A micro-displacement sensor based on fiber Bragg grating(FBG) is proposed. The device consists of a pair of FBGs with different central wavelengths fabricated by femtosecond laser phase mask method and a metal substra...A micro-displacement sensor based on fiber Bragg grating(FBG) is proposed. The device consists of a pair of FBGs with different central wavelengths fabricated by femtosecond laser phase mask method and a metal substrate with lever structure. The displacement is amplified by lever structure and it converts into axial tension of FBG, which has a high displacement sensitivity. The amplification factors obtained by theoretical analysis and finite element simulation are 2.67 and 2.50, respectively. The experimental results show that in the range of 0-50 μm the shift of FBG center wavelength is linearly related to the displacement of measured object and displacement sensitivity reaches 121 pm/μm. In addition, the cascaded FBG is used to compensate the temperature.展开更多
On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference (PGI) is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optic...On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference (PGI) is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.展开更多
Based on dual-differential comparing principle, an experimental system of optical fiber F-P interferometric micro-displacement measurement is introduced. It is capable of achieving the absolute displacement measuremen...Based on dual-differential comparing principle, an experimental system of optical fiber F-P interferometric micro-displacement measurement is introduced. It is capable of achieving the absolute displacement measurement, and wavelet transforms is adopted as theory fundament to extract the optical F-P interferometric characteristic signal and remove the noise, so its resolution can reach 0. 01 μm in the dynamic range of 0~ 1 mm.展开更多
In this paper, we present a micro-displacement sensor formed by the fixed and movable photonic crystal slabs. In this sensor, a waveguide was created by changing the radius of holes rather than removing them. At a pro...In this paper, we present a micro-displacement sensor formed by the fixed and movable photonic crystal slabs. In this sensor, a waveguide was created by changing the radius of holes rather than removing them. At a proper operating wavelength, the structure could be used as the micro-displacement sensor. The results revealed that the micro-displacement sensor had a sensitivity of 3.6 gm-1, the Q-factor was nearly 180, and the sensing range was 0.0 ~tm - 0.5 p.m. The properties of the micro-displacement sensor are also analyzed theoretically and verified using the finite-difference time-domain (FDTD) method carried out using the software (Rsoft).展开更多
Based on micro-displacement measurement principles of the spherical differential capacitance sensor, the relationship between the capacitance variation and the micro-displacement of each pair of detecting electrodes f...Based on micro-displacement measurement principles of the spherical differential capacitance sensor, the relationship between the capacitance variation and the micro-displacement of each pair of detecting electrodes for the superconducting gyroscope (SCG) with eight detecting electrodes is analyzed. The model of the SCG rotor drift is established through dimensionless processing, linearization within micro-displacement and the least-square approach. Both the measurement scheme of the SCG rotor drift based on the model and its parameter relationship are presented. To guarantee the potential of the suspension rotor to be zero, the distributing scheme of four pairs of detecting electrodes is presented. The scheme can measure the magnitude and the direction of the rotor drift. The negative factors for affecting the measurement precision of .the SCG rotor drift and simulation results of the total effects are given. Simulation results show that the distributing capacitance of these differential capacitance sensors, the zero potential of the rotor and the model error are the major negative factors. The methods for eliminating those negative factors and the application range of the model are given. The model ensures the relationship between the output voltage and the rotor drift be linear.展开更多
Shaft alignment is an important technique during installation and maintenance of a rotating machine. A high-precision laser alignment system has been designed with dual PSDs (Position Sensing Detector) to change tradi...Shaft alignment is an important technique during installation and maintenance of a rotating machine. A high-precision laser alignment system has been designed with dual PSDs (Position Sensing Detector) to change traditional manual way of shaft alignment and to make the measurement easier and more accurate. The system is comprised of two small measuring units (laser transmitter and detector) and a PDA (Personal Digital Assistant) with measurement software. The laser alignment system with dual PSDs was improved on a single PSD system, and yields higher measurement accuracy than the previous design, and has been successful for designing and implements actual shaft alignment. In the system, the range of offset measurement is ±4 mm, and the resolution is 1.5 μm, with accuracy being less than 2 μm.展开更多
A new electro-hydraulic exciter that consists of rotary valve and micro-displacement double-functioned hydraulic cylinder was proposed to realize different kinds of waveforms.Calculated fluid dynamics(CFD) simulation ...A new electro-hydraulic exciter that consists of rotary valve and micro-displacement double-functioned hydraulic cylinder was proposed to realize different kinds of waveforms.Calculated fluid dynamics(CFD) simulation of rotary valve orifice reveals that orifice exists the two-throttle phenomenon.According to the finding,the revised flow area model was established.Vibration waveforms analysis was carried out by means of mathematic model and the related experiments were validated.Furthermore,as a new analysis indicator,saturation percentage was introduced first.The experimental results indicate that the revised flow area model is more accurate compared to the original one,and vibration waveforms can be optimized through suitable spool parameters and the revised cylinder structure.展开更多
Flexible strain sensors play an important role in electronic skins,wearable medical devices,and advanced robots.Herein,a highly sensitive and fast response optical strain sensor with two evanescently coupled optical m...Flexible strain sensors play an important role in electronic skins,wearable medical devices,and advanced robots.Herein,a highly sensitive and fast response optical strain sensor with two evanescently coupled optical micro/nanofibers(MNFs)embedded in a polydimethylsiloxane(PDMS)film is proposed.The strain sensor exhibits a gauge factor as high as 64.5 for strain≤0.5%and a strain resolution of 0.0012%which corresponds to elongation of 120 nm on a 1 cm long device.As a proof-of-concept,highly sensitive fingertip pulse measurement is realized.The properties of fast temporal frequency response up to 30 kHz and a pressure sensitivity of 102 kPa^(−1) enable the sensor for sound detection.Such versatile sensor could be of great use in physiological signal monitoring,voice recognition and micro-displacement detection.展开更多
According to the principle of the magnetostriction generating mechanism, thecontrol model of giant magnetostriction material based on magnetic field and the control method withmagnetic flux density are developed. Furt...According to the principle of the magnetostriction generating mechanism, thecontrol model of giant magnetostriction material based on magnetic field and the control method withmagnetic flux density are developed. Furthermore, this control method is used to develop a giantmagnetostrictive micro-displacement actuator (GMA) and its driving system. Two control methods whosecontrol variables are current intensity and magnetic flux density are compared with each other byexperimental studies. Finally, effective methods on improving the linearity and control precision ofmicro-displacement actuator and reducing the hysteresis based on the controlling magnetic fluxdensity are obtained.展开更多
Shaft alignment is an important technique during installation and maintenance of a rotating machine. A high-precision laser alignment system has been designed with dual PSDs (Position Sensing Detector) to change tradi...Shaft alignment is an important technique during installation and maintenance of a rotating machine. A high-precision laser alignment system has been designed with dual PSDs (Position Sensing Detector) to change traditional manual way of shaft alignment and to make the measurement easier and more accurate. The system is comprised of two small measuring units (laser transmitter and detector) and a PDA (Personal Digital Assistant) with the measurement software. The laser alignment system with dual PSDs was improved on a single PSD system,and it gets higher measurement accuracy than the previous design,and it has been succeeded in designing and implement for actual shaft alignment. In the system,the range of offset measurement is ±4 mm,and the resolution is 1.5 μm,and the accuracy is less than 2 μm.展开更多
Micro-displacement measurement based on self-mixing interference using a fiber laser system was demonstrated. The sinusoidal phase modulation technique was introduced into the fiber laser self-mixing interference meas...Micro-displacement measurement based on self-mixing interference using a fiber laser system was demonstrated. The sinusoidal phase modulation technique was introduced into the fiber laser self-mixing interference measurement system to improve the measurement resolution. The phase could be demodulated by the Fourier analysis method. Error sources were evaluated in detail, and the system was experimentally applied to reconstruct the motion of a high-precision commercial piezoelectric ceramic transducer (PZT). The displacement measurement resolution was well beyond a half-wavelength. It provides a practical solution for displacement measurement based on all optical-fiber sensing applications with high precision.展开更多
A displacement sensor based on the fiber Fabry-Perot (F-P) cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experimen...A displacement sensor based on the fiber Fabry-Perot (F-P) cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experiments to obtain the dynamic range of the F-P sensor, and a piezoelectric crystal unit (PZT) was used as the driver. The output signal was modulated by a piezoelectric ceramic ring and demodulated by a phase-locked oscillator. The experimental results show that the displacement resolution of the F-P sensor is less than 5 nm and the dynamic range is more than 100 μm. As acceleration is the second-order differential of displacement, an accelerometer model was proposed using the finite element method (FEM) nd ANSYS software.展开更多
基金Projects(51875585, 51875584, 51935013) supported by the National Natural Science Foundation of ChinaProject(2020JJ4247) supported by the Natural Science Foundation of Hunan Province,ChinaProject(ZHD202001) supported by the Opening Project of Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory,China。
文摘A micro-displacement sensor based on fiber Bragg grating(FBG) is proposed. The device consists of a pair of FBGs with different central wavelengths fabricated by femtosecond laser phase mask method and a metal substrate with lever structure. The displacement is amplified by lever structure and it converts into axial tension of FBG, which has a high displacement sensitivity. The amplification factors obtained by theoretical analysis and finite element simulation are 2.67 and 2.50, respectively. The experimental results show that in the range of 0-50 μm the shift of FBG center wavelength is linearly related to the displacement of measured object and displacement sensitivity reaches 121 pm/μm. In addition, the cascaded FBG is used to compensate the temperature.
基金This project is supported by National Natural Sciences Foundation of China (No.50175037).
文摘On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference (PGI) is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.
文摘Based on dual-differential comparing principle, an experimental system of optical fiber F-P interferometric micro-displacement measurement is introduced. It is capable of achieving the absolute displacement measurement, and wavelet transforms is adopted as theory fundament to extract the optical F-P interferometric characteristic signal and remove the noise, so its resolution can reach 0. 01 μm in the dynamic range of 0~ 1 mm.
文摘In this paper, we present a micro-displacement sensor formed by the fixed and movable photonic crystal slabs. In this sensor, a waveguide was created by changing the radius of holes rather than removing them. At a proper operating wavelength, the structure could be used as the micro-displacement sensor. The results revealed that the micro-displacement sensor had a sensitivity of 3.6 gm-1, the Q-factor was nearly 180, and the sensing range was 0.0 ~tm - 0.5 p.m. The properties of the micro-displacement sensor are also analyzed theoretically and verified using the finite-difference time-domain (FDTD) method carried out using the software (Rsoft).
文摘Based on micro-displacement measurement principles of the spherical differential capacitance sensor, the relationship between the capacitance variation and the micro-displacement of each pair of detecting electrodes for the superconducting gyroscope (SCG) with eight detecting electrodes is analyzed. The model of the SCG rotor drift is established through dimensionless processing, linearization within micro-displacement and the least-square approach. Both the measurement scheme of the SCG rotor drift based on the model and its parameter relationship are presented. To guarantee the potential of the suspension rotor to be zero, the distributing scheme of four pairs of detecting electrodes is presented. The scheme can measure the magnitude and the direction of the rotor drift. The negative factors for affecting the measurement precision of .the SCG rotor drift and simulation results of the total effects are given. Simulation results show that the distributing capacitance of these differential capacitance sensors, the zero potential of the rotor and the model error are the major negative factors. The methods for eliminating those negative factors and the application range of the model are given. The model ensures the relationship between the output voltage and the rotor drift be linear.
基金Project (No. 60337030) partly supported by the National NaturalScience Foundation of China
文摘Shaft alignment is an important technique during installation and maintenance of a rotating machine. A high-precision laser alignment system has been designed with dual PSDs (Position Sensing Detector) to change traditional manual way of shaft alignment and to make the measurement easier and more accurate. The system is comprised of two small measuring units (laser transmitter and detector) and a PDA (Personal Digital Assistant) with measurement software. The laser alignment system with dual PSDs was improved on a single PSD system, and yields higher measurement accuracy than the previous design, and has been successful for designing and implements actual shaft alignment. In the system, the range of offset measurement is ±4 mm, and the resolution is 1.5 μm, with accuracy being less than 2 μm.
基金Project(51275499)supported by the National Natural Science Foundation of ChinaProject(2013CB035404)supported by the National Basic Research Program("973" Program)of ChinaProject(51221004)supported by the Science Fund for Creative Research Groups,National Natural Science Foundation of China
文摘A new electro-hydraulic exciter that consists of rotary valve and micro-displacement double-functioned hydraulic cylinder was proposed to realize different kinds of waveforms.Calculated fluid dynamics(CFD) simulation of rotary valve orifice reveals that orifice exists the two-throttle phenomenon.According to the finding,the revised flow area model was established.Vibration waveforms analysis was carried out by means of mathematic model and the related experiments were validated.Furthermore,as a new analysis indicator,saturation percentage was introduced first.The experimental results indicate that the revised flow area model is more accurate compared to the original one,and vibration waveforms can be optimized through suitable spool parameters and the revised cylinder structure.
基金We are grateful for financial supports from the National Natural Science Foundation of China(No.61975173)the National Key Research and Development Program of China(No.SQ2019YFC170311)+3 种基金the Major Scientific Research Project of Zhejiang Lab(No.2019MC0AD01)the Key Research and Development Project of Zhejiang Province(No.2021C05003)the Quantum Joint Funds of the Natural Foundation of Shandong Province(No.ZR2020LLZ007)the CIE-Tencent Robotics X Rhino-Bird Focused Research Program(No.2020-01-006).
文摘Flexible strain sensors play an important role in electronic skins,wearable medical devices,and advanced robots.Herein,a highly sensitive and fast response optical strain sensor with two evanescently coupled optical micro/nanofibers(MNFs)embedded in a polydimethylsiloxane(PDMS)film is proposed.The strain sensor exhibits a gauge factor as high as 64.5 for strain≤0.5%and a strain resolution of 0.0012%which corresponds to elongation of 120 nm on a 1 cm long device.As a proof-of-concept,highly sensitive fingertip pulse measurement is realized.The properties of fast temporal frequency response up to 30 kHz and a pressure sensitivity of 102 kPa^(−1) enable the sensor for sound detection.Such versatile sensor could be of great use in physiological signal monitoring,voice recognition and micro-displacement detection.
基金National Natural Science Foundation of China(No.50275021)Doctoral Foundation of Education Ministry(No.2000014109)
文摘According to the principle of the magnetostriction generating mechanism, thecontrol model of giant magnetostriction material based on magnetic field and the control method withmagnetic flux density are developed. Furthermore, this control method is used to develop a giantmagnetostrictive micro-displacement actuator (GMA) and its driving system. Two control methods whosecontrol variables are current intensity and magnetic flux density are compared with each other byexperimental studies. Finally, effective methods on improving the linearity and control precision ofmicro-displacement actuator and reducing the hysteresis based on the controlling magnetic fluxdensity are obtained.
基金Funded by the National Natural Science Foundation of China (60337030) .
文摘Shaft alignment is an important technique during installation and maintenance of a rotating machine. A high-precision laser alignment system has been designed with dual PSDs (Position Sensing Detector) to change traditional manual way of shaft alignment and to make the measurement easier and more accurate. The system is comprised of two small measuring units (laser transmitter and detector) and a PDA (Personal Digital Assistant) with the measurement software. The laser alignment system with dual PSDs was improved on a single PSD system,and it gets higher measurement accuracy than the previous design,and it has been succeeded in designing and implement for actual shaft alignment. In the system,the range of offset measurement is ±4 mm,and the resolution is 1.5 μm,and the accuracy is less than 2 μm.
基金This work was supported by the National Natural Science Foundation of China (Grant No. 91123015, 51405240), the Specialized Research Fund for the Doctoral Program of Higher Education (20113207110004), and the Natural Science Foundation of Jiangsu Province(BK20140925). Open Access This article is distributed under the terms of the Creative Commons Attribution License which permits any use, distribution, and reproduction in any medium, provided the original author(s) and source are credited.
文摘Micro-displacement measurement based on self-mixing interference using a fiber laser system was demonstrated. The sinusoidal phase modulation technique was introduced into the fiber laser self-mixing interference measurement system to improve the measurement resolution. The phase could be demodulated by the Fourier analysis method. Error sources were evaluated in detail, and the system was experimentally applied to reconstruct the motion of a high-precision commercial piezoelectric ceramic transducer (PZT). The displacement measurement resolution was well beyond a half-wavelength. It provides a practical solution for displacement measurement based on all optical-fiber sensing applications with high precision.
基金Project (No. 111303-8112D2) supported by the National DefenseResearch Foundation of Zhejiang University, China
文摘A displacement sensor based on the fiber Fabry-Perot (F-P) cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experiments to obtain the dynamic range of the F-P sensor, and a piezoelectric crystal unit (PZT) was used as the driver. The output signal was modulated by a piezoelectric ceramic ring and demodulated by a phase-locked oscillator. The experimental results show that the displacement resolution of the F-P sensor is less than 5 nm and the dynamic range is more than 100 μm. As acceleration is the second-order differential of displacement, an accelerometer model was proposed using the finite element method (FEM) nd ANSYS software.