The development of modern information technology has led to significant demand for microoptical elements with complex surface profiles and nanoscale surface roughness.Therefore,various micro-and nanoprocessing techniq...The development of modern information technology has led to significant demand for microoptical elements with complex surface profiles and nanoscale surface roughness.Therefore,various micro-and nanoprocessing techniques are used to fabricate microoptical elements and systems.Femtosecond laser direct writing(FsLDW)uses ultrafast pulses and the ultraintense instantaneous energy of a femtosecond laser for micro-nano fabrication.FsLDW exhibits various excellent properties,including nonlinear multiphoton absorption,high-precision processing beyond the diffraction limit,and the universality of processable materials,demonstrating its unique advantages and potential applications in three-dimensional(3D)micro-nano manufacturing.FsLDW has demonstrated its value in the fabrication of various microoptical systems.This study details three typical principles of FsLDW,several design considerations to improve processing performance,processable materials,imaging/nonimaging microoptical elements,and their stereoscopic systems.Finally,a summary and perspective on the future research directions for FsLDW-enabled microoptical elements and stereoscopic systems are provided.展开更多
基金supported by the National Natural Science Foundation of China(Nos.62275044,62205174,61875036)the Jinan“20 New Colleges and Universities”Innovation Team Introduction Project(202228047).
文摘The development of modern information technology has led to significant demand for microoptical elements with complex surface profiles and nanoscale surface roughness.Therefore,various micro-and nanoprocessing techniques are used to fabricate microoptical elements and systems.Femtosecond laser direct writing(FsLDW)uses ultrafast pulses and the ultraintense instantaneous energy of a femtosecond laser for micro-nano fabrication.FsLDW exhibits various excellent properties,including nonlinear multiphoton absorption,high-precision processing beyond the diffraction limit,and the universality of processable materials,demonstrating its unique advantages and potential applications in three-dimensional(3D)micro-nano manufacturing.FsLDW has demonstrated its value in the fabrication of various microoptical systems.This study details three typical principles of FsLDW,several design considerations to improve processing performance,processable materials,imaging/nonimaging microoptical elements,and their stereoscopic systems.Finally,a summary and perspective on the future research directions for FsLDW-enabled microoptical elements and stereoscopic systems are provided.
