Narrow-gap Hg_(1-x)Cd_x Te material with a composition x of about 0.3 plays an extremely important role in mid-infrared detection applications. In this work, the optical properties of doped HgCdTe with x ≈ 0.3 are re...Narrow-gap Hg_(1-x)Cd_x Te material with a composition x of about 0.3 plays an extremely important role in mid-infrared detection applications. In this work, the optical properties of doped HgCdTe with x ≈ 0.3 are reviewed, including the defects and defect levels of intrinsic V_(Hg) and the extrinsic amphoteric arsenic(As) dopants, which can act as shallow/deep donors and acceptors. The influence of the defects on the determination of band-edge electronic structure is discussed when absorption or photoluminescence spectra are considered. The inconsistency between these two optical techniques is demonstrated and analyzed by taking into account the Fermi level position as a function of composition, doping level,conductivity type, and temperature. The defect level and its evolution, especially in As-doped HgCdTe, are presented. Our results provide a systematic understanding of the mechanisms and help for optimizing annealing conditions towards p-type As-activation, and eventually for fabricating high performance mid-infrared detectors.展开更多
采用分子束外延(Molecular Beam Epitaxy,MBE)法制备了高质量的npn型中波/中波双色HgCdTe材料。利用傅里叶变换红外光谱仪(Fourier Transform Infrared Spectrometer,FTIR)、二次离子质谱(Secondary Ion Mass Spectroscopy,SIMS)、X射...采用分子束外延(Molecular Beam Epitaxy,MBE)法制备了高质量的npn型中波/中波双色HgCdTe材料。利用傅里叶变换红外光谱仪(Fourier Transform Infrared Spectrometer,FTIR)、二次离子质谱(Secondary Ion Mass Spectroscopy,SIMS)、X射线双晶衍射仪(X-Ray double-crystal Diffractometer,XRD)分别测试了材料组分、厚度、元素分布和平均半峰宽等参数。结果表明,材料底部n型吸收层的碲镉汞组分为0.318,厚度为7.15 m;p型层的组分为0.392,厚度为2.47 m;顶部n型吸收层的组分为0.292,厚度为4.71 m。As掺杂浓度约为3×10^(18)cm^(-3),In掺杂浓度为4×10^(15)cm^(-3),平均半峰宽约为95 arcsec,表明该材料具有良好的质量。利用聚焦离子束(Focused Ion Beam,FIB)、扫描电子显微镜(Scanning Electron Microscope,SEM)、X射线能谱仪(Energy-Dispersive X-ray spectrometer,EDX)测试表征了HgCdTe外延材料表面缺陷的形貌,确认缺陷主要受生长温度和Hg/Te束流比等生长参数的影响。展开更多
HgCdTe材料的表面缺陷是造成探测器性能下降的主要原因之一。采用聚焦离子束(Focused Ion Beam,FIB)、扫描电子显微镜(Scanning Electron Microscope,SEM)和能量色散X射线光谱仪(Energy Dispersive X-ray Spectrometer,EDX)研究了碲锌镉...HgCdTe材料的表面缺陷是造成探测器性能下降的主要原因之一。采用聚焦离子束(Focused Ion Beam,FIB)、扫描电子显微镜(Scanning Electron Microscope,SEM)和能量色散X射线光谱仪(Energy Dispersive X-ray Spectrometer,EDX)研究了碲锌镉(CdZnTe)基HgCdTe外延层的表面缺陷。通过分析不同类型缺陷形成的原因,确定缺陷起源于HgCdTe材料生长过程。缺陷的形状与生长条件关系密切。凹坑及火山口状缺陷与Hg缺乏/稍高生长温度、分子束源坩埚中材料形状变化造成的不稳定束流有关。金刚石状缺陷和火山口状/金刚石状复合缺陷的产生与Hg/Te高束流比、低生长温度相关。在5 cm×5 cm大小的CdZnTe(211)B衬底表面上生长出了组分为0.216、厚度约为6.06~7μm的高质量HgCdTe外延层。同时还建立了缺陷类型与HgCdTe薄膜生长工艺的关系。该研究对于制备高质量HgCdTe/CdZnTe外延层具有参考意义。展开更多
液相外延碲镉汞材料的贯穿型缺陷会在后续器件制备中导致多个盲元的形成。采用共聚焦显微镜对该类缺陷的深度进行了表征,并对缺陷底部的成分进行了测试。使用聚焦离子束(Focused Ion Beam,FIB)将缺陷挖开后对其进行观察。对于贯穿型缺...液相外延碲镉汞材料的贯穿型缺陷会在后续器件制备中导致多个盲元的形成。采用共聚焦显微镜对该类缺陷的深度进行了表征,并对缺陷底部的成分进行了测试。使用聚焦离子束(Focused Ion Beam,FIB)将缺陷挖开后对其进行观察。对于贯穿型缺陷较多的碲锌镉衬底外延生长碲镉汞薄膜,统计后发现碲镉汞表面的贯穿型缺陷与衬底缺陷存在一定的对应关系,因此推测液相外延贯穿型缺陷起源于碲锌镉衬底缺陷。展开更多
基金Project supported by the Major Program of the National Natural Science Foundation of China(Grant Nos.61790583,61874043,61874045,and 61775060)the National Key Research and Development Program,China(Grant No.2016YFB0501604)
文摘Narrow-gap Hg_(1-x)Cd_x Te material with a composition x of about 0.3 plays an extremely important role in mid-infrared detection applications. In this work, the optical properties of doped HgCdTe with x ≈ 0.3 are reviewed, including the defects and defect levels of intrinsic V_(Hg) and the extrinsic amphoteric arsenic(As) dopants, which can act as shallow/deep donors and acceptors. The influence of the defects on the determination of band-edge electronic structure is discussed when absorption or photoluminescence spectra are considered. The inconsistency between these two optical techniques is demonstrated and analyzed by taking into account the Fermi level position as a function of composition, doping level,conductivity type, and temperature. The defect level and its evolution, especially in As-doped HgCdTe, are presented. Our results provide a systematic understanding of the mechanisms and help for optimizing annealing conditions towards p-type As-activation, and eventually for fabricating high performance mid-infrared detectors.
文摘HgCdTe材料的表面缺陷是造成探测器性能下降的主要原因之一。采用聚焦离子束(Focused Ion Beam,FIB)、扫描电子显微镜(Scanning Electron Microscope,SEM)和能量色散X射线光谱仪(Energy Dispersive X-ray Spectrometer,EDX)研究了碲锌镉(CdZnTe)基HgCdTe外延层的表面缺陷。通过分析不同类型缺陷形成的原因,确定缺陷起源于HgCdTe材料生长过程。缺陷的形状与生长条件关系密切。凹坑及火山口状缺陷与Hg缺乏/稍高生长温度、分子束源坩埚中材料形状变化造成的不稳定束流有关。金刚石状缺陷和火山口状/金刚石状复合缺陷的产生与Hg/Te高束流比、低生长温度相关。在5 cm×5 cm大小的CdZnTe(211)B衬底表面上生长出了组分为0.216、厚度约为6.06~7μm的高质量HgCdTe外延层。同时还建立了缺陷类型与HgCdTe薄膜生长工艺的关系。该研究对于制备高质量HgCdTe/CdZnTe外延层具有参考意义。
文摘液相外延碲镉汞材料的贯穿型缺陷会在后续器件制备中导致多个盲元的形成。采用共聚焦显微镜对该类缺陷的深度进行了表征,并对缺陷底部的成分进行了测试。使用聚焦离子束(Focused Ion Beam,FIB)将缺陷挖开后对其进行观察。对于贯穿型缺陷较多的碲锌镉衬底外延生长碲镉汞薄膜,统计后发现碲镉汞表面的贯穿型缺陷与衬底缺陷存在一定的对应关系,因此推测液相外延贯穿型缺陷起源于碲锌镉衬底缺陷。
