced. To improve the positioning accuracy when a GPS signal is blocked for long time and solve the problem of the tra- ditional adaptive neuro-fuzzy inference system （ANFIS） method with poor dynamic adaptation and large calculation amount, a self-constructive ANFIS （SCANFIS） combined with the extended Kalman filter （EKF） is proposed for MEMS-INS errors modeling and predicting. Experimental road test results validate the effi- ciency of the proposed methods.展开更多
Fuze micro-electro-mechanical system（MEMS） has become a popular subject in recent years.Studies have been done for the application of MEMS-based fuze safety and arm devices.The existing researches mainly focused on ...Fuze micro-electro-mechanical system（MEMS） has become a popular subject in recent years.Studies have been done for the application of MEMS-based fuze safety and arm devices.The existing researches mainly focused on reducing the cost and volume of the fuze safety device.The reduction in volume allows more payload and,thus,makes small-caliber rounds more effective and the weapon system more affordable.At present,MEMS-based fuze safety devices are fabricated mainly by using deep reactive ion ething or LIGA technology,and the fabrication process research on the fuze MEMS safety device is in the exploring stage.In this paper,a new micro fabrication method of metal-based fuze MEMS safety device is presented based on ultra violet（UV）-LIGA technology.The method consists of SU-8 thick photoresist lithography process,micro electroforming process,no back plate growing process,and SU-8 photoresist sacrificial layer process.Three kinds of double-layer moveable metal devices have been fabricated on metal substrates directly with the method.Because UV-LIGA technology and no back plate growing technology are introduced,the production cycle is shortened and the cost is reduced.The smallest dimension of the devices is 40 μm,which meets the requirement of size.To evaluate the adhesion property between electroforming deposit layer and substrate qualitatively,the impact experiments have been done on the device samples.The experimental result shows that the samples are still in good condition and workable after undergoing impact pulses with 20 kg peak and 150 μs duration and completely met the requirement of strength.The presented fabrication method provides a new option for the development of MEMS fuze and is helpful for the fabrication of similar kinds of micro devices.展开更多
From aspect of electromechanical coupling,the probable conditions that cause rolling mill chatter to lead to periodic thickness error or bring about light and shade streaks on the surface of steel strip were studied. ...From aspect of electromechanical coupling,the probable conditions that cause rolling mill chatter to lead to periodic thickness error or bring about light and shade streaks on the surface of steel strip were studied. CM04 temper mill, a typical complicated electromechanical system, was taken as object of study to explore electromechanical coupling facts in complicated electromechanical system. Four modes of electromechanical coupling and their acting principle and law were expounded. Some suggests and measures were put forward for designing of a class of complicated electromechanical system.展开更多
In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon tech...In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine （NMM）. The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.展开更多
基金supported by the National Natural Science Foundation of China(No.32101153)the Fundamental Research Funds for the Central Universities(No.2021CX11018).
文摘Photoacoustic imaging(PAI)is a new biomedical imaging technology that provides a mixed contrast mechanism and excellent spatial resolution in biological tissues.It is a non-invasive technology that can provide in vivo anatomical and functional information.This technology has great application potential in microscopic imaging and endoscope system.In recent years,the devel-opment of micro electro mechanical system(MEMS)technology has promoted the improvement and miniaturization of the photoacoustic imaging system,as well as its preclinical and clinical appli-cations.This paper introduces the research progress of MEMS technology in photoacoustic micro-scope systems and the miniaturization of photoacoustic endoscope ultrasonic transducers,and points out the shortcomings of existing technology and the direction of future development.
基金The National Natural Science Foundation of China(No. 60974116 )the Research Fund of Aeronautics Science (No.20090869007)Specialized Research Fund for the Doctoral Program of Higher Education (No. 200902861063)
文摘In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system （MEMS） gyroscope are analyzed in principle. A novel drive circuit for the MEMS gyroscope in digital closed-loop control is proposed, which utilizes a digital phase-locked loop （PLL） in frequency control and an automatic gain control （AGC） method in amplitude control. A digital processing circuit with a field programmable gate array （FPGA） is designed and the experiments are carried out. The results indicate that when the temperature changes, the drive frequency can automatically track the resonant frequency of gyroscope in drive mode and that of the oscillating amplitude holds at a set value. And at room temperature, the relative deviation of the drive frequency is 0.624 ×10^-6 and the oscillating amplitude is 8.0 ×10^-6, which are 0. 094% and 18. 39% of the analog control program, respectively. Therefore, the control solution of the digital PLL in frequency and the AGC in amplitude is feasible.
基金supported by the National Natural Science Foundation of China (60902055)
文摘To improve the reliability and accuracy of the global po- sitioning system （GPS）/micro electromechanical system （MEMS）- inertial navigation system （INS） integrated navigation system, this paper proposes two different methods. Based on wavelet threshold denoising and functional coefficient autoregressive （FAR） model- ing, a combined data processing method is presented for MEMS inertial sensor, and GPS attitude information is also introduced to improve the estimation accuracy of MEMS inertial sensor errors. Then the positioning accuracy during GPS signal short outage is enhanced. To improve the positioning accuracy when a GPS signal is blocked for long time and solve the problem of the tra- ditional adaptive neuro-fuzzy inference system （ANFIS） method with poor dynamic adaptation and large calculation amount, a self-constructive ANFIS （SCANFIS） combined with the extended Kalman filter （EKF） is proposed for MEMS-INS errors modeling and predicting. Experimental road test results validate the effi- ciency of the proposed methods.
基金supported by National Basic Research Program of China(973 Program,Grant No. 2007CB714502)National Natural Science Foundation of China (Grant No. 50675025)
文摘Fuze micro-electro-mechanical system（MEMS） has become a popular subject in recent years.Studies have been done for the application of MEMS-based fuze safety and arm devices.The existing researches mainly focused on reducing the cost and volume of the fuze safety device.The reduction in volume allows more payload and,thus,makes small-caliber rounds more effective and the weapon system more affordable.At present,MEMS-based fuze safety devices are fabricated mainly by using deep reactive ion ething or LIGA technology,and the fabrication process research on the fuze MEMS safety device is in the exploring stage.In this paper,a new micro fabrication method of metal-based fuze MEMS safety device is presented based on ultra violet（UV）-LIGA technology.The method consists of SU-8 thick photoresist lithography process,micro electroforming process,no back plate growing process,and SU-8 photoresist sacrificial layer process.Three kinds of double-layer moveable metal devices have been fabricated on metal substrates directly with the method.Because UV-LIGA technology and no back plate growing technology are introduced,the production cycle is shortened and the cost is reduced.The smallest dimension of the devices is 40 μm,which meets the requirement of size.To evaluate the adhesion property between electroforming deposit layer and substrate qualitatively,the impact experiments have been done on the device samples.The experimental result shows that the samples are still in good condition and workable after undergoing impact pulses with 20 kg peak and 150 μs duration and completely met the requirement of strength.The presented fabrication method provides a new option for the development of MEMS fuze and is helpful for the fabrication of similar kinds of micro devices.
文摘From aspect of electromechanical coupling,the probable conditions that cause rolling mill chatter to lead to periodic thickness error or bring about light and shade streaks on the surface of steel strip were studied. CM04 temper mill, a typical complicated electromechanical system, was taken as object of study to explore electromechanical coupling facts in complicated electromechanical system. Four modes of electromechanical coupling and their acting principle and law were expounded. Some suggests and measures were put forward for designing of a class of complicated electromechanical system.
基金supported by the Nano Special Projects of Shanghai Science and Technology Commission of China(Grant No.11nm0560800)the Young Scientists Fund of the National Natural Science Foundation of China(Grant No.11104284)
文摘In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine （NMM）. The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.
