We developed a measuring instrument that had wide range, high precision, small measuring touch force. The instrument for three-dimensional (3D) surface topography measurement was composed of a high precision displacem...We developed a measuring instrument that had wide range, high precision, small measuring touch force. The instrument for three-dimensional (3D) surface topography measurement was composed of a high precision displacement sensor based on the Michelson interference principle, a 3D platform based on vertical scanning, a measuring and control circuit, and an industrial control computer. It was a closed loop control system, which changed the traditional moving stylus scanning style into a moving platform scanning style. When the workpiece was measured, the lever of the displacement sensor returned to the balanced position in every sample interval according to the zero offset of the displacement sensor. The non-linear error caused by the rotation of the lever was, therefore, very small even if the measuring range was wide. The instrument can measure the roughness and the profile size of a curved surface.展开更多
Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing.A variety of instruments based on optical interferometry have been developed to meet the m...Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing.A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications,but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy,speed,robustness,and dynamic range,especially in on-line or on-machine conditions.This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements.Principles,configurations,and applications of typical optical interferometers with different capabilities and limitations are presented.Theoretical background and recent advances of fringe analysis algorithms,including coherence peak sensing and phase-shifting algorithm,are summarized.The new developments in measurement accuracy and repeatability,noise resistance,self-calibration ability,and computational efficiency are discussed.This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement.To address these challenges,advanced techniques in image stitching,on-machine measurement,intelligent sampling,parallel computing,and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.展开更多
In order to generate the digital gear tooth surfaces(DGTS)with high efficiency and high precision,a method for identification and compensation of machining errors is demonstrated in this paper.Machining errors are ana...In order to generate the digital gear tooth surfaces(DGTS)with high efficiency and high precision,a method for identification and compensation of machining errors is demonstrated in this paper.Machining errors are analyzed directly from the real tooth surfaces.The topography data of the part are off-line measured in the post-process.A comparison is made between two models:CAD model of DGTS and virtual model of the physical measured surface.And a matching rule is given to determine these two surfaces in an appropriate fashion.The developed error estimation model creates a point-to-point map of the real surface to the theoretical surface in the normal direction.A“pre-calibration error compensation”strategy is presented.Through processing the results of the first trail cutting,the total compensation error is predicted and an imaginary digital tooth surface is reconstructed. The machining errors in the final manufactured surfaces are minimized by generating this imaginary surface.An example of ma- chining 2-D DGTS verifies the developed method.The research is of important theoretical and practical value to manufacture the DGTS and other digital conjugate surfaces.展开更多
The existing surface roughness standards comprise only two dimensions. However, the real roughness of the surface is 3D （three-dimensional）. Roughness parameters of the 3D surface are also important in analyzing the...The existing surface roughness standards comprise only two dimensions. However, the real roughness of the surface is 3D （three-dimensional）. Roughness parameters of the 3D surface are also important in analyzing the mechanics of contact surfaces. Problems of mechanics of contact surfaces are related to accuracy of 3D surface roughness characteristic. One of the most important factors for 3D characteristics determination is the number of data points per x and y axes. With number of data points we understand its number in cut-off length. Number of data points have substantial influence on the accuracy of measurement results, measuring time and size of output data file （especially along the y-axis direction, where number of data points are number of parallel profiles）. Number of data points must be optimal. Small number of data points lead to incorrect results and increase distribution amplitude, but too large number of data points do not enlarge range of fundamental information, but substantially increase measuring time. Therefore, we must find optimal number of data points per each surface processing method.展开更多
We present a unified electromagnetic modeling of coherence scanning interferometry,confocal microscopy,and focus variation microscopy as the most common techniques for surface topography inspection with micro-and nano...We present a unified electromagnetic modeling of coherence scanning interferometry,confocal microscopy,and focus variation microscopy as the most common techniques for surface topography inspection with micro-and nanometer resolution.The model aims at analyzing the instrument response and predicting systematic deviations.Since the main focus lies on the modeling of the microscopes,the light–surface interaction is considered,based on the Kirchhoff approximation extended to vectorial imaging theory.However,it can be replaced by rigorous methods without changing the microscope model.We demonstrate that all of the measuring instruments mentioned above can be modeled using the same theory with some adaption to the respective instrument.For validation,simulated results are confirmed by comparison with measurement results.展开更多
On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optic...On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.展开更多
基金the National Science Foundation of China (No.50745020).
文摘We developed a measuring instrument that had wide range, high precision, small measuring touch force. The instrument for three-dimensional (3D) surface topography measurement was composed of a high precision displacement sensor based on the Michelson interference principle, a 3D platform based on vertical scanning, a measuring and control circuit, and an industrial control computer. It was a closed loop control system, which changed the traditional moving stylus scanning style into a moving platform scanning style. When the workpiece was measured, the lever of the displacement sensor returned to the balanced position in every sample interval according to the zero offset of the displacement sensor. The non-linear error caused by the rotation of the lever was, therefore, very small even if the measuring range was wide. The instrument can measure the roughness and the profile size of a curved surface.
基金funding from the Enterprise Ireland and from the European Union’s Horizon 2020 Research and Innovation Programme under the Marie Skłodowska-Curie grant agreement(Grant No.713654)the National Natural Science Foundation of China(Grant No.51705070)the Science Foundation Ireland(SFI)(Grant No.15/RP/B3208).
文摘Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing.A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications,but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy,speed,robustness,and dynamic range,especially in on-line or on-machine conditions.This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements.Principles,configurations,and applications of typical optical interferometers with different capabilities and limitations are presented.Theoretical background and recent advances of fringe analysis algorithms,including coherence peak sensing and phase-shifting algorithm,are summarized.The new developments in measurement accuracy and repeatability,noise resistance,self-calibration ability,and computational efficiency are discussed.This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement.To address these challenges,advanced techniques in image stitching,on-machine measurement,intelligent sampling,parallel computing,and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.
文摘In order to generate the digital gear tooth surfaces(DGTS)with high efficiency and high precision,a method for identification and compensation of machining errors is demonstrated in this paper.Machining errors are analyzed directly from the real tooth surfaces.The topography data of the part are off-line measured in the post-process.A comparison is made between two models:CAD model of DGTS and virtual model of the physical measured surface.And a matching rule is given to determine these two surfaces in an appropriate fashion.The developed error estimation model creates a point-to-point map of the real surface to the theoretical surface in the normal direction.A“pre-calibration error compensation”strategy is presented.Through processing the results of the first trail cutting,the total compensation error is predicted and an imaginary digital tooth surface is reconstructed. The machining errors in the final manufactured surfaces are minimized by generating this imaginary surface.An example of ma- chining 2-D DGTS verifies the developed method.The research is of important theoretical and practical value to manufacture the DGTS and other digital conjugate surfaces.
文摘The existing surface roughness standards comprise only two dimensions. However, the real roughness of the surface is 3D （three-dimensional）. Roughness parameters of the 3D surface are also important in analyzing the mechanics of contact surfaces. Problems of mechanics of contact surfaces are related to accuracy of 3D surface roughness characteristic. One of the most important factors for 3D characteristics determination is the number of data points per x and y axes. With number of data points we understand its number in cut-off length. Number of data points have substantial influence on the accuracy of measurement results, measuring time and size of output data file （especially along the y-axis direction, where number of data points are number of parallel profiles）. Number of data points must be optimal. Small number of data points lead to incorrect results and increase distribution amplitude, but too large number of data points do not enlarge range of fundamental information, but substantially increase measuring time. Therefore, we must find optimal number of data points per each surface processing method.
基金support of the following research Projects (Nos.GZ:LE 992/14-3 and LE 992/18-1)by the Deutsche Forschungsgemeinschaft and the EMPIR program (project TracOptic,20IND07)co-financed by the European Union’s Horizon 2020 Research and Innovation Program.
文摘We present a unified electromagnetic modeling of coherence scanning interferometry,confocal microscopy,and focus variation microscopy as the most common techniques for surface topography inspection with micro-and nanometer resolution.The model aims at analyzing the instrument response and predicting systematic deviations.Since the main focus lies on the modeling of the microscopes,the light–surface interaction is considered,based on the Kirchhoff approximation extended to vectorial imaging theory.However,it can be replaced by rigorous methods without changing the microscope model.We demonstrate that all of the measuring instruments mentioned above can be modeled using the same theory with some adaption to the respective instrument.For validation,simulated results are confirmed by comparison with measurement results.
基金This project is supported by National Natural Sciences Foundation of China (No.50175037).
文摘On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.
