Gas flow in a micro-channel usually has a high Knudsen number. The predominant predictive tool for such a microflow is the direct simulation Monte Carlo(DSMC) method, which is used in this paper to investigate primary...Gas flow in a micro-channel usually has a high Knudsen number. The predominant predictive tool for such a microflow is the direct simulation Monte Carlo(DSMC) method, which is used in this paper to investigate primary flow properties of supersonic gas in a circular micro-channel for different inflow conditions, such as free stream at different altitudes, with different incoming Mach numbers, and with different angles of attack. Simulation results indicate that the altitude and free stream incoming Mach number have a significant effect on the whole micro-channel flow field, whereas the angle of attack mainly affects the entrance part of micro-channel flow field. The fundamental mechanism behind the simulation results is also presented. With the increase of altitude, thr free stream would be partly prevented from entering into micro-channel.Meanwhile, the gas flow in micro-channel is decelerated, and the increase in the angle of attack also decelerates the gas flow. In contrast, gas flow in micro-channel is accelerated as free stream incoming Mach number increases. A noteworthy finding is that the rarefaction effects can become very dominant when the free stream incoming Mach number is low. In other words, a free stream with a larger incoming velocity is able to reduce the influence of the rarefaction effects on gas flow in the micro-channel.展开更多
通过实验研究了微型流化床多阶段原位反应分析仪(MFB-MIRA)检测快速气固反应气体逸出过程的适应性。研究表明,取样毛细管的伴热性能对在线测量的稳定性有重要影响。基于所得规律,将精密温控器配置于毛细管的伴热系统,毛细管温度的控制...通过实验研究了微型流化床多阶段原位反应分析仪(MFB-MIRA)检测快速气固反应气体逸出过程的适应性。研究表明,取样毛细管的伴热性能对在线测量的稳定性有重要影响。基于所得规律,将精密温控器配置于毛细管的伴热系统,毛细管温度的控制精度达到±0.2℃,从而实现了取样流量和腔室真空度的稳定化。实测结果表明,改造后在线测量的周期性波动消失,稳定性显著提高。空气中O_2测量响应的波动度和30 s相对标准偏差由1.9%和0.5%,优化至1.4%和0.2%。同时还开发了精确控制取样点绝对压力的调节装置,使取样点绝对压力的控制精度达到±0.02 k Pa。实验结果表明,取样点绝对压力与过程质谱仪的响应呈正相关,准确控制取样点绝对压力非常必要。本研究提高了过程质谱仪测量结果的准确性和重复性,提升了MFB-MIRA分析快速气固反应的适应性,进而拓宽了MFB-MIRA及过程质谱仪可靠应用的范围。展开更多
研制了一种微量程段的热式气体质量流量传感器。传感器芯片通过微机电系统(MEMS)工艺制备,芯片包括上下游测温电阻器和环境电阻器,其中测温电阻器有4只,对称分布在芯片中央位置,构成惠斯通电桥,芯片工作中采用恒压模式驱动。当气体流过...研制了一种微量程段的热式气体质量流量传感器。传感器芯片通过微机电系统(MEMS)工艺制备,芯片包括上下游测温电阻器和环境电阻器,其中测温电阻器有4只,对称分布在芯片中央位置,构成惠斯通电桥,芯片工作中采用恒压模式驱动。当气体流过芯片表面时,会导致检测电桥不平衡,流量信号变化转换为相应的电压信号。通过实验标定了传感器的输出曲线并对传感器的精度进行了测试,测试结果表明:研制的传感器在流量0~5 m L/min的量程范围内,具有响应速度快、精度高的优点。展开更多
基金Project supported by the National Natural Science Foundation of China(Grant No.11802264)the Natural Science Foundation of Jiangsu Province,China(Grant No.BK20180896)
文摘Gas flow in a micro-channel usually has a high Knudsen number. The predominant predictive tool for such a microflow is the direct simulation Monte Carlo(DSMC) method, which is used in this paper to investigate primary flow properties of supersonic gas in a circular micro-channel for different inflow conditions, such as free stream at different altitudes, with different incoming Mach numbers, and with different angles of attack. Simulation results indicate that the altitude and free stream incoming Mach number have a significant effect on the whole micro-channel flow field, whereas the angle of attack mainly affects the entrance part of micro-channel flow field. The fundamental mechanism behind the simulation results is also presented. With the increase of altitude, thr free stream would be partly prevented from entering into micro-channel.Meanwhile, the gas flow in micro-channel is decelerated, and the increase in the angle of attack also decelerates the gas flow. In contrast, gas flow in micro-channel is accelerated as free stream incoming Mach number increases. A noteworthy finding is that the rarefaction effects can become very dominant when the free stream incoming Mach number is low. In other words, a free stream with a larger incoming velocity is able to reduce the influence of the rarefaction effects on gas flow in the micro-channel.
文摘通过实验研究了微型流化床多阶段原位反应分析仪(MFB-MIRA)检测快速气固反应气体逸出过程的适应性。研究表明,取样毛细管的伴热性能对在线测量的稳定性有重要影响。基于所得规律,将精密温控器配置于毛细管的伴热系统,毛细管温度的控制精度达到±0.2℃,从而实现了取样流量和腔室真空度的稳定化。实测结果表明,改造后在线测量的周期性波动消失,稳定性显著提高。空气中O_2测量响应的波动度和30 s相对标准偏差由1.9%和0.5%,优化至1.4%和0.2%。同时还开发了精确控制取样点绝对压力的调节装置,使取样点绝对压力的控制精度达到±0.02 k Pa。实验结果表明,取样点绝对压力与过程质谱仪的响应呈正相关,准确控制取样点绝对压力非常必要。本研究提高了过程质谱仪测量结果的准确性和重复性,提升了MFB-MIRA分析快速气固反应的适应性,进而拓宽了MFB-MIRA及过程质谱仪可靠应用的范围。
文摘研制了一种微量程段的热式气体质量流量传感器。传感器芯片通过微机电系统(MEMS)工艺制备,芯片包括上下游测温电阻器和环境电阻器,其中测温电阻器有4只,对称分布在芯片中央位置,构成惠斯通电桥,芯片工作中采用恒压模式驱动。当气体流过芯片表面时,会导致检测电桥不平衡,流量信号变化转换为相应的电压信号。通过实验标定了传感器的输出曲线并对传感器的精度进行了测试,测试结果表明:研制的传感器在流量0~5 m L/min的量程范围内,具有响应速度快、精度高的优点。
