Design and Performance Analysis of Micro Proton Exchange Membrane Fuel Cells

This study describes a novel micro proton exchange membrane fuel cell(PEMFC)(active area,2.5 cm2).The flow field plate is manufactured by applying micro-electromechanical systems(MEMS) technology to silicon substrates to etch flow channels without a gold-coating.Therefore,this investigation used MEMS technology for fabrication of a flow field plate and presents a novel fabrication procedure.Various operating parameters,such as fuel temperature and fuel stoichiometric flow rate,are tested to optimize micro PEMFC performance.A single micro PEMFC using MEMS technology reveals the ideal performance of the proposed fuel cell.The optimal power density approaches 232.75 mW·cm-1 when the fuel cell is operated at ambient condition with humidified,heated fuel.

Pull-in instability analyses for NEMS actuators with quartic shape approximation

The pull-in instability of a cantilever nano-actuator model incorporating the effects of the surface, the fringing field, and the Casimir attraction force is investigated. A new quartic polynomial is proposed as the shape function of the beam during the deflection, satisfying all of the four boundary values. The Gaussian quadrature rule is used to treat the involved integrations, and the design parameters are preserved in the evaluated formulas. The analytic expressions are derived for the tip deflection and pull-in parameters of the cantilever beam. The micro-electromechanical system （MEMS） cantilever actuators and freestanding nano-actuators are considered as two special cases. It is proved that the proposed method is convenient for the analyses of the effects of the surface, the Casimir force, and the fringing field on the pull-in parameters.

Studying thin film damping in a micro-beam resonator based on non-classical theories

In this paper, a mathematical model is presented for studying thin film damping of the surrounding fluid in an in-plane oscillating micro-beam resonator. The proposed model for this study is made up of a clamped-clamped micro-beam bound between two fixed layers. The microgap between the micro-beam and fixed layers is filled with air. As classical theories are not properly capable of predicting the size dependence behaviors of the micro-beam,and also behavior of micro-scale fluid media, hence in the presented model, equation of motion governing longitudinal displacement of the micro-beam has been extracted based on non-local elasticity theory. Furthermore, the fluid field has been modeled based on micro-polar theory. These coupled equations have been simplified using Newton-Laplace and continuity equations. After transforming to non-dimensional form and linearizing, the equations have been discretized and solved simultaneously using a Galerkin-based reduced order model. Considering slip boundary conditions and applying a complex frequency approach, the equivalent damping ratio and quality factor of the micro-beam resonator have been obtained. The obtained values for the quality factor have been compared to those based on classical theories. We have shown that applying non-classical theories underestimate the values of the quality factor obtained based on classical theo-ries. The effects of geometrical parameters of the micro-beam and micro-scale fluid field on the quality factor of the resonator have also been investigated.

Code mechanical solidification and verification in MEMS security devices

The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high consequence systems. Based on a study of the running condition of physical code mechanism, VMCM＇s configuration, ternary encoding method, running action and logic are derived. The cases of multi-level code mechanism are designed and verified with the VMCM method, showing that the presented method is effective.

Feasible Development of a Carbon-Based MEMS Using a MEMS Fabrication Process

We aimed to develop a process technology for constructing a carbon-based micro-electromechanical system that does not require a high-temperature and high-energy process. A HOPG （highly oriented pyrolytic graphite） crystal microsheet was prepared by exfoliation. Cantilevers and doubly clamped beams were patterned using a photoresist. The HOPG microsheet was attached by using a tantalum layer. We fabricated cantilevers and a doubly clamped beam by controlling the thickness of the HOPG microsheet and then measured the first resonance frequency. The measurements suggest a need to improve the stiffness of the beam.

Detection Methods for MEMS-Based Xylophone Bar Magnetometer for Pico Satellites

Initially studied and developed by students in universities, the very small pico satellites （with a mass lower than 1 kg） are more and more considered for science applications. In particular, there are plans to use them in constellations of small spacecraft for remote sensing of various regions of the magnetosphere. They require a payload with specific size, weight and power consumption. In order to respond to this demand, new instruments have to be developed. Those instruments should exhibit at least the same performances as those used in larger satellites while fulfilling the specific requirements imposed by the satellites size. For this reason, the authors currently develop a xylophone bar magnetometer （XBM） based on micro-electromechanical systems （MEMS） with integrated detector electronics. The principle of this magnetometer is based on a classical resonating xylophone bar. A sinnsoidal current oscillating at the fundamental bending resonant frequency of the bar is applied through the device, and when an external magnetic field is present, the resulting Lorentz force yields the bar to vibrate at its fundamental mode with a displacement directly proportional to the amplitude in one direction of the ambient magnetic field. When designing a MEMS XBM, the detection method is a crucial aspect. The measurement method largely influences the geometry of the magnetometer as well as the manufacturing technology. Due to the constraints in terms of size, weight and power consumption, the two most promising measurement methods are capacitive and piezoelectric ones. Several designs including these measurement techniques are presented and simulated under realistic conditions. First, designs including lateral electrodes for capacitive measurement are tackled based on Silicon-On-Insulator （SOI） process. For the piezoelectric detection, a new configuration based on Lead Zirconate Titanate （PZT）/Pt structure is introduced and leads to much better sensitivity than the traditional Pt/PZT/Pt sandwich structure. Finally, the principle of electronic circuits enabling high sensitivity and low power consumption are proposed.

MEMS型水听器的自噪声分析

针对部分结构形式的水听器自噪声较高这一现象,以MEMS型水听器为原型进行了结构分析。根据机械-热噪声理论,给出了MEMS型水听器热噪声计算方法和水介质中声压与加速度的转换关系。对水听器噪声参数进行了计算机仿真,得出了影响传感器自噪声的主要因素,给出了自噪声与谐振频率、质量块质量和机械Q值之间的关系。将典型水听器自噪声与海洋环境噪声进行了对比,仿真分析结果表明,工业用加速度传感器不能用于水下声辐射噪声测量任务,用于在辐射噪声测量的MEMS型水听器需要具有40 ng以下的自噪声才能达到系统要求。

Experimental Researches on the Accuracy of Micro- Electromechanical Accelerometer-Array in Seafloor Failure Deformation Measurement

At present,there are few technologies applied to in situ observation of seabed deformation,among which the micro-electromechanical accelerometer-array(hereinafter referred to as accelerometers array)is a very advantageous measurement method,with both commercial products and successful application cases.However,the coupling effect between accelerometer-array and sur-rounding soil and the linkage effect of accelerometer-array itself during the deformation may influence the accuracy and reliability of the measurement data.A simulation test chamber was designed and processed,and four groups of simulation tests were carried out to explore the coupling effect and linkage effect of accelerometer-array in the soil with different degree of consolidation.The results show that the accelerometer-array and the soil coupled well,and the coupling effect is positively correlated with the degree of soil consoli-dation.The ratio of accumulative deviation to soil lateral deformation is high at the initial stage of deformation(0-50 mm)and reduced with the continuous increase of deformation(>100 mm).In the process of liquefied soil deformation,the linkage effect of accelerometer array can be ignored,and is negatively correlated with the degree of soil consolidation.A concept to improve the measurement accu-racy of accelerometer-array in different seafloor failure deformation modes is proposed.The research results provide references for the modification of accelerometer-array and the improvement for other flexible rod-shaped deformation sensors.

Electrically tunable optical metasurfaces

Optical metasurfaces have emerged as a groundbreaking technology in photonics,offering unparalleled control over light-matter interactions at the subwavelength scale with ultrathin surface nanostructures and thereby giving birth to flat optics.While most reported optical metasurfaces are static,featuring well-defined optical responses determined by their compositions and configurations set during fabrication,dynamic optical metasurfaces with reconfigurable functionalities by applying thermal,electrical,or optical stimuli have become increasingly more in demand and moved to the forefront of research and development.Among various types of dynamically controlled metasurfaces,electrically tunable optical metasurfaces have shown great promise due to their fast response time,low power consumption,and compatibility with existing electronic control systems,offering unique possibilities for dynamic tunability of light–matter interactions via electrical modulation.Here we provide a comprehensive overview of the state-of-the-art design methodologies and technologies explored in this rapidly evolving field.Our work delves into the fundamental principles of electrical modulation,various materials and mechanisms enabling tunability,and representative applications for active light-field manipulation,including optical amplitude and phase modulators,tunable polarization optics and wavelength filters,and dynamic waveshaping optics,including holograms and displays.The review terminates with our perspectives on the future development of electrically triggered optical metasurfaces.

An intelligent electronic capsule system for automated detection of gastrointestinal bleeding

In clinical practice,examination of the hemorrhagic spot (HS) remains difficult.In this paper,we describe a remote controlled capsule (RCC) micro-system with an automated,color-based sensor to identify and localize the HS of the gastrointestinal (GI) tract.In vitro testing of the detecting sensor demonstrated that it was capable of discriminating mimetic intestinal fluid (MIF) with and without the hemoglobin (Hb) when the concentration of Hb in MIF was above 0.05 g/ml.Therefore,this RCC system is able to detect the relatively accurate location of the HS in the GI tract.

Design and fabrication of an surface acoustic wave resonator based on AlN/4H-SiC material for harsh environments

Surface acoustic wave （SAW） sensors and micro-electromechanical system （MEMS） technology provide a promising solution for measurement in harsh environments such as gas turbines. In this paper, a SAW resonator （size： 1107μm× 721 μm） based on the AlN/4H-SiC multilayer structure is designed and simulated. A MEMS-compatible fabrication process is employed to fabricate the resonator. The results show that highly c-axis-oriented AlN thin films deposited on the 4H-SiC substrate are obtained, with that the diffraction peak of AlN is 36.10° and the lowest full width at half maximum （FWHM） value is only 1.19°. The test results of the network analyzer are consistent with the simulation curve, which is very encouraging and indicates that our work is a significant attempt to solve the measurement problems mainly including high temperature stability of sensitive structures and the heat transmission of leads in harsh environments. It is essential to get the best performance of SAW resonator, optimize and characterize the behaviors in high temperatures in future research.

Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system

We analyze the effects of possible noise sources on a fence structure micromachined capacitive accelerometer system by modeling and simulation to improve its performance. Simulation results show that a mismatch between the two initial sensing capacitors of the accelerometer or a mismatch between the two capacitance-voltage conversion circuits has a great effect on the output noise floor. When there is a serious mismatch, the noise induced by a sinusoidal carrier is the major noise source. When there is no or only a slight mismatch, the differential capacitance-voltage conversion circuits become the main noise source. The simulation results were validated by experiments and some effective approaches are proposed to improve the system resolution.

Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications

The simultaneous control of residual stress and resistivity of polysilicon thin films by adjusting the deposition parameters and annealing conditions is studied. In situ boron doped polysilicon thin films deposited at 520 ℃ by low pressure chemical vapor deposition （LPCVD） are amorphous with relatively large compressive residual stress and high resistivity. Annealing the amorphous films in a temperature range of 600-800 ℃ gives polysilicon films nearly zero-stress and relatively low resistivity. The low residual stress and low resistivity make the polysilicon films attractive for potential applications in micro-electro-mechanical-systems （MEMS） devices, especially in high resonance frequency （high-f） and high quality factor （high-Q） MEMS resonators. In addition, polysilicon thin films deposited at 570 ℃ and those without the post annealing process have low resistivities of 2-5 mΩ·cm. These reported approaches avoid the high temperature annealing process （〉 1000 ℃）, and the promising properties of these films make them suitable for high-Q and high-f MEMS devices.

Analysis of leakage current in GaAs micro-solar cell arrays

The output characteristics of micro-solar cell arrays are analyzed on the basis of a modified model in which the shunt resistance between cell lines results in current leakage.The modification mainly consists of adding a shunt resistor network to the traditional model.The obtained results agree well with the reported experimental results.The calculation results demonstrate that leakage current in substrate affects seriously the performance of GaAs micro-solar cell arrays.The performance of arrays can be improved by reducing the number of cells per line.In addition,at a certain level of integration,an appropriate space occupancy rate of the single cell is recommended for ensuring high open circuit voltages,and it is more appropriate to set the rates at 80%-90% through the calculation.