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Progress of power field effect transistor based on ultra-wide bandgap Ga_2O_3 semiconductor material 被引量:5
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作者 Hang Dong Huiwen Xue +4 位作者 Qiming He Yuan Qin Guangzhong Jian Shibing Long Ming Liu 《Journal of Semiconductors》 EI CAS CSCD 2019年第1期17-25,共9页
As a promising ultra-wide bandgap semiconductor, gallium oxide(Ga_2O_3) has attracted increasing attention in recent years. The high theoretical breakdown electrical field(8 MV/cm), ultra-wide bandgap(~ 4.8 eV) and l... As a promising ultra-wide bandgap semiconductor, gallium oxide(Ga_2O_3) has attracted increasing attention in recent years. The high theoretical breakdown electrical field(8 MV/cm), ultra-wide bandgap(~ 4.8 eV) and large Baliga's figure of merit(BFOM) of Ga_2O_3 make it a potential candidate material for next generation high-power electronics, including diode and field effect transistor(FET). In this paper, we introduce the basic physical properties of Ga_2O_3 single crystal, and review the recent research process of Ga_2O_3 based field effect transistors. Furthermore, various structures of FETs have been summarized and compared, and the potential of Ga_2O_3 is preliminary revealed. Finally, the prospect of the Ga_2O_3 based FET for power electronics application is analyzed. 展开更多
关键词 gallium oxide(Ga_2O_3) ultra-wide bandgap semiconductor power device field effect transistor(fet)
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Study on Extended Gate Field Effect Transistor with Nano-TiO-2 Sensing Membrane by Sol-Gel Method 被引量:1
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作者 Yi-Hung Liao Jung-Chuan Chou 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2006年第A03期252-253,共2页
The nano-titanium dioxide (nano-TiO_2) sensing membrane,fabricated by sol-gel technology,was used as the pH-sensing layer of the extended gate field effect transistor (EGFET) device.The objective of this research is t... The nano-titanium dioxide (nano-TiO_2) sensing membrane,fabricated by sol-gel technology,was used as the pH-sensing layer of the extended gate field effect transistor (EGFET) device.The objective of this research is the preparation of titanium dioxide materials by sol-gel method using Ti(OBu)_4 as the precursor.In this study,we fabricated a nano-titanium dioxide sensing layer on the ITO glass by dip coating.In order to examine the sensitivity of the nano-TiO_2 films applied to the EGFET devices,we adopted the ITO glass as substrate,and measured theⅠ_(DS)-Ⅴ_G curves of the nano-titanium dioxide separative structure EGFET device in the pH buffer solutions that have different pH values by the Keithley 236 Instrument.By the experimental results,we can obtain the pH sensitivities of the EGFET with nano-TiO_2 sensing membrane prepared by sol-gel method,which is 59.86mV/pH from pH 1 to pH 9. 展开更多
关键词 extended gate field effect transistor(EGfet) SOL-GEL NANO-TIO2 sensing membrane buffer solution
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Experimental I-V and C-V Analysis of Schottky-Barrier Metal-Oxide-Semiconductor Field Effect Transistors with Epitaxial NiSi2 Contacts and Dopant Segregation
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作者 王翼泽 刘畅 +4 位作者 蔡剑辉 刘强 刘新科 俞文杰 赵清太 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第7期275-278,共4页
We present an experimental analysis of Schottky-barrier metal-oxide-semiconductor field effect transistors (SB- MOSFETs) fabricated on ultrathin body silicon-on-insulator substrates with a steep junction by the dopa... We present an experimental analysis of Schottky-barrier metal-oxide-semiconductor field effect transistors (SB- MOSFETs) fabricated on ultrathin body silicon-on-insulator substrates with a steep junction by the dopant implantation into the silicide process. The subthreshold swing of such SB-MOSFETs reaches 69mV/dec. Em- phasis is placed on the capacitance-voltage analysis of p-type SB-MOSFETs. According to the measurements of gate-to-source capacitance Cgs with respect to Vgs at various Vds, we find that a maximum occurs at the accumulation regime due to the most imbalanced charge distribution along the channel. At each Cgs peak, the difference between Vgs and Vds is equal to the Schottky barrier height (SBH) for NiSi2 on highly doped silicon, which indicates that the critical condition of channel pinching off is related with SBH for source/drain on chan- nel. The SBH for NiSi2 on highly doped silicon can affect the pinch-off voltage and the saturation current of SB-MOSFETs. 展开更多
关键词 mosfet Experimental I-V and C-V Analysis of Schottky-Barrier Metal-Oxide-Semiconductor field effect transistors with Epitaxial NiSi2 Contacts and Dopant Segregation
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使用Y函数方法提取MoS2 FET双向扫描电学参数
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作者 赵宇航 卢意飞 刘强 《半导体技术》 CAS CSCD 北大核心 2018年第2期125-130,159,共7页
利用机械剥离法制备了多层背栅MoS_2场效应晶体管(FET),通过双向栅压扫描提取了器件的转移特性曲线,并利用Y函数方法提取了器件的电学参数。结果表明,利用Y函数法提取的载流子迁移率值明显大于利用跨导法提取的载流子迁移率值。这两... 利用机械剥离法制备了多层背栅MoS_2场效应晶体管(FET),通过双向栅压扫描提取了器件的转移特性曲线,并利用Y函数方法提取了器件的电学参数。结果表明,利用Y函数法提取的载流子迁移率值明显大于利用跨导法提取的载流子迁移率值。这两种提取方法的不同之处在于Y函数方法考虑了寄生电阻的影响,而跨导法则将其忽略了,这说明寄生电阻带来的影响是显著的。此外,该器件在双向扫描过程中出现了明显的回滞特性,这主要是MoS_2材料吸附外界杂质电荷造成的。无论采用跨导法还是Y函数方法,其正向扫描和反向扫描时对应的电学参数都不完全一致。这表明在分析MoS_2 FET的电学性能时,除了考虑器件的寄生电阻外,还需要考虑界面电荷的影响。 展开更多
关键词 mos2场效应晶体管(fet) Y函数方法 寄生电阻 杂质电荷 回滞特性
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基于CVD单层MoS_2 FET的光电探测器
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作者 战俊 粟雅娟 +2 位作者 贾昆鹏 罗军 闫祥宇 《微纳电子技术》 北大核心 2017年第7期437-443,共7页
通过化学气相沉积(CVD)工艺在SiO_2/Si衬底生长出MoS_2材料,对材料进行喇曼光谱表征,验证了单层MoS_2的存在;基于CVD生长的单层MoS_2完成了晶圆级背栅场效应晶体管(FET)光电探测器的工艺研发;对MoS_2 FET器件进行了电学特性表征,开关比... 通过化学气相沉积(CVD)工艺在SiO_2/Si衬底生长出MoS_2材料,对材料进行喇曼光谱表征,验证了单层MoS_2的存在;基于CVD生长的单层MoS_2完成了晶圆级背栅场效应晶体管(FET)光电探测器的工艺研发;对MoS_2 FET器件进行了电学特性表征,开关比可达到105数量级,场效应迁移率约为1 cm2·V-1·s-1,栅极漏电流为10-10 A数量级;对MoS2FET器件的光电特性进行了表征,该光电探测器具有普通光电导探测器的基本光电特性,其光电流随光照强度的增强以及源漏电压的增加而增加,同时由于栅极的调制提高了光电探测器的灵活性。通过控制栅极电压能够控制MoS2FET光电探测器的暗电流大小,实现对探测器η参数的有效调制。最后通过器件能带图对MoS_2 FET光电探测器的光电特性进行了阐释,为其走向实际应用奠定了理论基础。 展开更多
关键词 二硫化钼(mos2) 场效应晶体管(fet) 二维(2D)半导体材料 光电探测器 过渡金属硫属化合物(TMD)
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用于FET的PECVD SiN_x掺杂MoS_2的有效性与可控性
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作者 战俊 粟雅娟 +3 位作者 罗军 贾昆鹏 段宁远 闫祥宇 《微纳电子技术》 北大核心 2017年第4期229-234,共6页
通过化学气相沉积(CVD)工艺成功生长出少层MoS_2薄膜,用Raman光谱仪对材料进行表征,验证了三层MoS_2材料的存在。基于CVD生长出的三层MoS_2薄膜材料完成了背栅场效应晶体管(FET)的制作工艺研发。对MoS_2FET器件进行了电学特性表征,研制... 通过化学气相沉积(CVD)工艺成功生长出少层MoS_2薄膜,用Raman光谱仪对材料进行表征,验证了三层MoS_2材料的存在。基于CVD生长出的三层MoS_2薄膜材料完成了背栅场效应晶体管(FET)的制作工艺研发。对MoS_2FET器件进行了电学特性表征,研制的MoS_2FET器件的开关比可达到1.45×10~6,器件的电子载流子场效应迁移率约为1 cm^2·V^(-1)·s^(-1)。对等离子增强化学气相沉积(PECVD)氮化硅(SiN_x)工艺掺杂MoS_2材料进行了研究,掺杂后器件的驱动电流提高了3倍多,验证了SiN_x掺杂MoS_2材料的有效性。通过控制PECVD SiN_x时间工艺参数对SiN_x薄膜厚度与掺杂浓度的关系进行了研究,随着SiN_x薄膜厚度增加器件的驱动电流逐渐增强,验证了SiN_x掺杂MoS_2材料的可控性。最后,对PECVD SiN_x工艺掺杂MoS_2材料的机理进行了讨论。 展开更多
关键词 二硫化钼场效应晶体管(mos2 fet) 掺杂 二维(2D)半导体材料 过渡金属硫化物(TMD) 等离子体增强化学气相沉积(PECVD)
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新型范德华绝缘体封装的MoS_(2)晶体管性能研究
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作者 袁恺 闵成彧 +4 位作者 陈鹏堃 胡欢 黄俊 杨帆 唐昭焕 《微电子学》 CAS 北大核心 2023年第2期315-320,共6页
以MoS_(2)为代表的二维半导体材料是下一代延续摩尔定律的潜在电子学新材料之一。然而,二维特性使得MoS_(2)中电子的输运行为对环境条件高度敏感。采用范德华绝缘体材料进行封装包覆,是目前消除二维半导体器件环境敏感性的有效方案之一... 以MoS_(2)为代表的二维半导体材料是下一代延续摩尔定律的潜在电子学新材料之一。然而,二维特性使得MoS_(2)中电子的输运行为对环境条件高度敏感。采用范德华绝缘体材料进行封装包覆,是目前消除二维半导体器件环境敏感性的有效方案之一。文章采用化学气相传输法制备新型范德华绝缘体材料CrOCl,并以少层CrOCl为介电层和封装材料,设计并制备了基于MoS_(2)的场效应晶体管。以CrOCl为底栅介电层及封装材料的MoS_(2)晶体管的室温场效应迁移率约为60 cm^(2)·V^(-1)·s^(-1),2 K下进一步增大至100 cm^(2)·V^(-1)·s^(-1)。此外,相比于无封装MoS_(2)晶体管高达20 V的回滞窗口,CrOCl的包覆有效消除了晶体管转移特性的回滞现象,证明其在二维材料电子学中的应用潜力。 展开更多
关键词 范德华绝缘体CrOCl mos_(2)场效应晶体管 介电层 封装材料 回滞现象
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Review of gallium oxide based field-effect transistors and Schottky barrier diodes 被引量:8
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作者 Zeng Liu Pei-Gang Li +3 位作者 Yu-Song Zhi Xiao-Long Wang Xu-Long Chu Wei-Hua Tang 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第1期65-81,共17页
Gallium oxide(Ga_2O_3), a typical ultra wide bandgap semiconductor, with a bandgap of ~4.9 e V, critical breakdown field of 8 MV/cm, and Baliga's figure of merit of 3444, is promising to be used in high-power and ... Gallium oxide(Ga_2O_3), a typical ultra wide bandgap semiconductor, with a bandgap of ~4.9 e V, critical breakdown field of 8 MV/cm, and Baliga's figure of merit of 3444, is promising to be used in high-power and high-voltage devices.Recently, a keen interest in employing Ga_2O_3 in power devices has been aroused. Many researches have verified that Ga_2O_3 is an ideal candidate for fabricating power devices. In this review, we summarized the recent progress of field-effect transistors(FETs) and Schottky barrier diodes(SBDs) based on Ga_2O_3, which may provide a guideline for Ga_2O_3 to be preferably used in power devices fabrication. 展开更多
关键词 GALLIUM oxide(Ga2O3) field-effect transistors(fets) Schottky barrier diodes(SBDs)
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基于FET结构的MoS_(2)器件的研究进展 被引量:1
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作者 潘苏敏 黄玲琴 陶化文 《微纳电子技术》 CAS 北大核心 2022年第3期210-217,共8页
对带隙可调的二维层状半导体二硫化钼(MoS_(2))的材料特性以及基于MoS_(2)薄膜的器件性能和应用进行了简单阐述,重点分析了多种MoS_(2)场效应晶体管(FET)的结构特点,并对MoS_(2) FET的制备工艺、电学性能(载流子迁移率、电流开关比、亚... 对带隙可调的二维层状半导体二硫化钼(MoS_(2))的材料特性以及基于MoS_(2)薄膜的器件性能和应用进行了简单阐述,重点分析了多种MoS_(2)场效应晶体管(FET)的结构特点,并对MoS_(2) FET的制备工艺、电学性能(载流子迁移率、电流开关比、亚阈值摆幅等)以及栅极介质层材料对器件性能的影响等进行了综述。在此基础上进一步总结了近年来国内外基于FET结构的MoS_(2)光电器件及传感器的研究进展,分别对其结构、光响应度以及灵敏度等性能进行了分析讨论。最后,对MoS_(2)薄膜制备以及基于FET结构的MoS_(2)电子器件、光电器件和传感器未来的发展方向进行了展望。 展开更多
关键词 二硫化钼(mos_(2)) 场效应晶体管(fet) 光电器件 传感器 二维层状半导体
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Electrically Tunable Energy Bandgap in Dual-Gated Ultra-Thin Black Phosphorus Field Effect Transistors 被引量:1
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作者 Shi-Li Yan Zhi-Jian Xie +2 位作者 Jian-Hao Chen Takashi Taniguchi Kenji Watanabe 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第4期87-91,共5页
The energy bandgap is an intrinsic character of semiconductors, which largely determines their properties. The ability to continuously and reversibly tune the bandgap of a single device during real time operation is o... The energy bandgap is an intrinsic character of semiconductors, which largely determines their properties. The ability to continuously and reversibly tune the bandgap of a single device during real time operation is of great importance not only to device physics but also to technological applications. Here we demonstrate a widely tunable bandgap of few-layer black phosphorus (BP) by the application of vertical electric field in dual-gated BP field-effect transistors. A total bandgap reduction of 124 meV is observed when the electrical displacement field is increased from 0.10 V/nm to 0.83 V/nm. Our results suggest appealing potential for few-layer BP as a tunable bandgap material in infrared optoelectronies, thermoelectric power generation and thermal imaging. 展开更多
关键词 Electrically Tunable Energy Bandgap in Dual-Gated Ultra-Thin Black Phosphorus field effect transistors fet BP
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Charge transport and quantum confinement in MoS2 dual-gated transistors
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作者 Fuyou Liao Hongjuan Wang +12 位作者 Xiaojiao Guo Zhongxun Guo Ling Tong Antoine Riaud Yaochen Sheng Lin Chen Qingqing Sun Peng Zhou David Wei Zhang Yang Chai Xiangwei Jiang Yan Liu Wenzhong Bao 《Journal of Semiconductors》 EI CAS CSCD 2020年第7期39-43,共5页
Semiconductive two dimensional(2D)materials have attracted significant research attention due to their rich band structures and promising potential for next-generation electrical devices.In this work,we investigate th... Semiconductive two dimensional(2D)materials have attracted significant research attention due to their rich band structures and promising potential for next-generation electrical devices.In this work,we investigate the MoS2 field-effect transistors(FETs)with a dual-gated(DG)architecture,which consists of symmetrical thickness for back gate(BG)and top gate(TG)dielectric.The thickness-dependent charge transport in our DG-MoS2 device is revealed by a four-terminal electrical measurement which excludes the contact influence,and the TCAD simulation is also applied to explain the experimental data.Our results indicate that the impact of quantum confinement effect plays an important role in the charge transport in the MoS2 channel,as it confines charge carriers in the center of the channel,which reduces the scattering and boosts the mobility compared to the single gating case.Furthermore,temperature-dependent transfer curves reveal that multi-layer MoS2 DG-FET is in the phonon-limited transport regime,while single layer MoS2 shows typical Coulomb impurity limited regime. 展开更多
关键词 mos2 field effect transistors DUAL-GATE quantum confinement Coulomb impurity
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Extended Gate Field Effect Transistor Based Measuring of the Vitamin C content of Orange Juice
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作者 Jung-Chuan Chou 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2006年第A03期342-343,共2页
An extended-gate field effect transistor (EGFET)of SnO_2/ITO glass was applied to manufacture the vitamin C sensor.Therefore,we immobilized the ascorbate oxidase with 3-glycidoxypropyltrimethoxysilane (GPTS)method to ... An extended-gate field effect transistor (EGFET)of SnO_2/ITO glass was applied to manufacture the vitamin C sensor.Therefore,we immobilized the ascorbate oxidase with 3-glycidoxypropyltrimethoxysilane (GPTS)method to measure the different concentrations of the vitamin C solution in an optimum measurement environment.In order to find the best measurement conditions of the biosensor,we studied the vitamin C sensor in different pH values of the phosphate buffer solution (PBS).Additionally,we used experimental results to discuss the response time and response voltage to compare vitamin C with orange juice for the vitamin C sensor. 展开更多
关键词 orange juice extended-gate field effect transistor SnO2/ITO glass vitamin C sensor
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The study on mechanism and model of negative bias temperature instability degradation in P-channel metal-oxide-semiconductor field-effect transistors
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作者 曹艳荣 马晓华 +1 位作者 郝跃 田文超 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第9期564-569,共6页
Negative Bias Temperature Instability (NBTI) has become one of the most serious reliability problems of metaloxide-semiconductor field-effect transistors (MOSFETs). The degradation mechanism and model of NBTI are ... Negative Bias Temperature Instability (NBTI) has become one of the most serious reliability problems of metaloxide-semiconductor field-effect transistors (MOSFETs). The degradation mechanism and model of NBTI are studied in this paper. From the experimental results, the exponential value 0.25-0.5 which represents the relation of NBTI degradation and stress time is obtained. Based on the experimental results and existing model, the reaction-diffusion model with H^+ related species generated is deduced, and the exponent 0.5 is obtained. The results suggest that there should be H^+ generated in the NBTI degradation. With the real time method, the degradation with an exponent 0.5 appears clearly in drain current shift during the first seconds of stress and then verifies that H^+ generated during NBTI stress. 展开更多
关键词 NBTI 90nm p-channel metal-oxide-semiconductor field-effect transistors (Pmos-fets) model
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Atmospheric Degradation and Performance Recovery of Two-Dimensional MoS2 Field Effect Transistor
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作者 Lifei Sun Zhixing Lu +5 位作者 Rui Xu Zhewei Li Guanchen Xu Fengen Chen Zhihai Cheng Liying Jiao 《Chinese Journal of Chemistry》 SCIE CAS CSCD 2023年第21期2832-2836,共5页
Two-dimensional(2D)transition metal dichalcogenides(TMDCs)showed great potentials in 2D nanoelectronic devices due to their abundant and unique properties.The performance stability of the 2D TMDCs devices turns into o... Two-dimensional(2D)transition metal dichalcogenides(TMDCs)showed great potentials in 2D nanoelectronic devices due to their abundant and unique properties.The performance stability of the 2D TMDCs devices turns into one of the keys for their practical applications but has been rarely explored.Here,we investigated stability of MoS_(2)devices in ambient condition and contributed the device performance degradation to the surface oxidation of the contact metals with low work function,which increased the contact barrier and hindered the electron injection.We developed a new approach to recover the performance of the aged devices through the selective doping of contacts with organolithium,which prolonged the lifetime of MoS_(2)devices.Our work not only provides important insights into the stability of 2D TMDCs devices,but also opens up a new avenue for optimizing the performance of 2D MoS_(2)devices. 展开更多
关键词 mos_(2) field effect transistor Atmospheric degradation Performance recovery SEMICONDUCTORS DOPING Oxidation
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英寸级少层MoS_(2)薄膜的低温可控制备 被引量:2
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作者 郭才胜 吴隽 +4 位作者 牛犇 熊芬 祝柏林 黄成斌 刘静 《材料导报》 EI CAS CSCD 北大核心 2021年第12期12039-12043,共5页
大面积二硫化钼(MoS_(2))薄膜的可控制备是其走向应用的关键环节,尤其是少层及P型电导的MoS_(2),对于器件应用具有重要意义,但鲜有文献报道。本工作采用室温射频(RF)磁控溅射法,在玻璃衬底上制备了英寸级的少层MoS_(2)薄膜,并经低温退火... 大面积二硫化钼(MoS_(2))薄膜的可控制备是其走向应用的关键环节,尤其是少层及P型电导的MoS_(2),对于器件应用具有重要意义,但鲜有文献报道。本工作采用室温射频(RF)磁控溅射法,在玻璃衬底上制备了英寸级的少层MoS_(2)薄膜,并经低温退火,实现了大面积较高质量的MoS_(2)薄膜可控制备。原子力显微镜(AFM)、拉曼光谱(Raman)、X射线光电子能谱(XPS)、高分辨透射电子显微镜(HRTEM)和紫外可见吸收光谱(UV-vis)分析结果表明:所制得的大面积超薄薄膜为3层的多晶膜,厚度约2.2 nm,且均匀、平整、可控,薄膜结晶性好、稳定性高。使用同样的工艺在Si/SiO_(2)基片上制备少层MoS_(2)薄膜,并将其制成背栅场效应晶体管(TFT),电学表征表明该薄膜呈现P型导电特征,载流子迁移率为0.183 cm^(2)·V^(-1)·s^(-1)。本工作提供了一种大面积少层MoS_(2)薄膜的可控制备方法,而且制备温度低,工艺简单且兼容性强,易实现大规模工业化生产。 展开更多
关键词 mos_(2) 低温硫化退火 大面积制备 场效应晶体管
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高k金属栅NMOSFET器件阈值电压调控方法
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作者 刘城 王爱记 +2 位作者 刘自瑞 刘建强 毛海央 《微纳电子技术》 北大核心 2019年第1期13-19,25,共8页
实现对器件阈值电压的有效调控是高k金属栅(HKMG)技术面临的一项重要挑战。TiAl薄膜作为n型金属氧化物半导体场效应晶体管(NMOSFET)的功函数层被广泛地应用于HKMG结构中以实现对器件阈值电压的调控。实验采用射频(RF)-直流(DC)磁控溅射... 实现对器件阈值电压的有效调控是高k金属栅(HKMG)技术面临的一项重要挑战。TiAl薄膜作为n型金属氧化物半导体场效应晶体管(NMOSFET)的功函数层被广泛地应用于HKMG结构中以实现对器件阈值电压的调控。实验采用射频(RF)-直流(DC)磁控溅射的方式沉积TiAl薄膜,通过优化直流功率、射频功率和反应压强工艺参数,实现了对薄膜Ti/Al原子比率的调节,提高了Ti/Al原子比率分布均匀度。基于实验结果,采用后栅工艺流程制造HKMG NMOSFET,讨论不同的Ti/Al原子比率和TiAl层厚度对NMOSFET阈值电压的影响。Ti/Al原子比率增大10%,NMOSFET的阈值电压增加12.6%;TiAl层厚度增加2 nm,NMOSFET的阈值电压下降19.5%。这种方法已经被成功应用于HKMG器件的生产。 展开更多
关键词 高k金属栅(HKMG) 功函数层 磁控溅射 Ti/Al原子比率 阈值电压 n型金属氧化物半导体场效应晶体管(Nmosfet)
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基于FET生物传感器的病原微生物检测系统设计
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作者 王浩 马金标 +3 位作者 毕明帆 谢新武 程智 王秀清 《传感器与微系统》 CSCD 北大核心 2023年第4期83-86,共4页
设计了一种基于场效应管(FET)生物传感器的检测系统。以STM32F103微处理器集成了自动进样、温度控制、光调制、数据采集与放大等模块;同时完成了基于C++软件环境的数据处理与分析人机交互界面的设计。通过对整个系统性能测试实验分析,... 设计了一种基于场效应管(FET)生物传感器的检测系统。以STM32F103微处理器集成了自动进样、温度控制、光调制、数据采集与放大等模块;同时完成了基于C++软件环境的数据处理与分析人机交互界面的设计。通过对整个系统性能测试实验分析,结果表明:该系统检测灵敏度高,响应速度快,性能稳定可靠,抗干扰性强,操作简单、便携,能够较好地满足现场快速检测病原微生物的需求。 展开更多
关键词 场效应管 生物传感器 病原微生物 检测系统
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不同温度下JLNT-FET和IMNT-FET的模拟/射频特性
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作者 刘先婷 刘伟景 李清华 《半导体技术》 CAS 北大核心 2023年第7期570-576,共7页
无结纳米管场效应晶体管(JLNT-FET)和反转模式纳米管场效应晶体管(IMNT-FET)因具有较好的驱动能力和对短沟道效应(SCE)卓越的抑制能力被广泛研究。基于Sentaurus TCAD数值模拟,分析了环境温度对JLNT-FET和IMNT-FET的模拟/射频(RF)特性... 无结纳米管场效应晶体管(JLNT-FET)和反转模式纳米管场效应晶体管(IMNT-FET)因具有较好的驱动能力和对短沟道效应(SCE)卓越的抑制能力被广泛研究。基于Sentaurus TCAD数值模拟,分析了环境温度对JLNT-FET和IMNT-FET的模拟/射频(RF)特性的影响,对比研究了JLNT-FET和IMNT-FET由于掺杂浓度和传导方式不同导致的性能差异。结果表明,随着温度升高,载流子声子散射加剧,器件的寄生电容增加,导致器件的模拟/RF性能下降。体传导的JLNT-FET受到声子散射影响较小,所以其漏源电流受温度影响比表面传导的IMNT-FET小。另外,JLNT-FET的载流子迁移率受沟道重掺杂影响,导致其驱动能力和模拟/RF性能都比IMNT-FET差。研究结果对进一步优化这两类器件及其在电路中的应用具有一定的参考意义。 展开更多
关键词 无结纳米管场效应晶体管(JLNT-fet) 反转模式纳米管场效应晶体管(IMNT-fet) 模拟/射频(RF)特性 环境温度 传导模式
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HfO_(2)基铁电场效应晶体管
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作者 肖金盼 苏铭吉 +1 位作者 刘宗芳 Choonghyun Lee 《智能物联技术》 2023年第5期1-5,9,共6页
铁电晶体管作为一种新型的存储器件,由于与CMOS工艺兼容、低功耗等优点,吸引了研究者广泛关注。近年来,Flash、RRAM、FeFET等不同存储器件发展迅速,但都存在一定的微缩问题。大量研究工作表明,HfO_(2)基材料在1 nm厚度时也有微弱的铁电... 铁电晶体管作为一种新型的存储器件,由于与CMOS工艺兼容、低功耗等优点,吸引了研究者广泛关注。近年来,Flash、RRAM、FeFET等不同存储器件发展迅速,但都存在一定的微缩问题。大量研究工作表明,HfO_(2)基材料在1 nm厚度时也有微弱的铁电性,有利于器件的微缩,所以近年来对于HfO_(2)基铁电晶体管的研究越来越广泛。本文主要从HfO_(2)基铁电晶体管基本结构、存储机制、工艺制备过程、相关测试方法、应用等方面对HfO_(2)基铁电晶体管存储器进行了综述。 展开更多
关键词 HfO_(2)基铁电薄膜 场效应晶体管 制备工艺 存储机制
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Construction of MoS2 field effect transistor sensor array for the detection of bladder cancer biomarkers 被引量:7
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作者 Yujie Yang Bo Zeng +3 位作者 Yingxue Li Huageng Liang Yanbing Yang Quan Yuan 《Science China Chemistry》 SCIE EI CAS CSCD 2020年第7期997-1003,共7页
Bladder cancer is one of the commonest malignant tumors of urinary system with high recurrence. However, currently developed bladder cancer urine diagnosis methods are hindered by the low detection sensitivity and acc... Bladder cancer is one of the commonest malignant tumors of urinary system with high recurrence. However, currently developed bladder cancer urine diagnosis methods are hindered by the low detection sensitivity and accuracy. Herein, a molybdenum disulfide(MoS2) nanosheets-based field effect transistor(FET) sensor array was constructed for simultaneous detection of multiple bladder cancer biomarkers in human urine. With the excellent electronic property of MoS2 and the high specific identification capability of recognition molecules, the proposed biosensor array could simultaneously detect nuclear matrix protein 22(NMP22) and cytokeratin 8(CK8) with a wide linear range of 10-6–10-1 pg mL-1 and an ultra-low detection limit of 0.027 and 0.019 aM, respectively. Furthermore, this highly sensitive and specific MoS2 FET sensor array could be used to identify bladder cancer biomarkers from human urine samples. This designed high-performance biosensor array shows great potential in the future diagnosis of bladder cancer. 展开更多
关键词 mos 2 field effect transistor bladder cancer sensor array NMP22 CK8
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