The micromation and precision of the Micro-Electromechanical System demand that its manufacturing, measuring and assembling must work in a micro-manufacturing platform with good ability to isolate vibrations. This pap...The micromation and precision of the Micro-Electromechanical System demand that its manufacturing, measuring and assembling must work in a micro-manufacturing platform with good ability to isolate vibrations. This paper develops a vibration isolation system of micro-manufacturing platform. The brains of many kinds of birds can isolate vibrations well, such as woodpecker’s brain. When a woodpecker pecks the wood at the speed as 1.6 times as the velocity of sound, its brain will tolerate the wallop 1 500 times of the weight of itself without any damage. The isolation mechanics and organic texture of woodpecker’s brain that has good isolation characteristics were studied. A structure model of vibration isolation system for the micro-manufacturing platform is established based on the bionics of the bird’s brain vibration isolation mechanism. In order to isolate effectively the high frequency vibrations from the ground, a rubber layer is used to isolate vibrations passively between the micro-manufacturing platform’s pedestal and the ground. This layer corresponds to the cartilage and muscles in the outer meninges of the bird’s brain. The active vibration isolation technique is adopted to isolate vibrations between the micro-manufacturing platform and the pedestal. Air springs are used as elastic components, which correspond to the interspaces between the outer meninges and the encephala of the bird’s brain. Actuators are made of giant magnetostrictive material, and it corresponds to the nerves and neural muscles linking the meninges and the encephala. The actuators and air springs are arranged vertically in parallel to make use of the giant magnetostrictive actuators effectively. The air springs support almost all weight of the micro-manufacturing platform and the giant magnetostrictive actuators support almost no weight. In order to realize high performance to isolate complex micro-vibration, the control method using a three-layer neural network is presented. This vibration control system takes into account the floor disturbance and the direct disturbance acting on the micro-manufacturing platform. The absolute acceleration of the micro-manufacturing platform is used as the performance index of vibration control. The performance of the control system is tested by numerical simulation. Simulation results show that the active vibration isolation system has good isolation performance against the floor disturbance and the direct disturbance acting on the micro-manufacturing platform in all the frequency range.展开更多
A fully flexure micro/nano transmission platform(MNTP)which has five degrees of freedom is designed on the basis of bridge type amplification mechanism.According to the kinematic theory and the elastic beam theory,the...A fully flexure micro/nano transmission platform(MNTP)which has five degrees of freedom is designed on the basis of bridge type amplification mechanism.According to the kinematic theory and the elastic beam theory,the theoretical output displacement equation of the platform is derived,and then piezoelectric actuator(PZT)is calibrated.Meanwhile,a full closed-loop control strategy of the platform is established using the feedforward proportional-integral-derivative(PID)compound control algorithm based on the Preisach model.Moreover,the total transfer function of the micro positioning system is derived,and the calculation method of output signal is acquired.Finally,the theoretical output displacement is verified by finite element analysis(FEA)and positioning experiments.展开更多
A machining platform of micro wire electrical discharge machining (MWEDM) was developed. The key technology of MWEDM mainly includes granite basement, micro energy pulse generator, detection and servo control system, ...A machining platform of micro wire electrical discharge machining (MWEDM) was developed. The key technology of MWEDM mainly includes granite basement, micro energy pulse generator, detection and servo control system, constant tension winding system and V-block guide wire mechanism. Utilizing micro wire electrode with 30μm in diameter, the MWEDM can machine the micro slot with the minimum size of 38μm wide, and the surface roughness is smaller than 0.1μm, the machining precision is less than 0.5μm, the white layer is no more than 2μm with main cut. All kinds of complex micro parts, such as micro gear, micro bearing bracket and micro shaped holes, can also be machined by using this platform.展开更多
文摘The micromation and precision of the Micro-Electromechanical System demand that its manufacturing, measuring and assembling must work in a micro-manufacturing platform with good ability to isolate vibrations. This paper develops a vibration isolation system of micro-manufacturing platform. The brains of many kinds of birds can isolate vibrations well, such as woodpecker’s brain. When a woodpecker pecks the wood at the speed as 1.6 times as the velocity of sound, its brain will tolerate the wallop 1 500 times of the weight of itself without any damage. The isolation mechanics and organic texture of woodpecker’s brain that has good isolation characteristics were studied. A structure model of vibration isolation system for the micro-manufacturing platform is established based on the bionics of the bird’s brain vibration isolation mechanism. In order to isolate effectively the high frequency vibrations from the ground, a rubber layer is used to isolate vibrations passively between the micro-manufacturing platform’s pedestal and the ground. This layer corresponds to the cartilage and muscles in the outer meninges of the bird’s brain. The active vibration isolation technique is adopted to isolate vibrations between the micro-manufacturing platform and the pedestal. Air springs are used as elastic components, which correspond to the interspaces between the outer meninges and the encephala of the bird’s brain. Actuators are made of giant magnetostrictive material, and it corresponds to the nerves and neural muscles linking the meninges and the encephala. The actuators and air springs are arranged vertically in parallel to make use of the giant magnetostrictive actuators effectively. The air springs support almost all weight of the micro-manufacturing platform and the giant magnetostrictive actuators support almost no weight. In order to realize high performance to isolate complex micro-vibration, the control method using a three-layer neural network is presented. This vibration control system takes into account the floor disturbance and the direct disturbance acting on the micro-manufacturing platform. The absolute acceleration of the micro-manufacturing platform is used as the performance index of vibration control. The performance of the control system is tested by numerical simulation. Simulation results show that the active vibration isolation system has good isolation performance against the floor disturbance and the direct disturbance acting on the micro-manufacturing platform in all the frequency range.
基金Supported by the State Key Laboratory of Mechanical Transmission Independent Research Fund(SKLMT-ZZKT-2012 MS 05)
文摘A fully flexure micro/nano transmission platform(MNTP)which has five degrees of freedom is designed on the basis of bridge type amplification mechanism.According to the kinematic theory and the elastic beam theory,the theoretical output displacement equation of the platform is derived,and then piezoelectric actuator(PZT)is calibrated.Meanwhile,a full closed-loop control strategy of the platform is established using the feedforward proportional-integral-derivative(PID)compound control algorithm based on the Preisach model.Moreover,the total transfer function of the micro positioning system is derived,and the calculation method of output signal is acquired.Finally,the theoretical output displacement is verified by finite element analysis(FEA)and positioning experiments.
文摘A machining platform of micro wire electrical discharge machining (MWEDM) was developed. The key technology of MWEDM mainly includes granite basement, micro energy pulse generator, detection and servo control system, constant tension winding system and V-block guide wire mechanism. Utilizing micro wire electrode with 30μm in diameter, the MWEDM can machine the micro slot with the minimum size of 38μm wide, and the surface roughness is smaller than 0.1μm, the machining precision is less than 0.5μm, the white layer is no more than 2μm with main cut. All kinds of complex micro parts, such as micro gear, micro bearing bracket and micro shaped holes, can also be machined by using this platform.
