According to the'elastic buffer mechanism'and the'variable gap mechanism',a new device,which is both micropump and active microvalve actuated by PZT bimorph cantilever,was fabricated with polydimethyis...According to the'elastic buffer mechanism'and the'variable gap mechanism',a new device,which is both micropump and active microvalve actuated by PZT bimorph cantilever,was fabricated with polydimethyisiloxane (PDMS) and silicon chip.The thickness of the micropump membrance is about 180μm.The diameter and the depth of micropump chamber cavity are 6 mm and 40μm,respectively.The performances of the micropump,such as pump rate and backpressure,were characterized.As a flow-rectifying element,the diffusers and active valve were used instead of passive check valves.The flow rate and the backpressure of the micropump are about 420μL/min and 2 kPa when applying a 100 V square wave driving voltage at frequency of 35 Hz.展开更多
A micro fluidic system was developed and used for cell isolation on biochips. The flow speed could be precisely adjusted by a micropump, and the flow direction could be controlled by switching valves. The complete ope...A micro fluidic system was developed and used for cell isolation on biochips. The flow speed could be precisely adjusted by a micropump, and the flow direction could be controlled by switching valves. The complete operation was computer controlled. The control system for the micropump and microvalves is discussed here. This control system can be combined with other biochip devices to construct a micro total analysis system (μTAS).展开更多
We report the design,fabrication and characterization of a microelectromechanical systems(MEMS)flow control device for gas chromatography(GC)with the capability of sustaining high-temperature environments.We further d...We report the design,fabrication and characterization of a microelectromechanical systems(MEMS)flow control device for gas chromatography(GC)with the capability of sustaining high-temperature environments.We further demonstrate the use of this new device in a novel MEMS chopper-modulated gas chromatography-electroantennography(MEMS-GC-EAG)system to identify specific volatile organic compounds(VOCs)at extremely low concentrations.The device integrates four pneumatically actuated microvalves constructed via thermocompression bonding of the polyimide membrane between two glass substrates with microstructures.The overall size of the device is 32 mm×32 mm,and it is packaged in a 50 mm×50 mm aluminum housing that provides access to the fluidic connections and allows thermal control.The characterization reveals that each microvalve in the flow control chip provides an ON to OFF ratio as high as 1000:1.The device can operate reliably for more than 1 million switching cycles at a working temperature of 300℃.Using the MEMS-GC-EAG system,we demonstrate the successful detection of cis-11-hexadecenal with a concentration as low as 1 pg at a demodulation frequency of 2 Hz by using an antenna harvested from the male Helicoverpa Virescens moth.In addition,1μg of a green leafy volatile(GLV)is barely detected using the conventional GC-EAG,while MEMS-GC-EAG can readily detect the same amount of GLV,with an improvement in the signal-to-noise ratio(SNR)of~22 times.We expect that the flow control device presented in this report will allow researchers to explore new applications and make new discoveries in entomology and other fields that require high-temperature flow control at the microscale.展开更多
基金the financial support from the National Science Foundation of China(Grant No.20299030,60427001 and 60501020).
文摘According to the'elastic buffer mechanism'and the'variable gap mechanism',a new device,which is both micropump and active microvalve actuated by PZT bimorph cantilever,was fabricated with polydimethyisiloxane (PDMS) and silicon chip.The thickness of the micropump membrance is about 180μm.The diameter and the depth of micropump chamber cavity are 6 mm and 40μm,respectively.The performances of the micropump,such as pump rate and backpressure,were characterized.As a flow-rectifying element,the diffusers and active valve were used instead of passive check valves.The flow rate and the backpressure of the micropump are about 420μL/min and 2 kPa when applying a 100 V square wave driving voltage at frequency of 35 Hz.
基金the National Key Project (No.398890 0 1) the National Outstanding Young ScientistFund (No. 3982 5 10 8) from the National NaturalScience Foundation of Chinathe National"86 3"High Technology Program (No.10 3- 13- 0 5 - 0 2 )
文摘A micro fluidic system was developed and used for cell isolation on biochips. The flow speed could be precisely adjusted by a micropump, and the flow direction could be controlled by switching valves. The complete operation was computer controlled. The control system for the micropump and microvalves is discussed here. This control system can be combined with other biochip devices to construct a micro total analysis system (μTAS).
基金We also thank DuPont for providing the polyimide membrane samples.This work was supported by the National Science Foundation under Grant Number DBI-1353870,which was offered to S-YZ and TCB.
文摘We report the design,fabrication and characterization of a microelectromechanical systems(MEMS)flow control device for gas chromatography(GC)with the capability of sustaining high-temperature environments.We further demonstrate the use of this new device in a novel MEMS chopper-modulated gas chromatography-electroantennography(MEMS-GC-EAG)system to identify specific volatile organic compounds(VOCs)at extremely low concentrations.The device integrates four pneumatically actuated microvalves constructed via thermocompression bonding of the polyimide membrane between two glass substrates with microstructures.The overall size of the device is 32 mm×32 mm,and it is packaged in a 50 mm×50 mm aluminum housing that provides access to the fluidic connections and allows thermal control.The characterization reveals that each microvalve in the flow control chip provides an ON to OFF ratio as high as 1000:1.The device can operate reliably for more than 1 million switching cycles at a working temperature of 300℃.Using the MEMS-GC-EAG system,we demonstrate the successful detection of cis-11-hexadecenal with a concentration as low as 1 pg at a demodulation frequency of 2 Hz by using an antenna harvested from the male Helicoverpa Virescens moth.In addition,1μg of a green leafy volatile(GLV)is barely detected using the conventional GC-EAG,while MEMS-GC-EAG can readily detect the same amount of GLV,with an improvement in the signal-to-noise ratio(SNR)of~22 times.We expect that the flow control device presented in this report will allow researchers to explore new applications and make new discoveries in entomology and other fields that require high-temperature flow control at the microscale.
