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Numerical Analysis on the Effect of n-Si on Cu(In, Ga)Se2 Based Thin-Films for High-Performance Solar Cells by 1D-SCAPS
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作者 Rasika N. Mohottige Micheal Farndale +1 位作者 Gary S. Coombs Shahnoza Saburhhojayeva 《Open Journal of Applied Sciences》 2024年第5期1315-1329,共15页
We report the performances of a chalcopyrite Cu(In, Ga)Se<sub>2 </sub>CIGS-based thin-film solar cell with a newly employed high conductive n-Si layer. The data analysis was performed with the help of the ... We report the performances of a chalcopyrite Cu(In, Ga)Se<sub>2 </sub>CIGS-based thin-film solar cell with a newly employed high conductive n-Si layer. The data analysis was performed with the help of the 1D-Solar Cell Capacitance Simulator (1D-SCAPS) software program. The new device structure is based on the CIGS layer as the absorber layer, n-Si as the high conductive layer, i-In<sub>2</sub>S<sub>3</sub>, and i-ZnO as the buffer and window layers, respectively. The optimum CIGS bandgap was determined first and used to simulate and analyze the cell performance throughout the experiment. This analysis revealed that the absorber layer’s optimum bandgap value has to be 1.4 eV to achieve maximum efficiency of 22.57%. Subsequently, output solar cell parameters were analyzed as a function of CIGS layer thickness, defect density, and the operating temperature with an optimized n-Si layer. The newly modeled device has a p-CIGS/n-Si/In<sub>2</sub>S<sub>3</sub>/Al-ZnO structure. The main objective was to improve the overall cell performance while optimizing the thickness of absorber layers, defect density, bandgap, and operating temperature with the newly employed optimized n-Si layer. The increase of absorber layer thickness from 0.2 - 2 µm showed an upward trend in the cell’s performance, while the increase of defect density and operating temperature showed a downward trend in solar cell performance. This study illustrates that the proposed cell structure shows higher cell performances and can be fabricated on the lab-scale and industrial levels. 展开更多
关键词 n-Si p-CIGS 1D-SCAPS Thin-films In2S3
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p-Si/n-Ga_(2)O_(3)异质结制备与特性研究
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作者 陈沛然 焦腾 +6 位作者 陈威 党新明 刁肇悌 李政达 韩宇 于含 董鑫 《人工晶体学报》 北大核心 2024年第1期73-81,共9页
本实验采用金属有机化学气相沉积(MOCVD)工艺,在p(111)型Si衬底上制备了p-Si/n-Ga_(2)O_(3)结构的PN结。通过X射线衍射仪、原子力显微镜等对样品进行了晶体结构、表面形貌、表面粗糙度等的表征分析;通过磁控溅射与蒸镀方法在样品上生长T... 本实验采用金属有机化学气相沉积(MOCVD)工艺,在p(111)型Si衬底上制备了p-Si/n-Ga_(2)O_(3)结构的PN结。通过X射线衍射仪、原子力显微镜等对样品进行了晶体结构、表面形貌、表面粗糙度等的表征分析;通过磁控溅射与蒸镀方法在样品上生长Ti/Au电极并进行I-V特性曲线、开启电压、开关电流比、反向饱和电流、理想因子、零偏压下的势垒高度等结特性测试,研究了掺杂浓度与薄膜厚度对PN结特性的影响,并对其原因进行了分析;通过二步生长法和缓冲层温度优化实验,减少了Si衬底与β-Ga_(2)O_(3)之间的晶格失配与热失配带来的影响,对薄膜与器件特性进行了优化。最终获得了表面粗糙度最低可达到4.21 nm的高质量n型β-Ga_(2)O_(3)薄膜,以及具有较低理想因子(42.1)的PN结。 展开更多
关键词 β-Ga_(2)O_(3)薄膜 金属有机化学气相沉积 p-Si/n-Ga_(2)O_(3) Pn 晶体质量 电学特性
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OPTICAL CHARACTERIZATION OF TiO_2 THIN FILM ON SILICON SUBSTRATE DEPOSITED BY DC REACTIVE MAGNETRON SPUTTERING 被引量:3
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作者 H.Q.Wang H.Shen +3 位作者 D.C.Ba B.W.Wang L.S.Wen D.Chen 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2005年第3期194-198,共5页
TiO2 thin film has attracted considerable attention in recent years, due to its different refractive index and transparency with amorphous and different crysta ls in the visible and near-infrared wavelength region, hi... TiO2 thin film has attracted considerable attention in recent years, due to its different refractive index and transparency with amorphous and different crysta ls in the visible and near-infrared wavelength region, high dielectric constant, wide band gap, high wear resistance and stability, etc, for which make it being used in many fields. This paper aims to investigate the optical characterizatio n of thin film TiO2 on silicon wafer. The TiO2 thin films were prepared by DC re active magnetron sputtering process from Ti target. The reflectivity of the film s was measured by UV-3101PC, and the index of refraction (n) and extinction coef ficient (k) were measured by n & k Analyzer 1200. 展开更多
关键词 optical characterization TiO2 thin film DC reactive magnetron sputtering n & k
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The effects of radiation damage on power VDMOS devices with composite SiO_2-Si_3N_4 films 被引量:1
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作者 高博 刘刚 +5 位作者 王立新 韩郑生 宋李梅 张彦飞 腾瑞 吴海舟 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第3期393-398,共6页
Total dose effects and single event effects on radiation-hardened power vertical double-diffusion metal oxide semiconductor(VDMOS) devices with composite SiO2-Si3N4 film gates are investigated.The relationships amon... Total dose effects and single event effects on radiation-hardened power vertical double-diffusion metal oxide semiconductor(VDMOS) devices with composite SiO2-Si3N4 film gates are investigated.The relationships among the important electrical parameters of the samples with different thickness SiO2-Si3N4 films,such as threshold voltage,breakdown voltage,and on-state resistance in accumulated dose,are discussed.The total dose experiment results show that the breakdown voltage and the on-state resistance barely change with the accumulated dose.However,the relationships between the threshold voltages of the samples and the accumulated dose are more complex,and not only positively drift,but also negatively drift.At the end of the total dose experiment,we select the group of samples which have the smaller threshold voltage shift to carry out the single event effect studies.We find that the samples with appropriate thickness ratio SiO2-Si3N4 films have a good radiation-hardening ability.This method may be useful in solving both the SEGR and the total dose problems with the composite SiO2-Si3N4 films. 展开更多
关键词 power VDMOS device total dose effects single event effects composite SiO2-Si3n4 films
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脒基钛(Ⅲ)配合物制备N/C-TiO_2薄膜及其光学性能研究
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作者 程兰云 杜立永 丁玉强 《现代化工》 CAS CSCD 北大核心 2019年第2期125-129,共5页
以TiCl_3(3THF)为原料合成脒基钛(Ⅲ)配合物1,将其作为前驱体通过LPCVD沉积N/C-TiO_2薄膜。利用1HNMR、元素分析以及热重分析(TGA)探究配合物1的结构和热化学性质。结果表明,配合物1具有良好的热稳定性和合适的挥发性,满足CVD的要求。通... 以TiCl_3(3THF)为原料合成脒基钛(Ⅲ)配合物1,将其作为前驱体通过LPCVD沉积N/C-TiO_2薄膜。利用1HNMR、元素分析以及热重分析(TGA)探究配合物1的结构和热化学性质。结果表明,配合物1具有良好的热稳定性和合适的挥发性,满足CVD的要求。通过EDS和UV-Vis吸收光谱表征了薄膜的成分及光学性能,结果表明,当沉积温度为350℃时,N/C-TiO_2薄膜的N、C质量分数最高,其禁带宽度降低为2. 82 e V,对可见光的吸收最强。与纯的二氧化钛薄膜相比,N/C-TiO_2薄膜对亚甲基蓝的降解率显著提高到90%。 展开更多
关键词 脒基钛(Ⅲ)配合物 前驱体 热化学性质 n/c-tio2薄膜 光学性能
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P-Type Nitrogen-Doped ZnO Films Prepared by In-Situ Thermal Oxidation of Zn_3N_2 Films
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作者 靳玉平 张斌 +1 位作者 王建中 施立群 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第5期119-122,共4页
P-type nitrogen-doped ZnO films are prepared successfully by in-situ thermal oxidation of Zn3N2 films. The prepared films are characterized by x-ray diffraction, non-Rutherford back.scattering (non-RBS) spectroscopy... P-type nitrogen-doped ZnO films are prepared successfully by in-situ thermal oxidation of Zn3N2 films. The prepared films are characterized by x-ray diffraction, non-Rutherford back.scattering (non-RBS) spectroscopy, x- ray photoelectron spectroscopy, and photoluminescence spectrum. The results show that the Zn3N1 films start to transform to ZnO at 400℃ and the total nitrogen content decreases with the increasing annealing temperature. The p-type fihns are achieved at 500℃ with a low resistivity of 6.33Ω.cm and a high hole concentration of +8.82 × 10^17 cm-3, as well as a low level of carbon contamination, indicating that the substitutional nitrogen (No) is an effective acceptor in the ZnO:N film. The photoluminescence spectra show clear UV emissions and also indicate the presence of oxygen vacancy (Vo) defects in the ZnO:N films. The p-type doping mechanism is briefly discussed. 展开更多
关键词 ZnO in or as In P-Type nitrogen-Doped ZnO films Prepared by In-Situ Thermal Oxidation of Zn3n2 films of by
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Effect of N_2-Gas Partial Pressure on the Structure and Properties of Copper Nitride Films by DC Reactive Magnetron Sputtering
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作者 刘祖黎 李兴鳌 +3 位作者 左安友 袁作彬 杨建平 姚凯伦 《Plasma Science and Technology》 SCIE EI CAS CSCD 2007年第2期147-151,共5页
Copper nitride thin films were deposited on glass substrates by reactive direct current (DC) magnetron sputtering at various N2-gas partial pressures and room temperature. Xray diffraction measurements showed that t... Copper nitride thin films were deposited on glass substrates by reactive direct current (DC) magnetron sputtering at various N2-gas partial pressures and room temperature. Xray diffraction measurements showed that the films were composed of Cu3N crystallites and exhibited a preferential orientation of the [111] direction at a low nitrogen gas (N2) partial pressure. The film growth preferred the [111] and the [100] direction at a high N2 partial pressure. Such preferential film growth is interpreted as being due to the variation in the Copper (Cu) nitrification rate with the N2 pressure. The N2 partial pressure affects not only the crystal structure of the film but also the deposition rate and the resistivity of the Cu3N film. In our experiment, the deposition rate of Cu3N films was 18 nm/min to 30 nm/min and increased with the N2 partial pressure. The resistivity of the Cu3N films increased sharply with the increasing N2 partial pressure. At a low N2 partial pressure, the Cu3N films showed a metallic conduction mechanism through the Cu path, and at a high N2 partial pressure, the conductivity of the Cu3N films showed a semiconductor conduction mechanism. 展开更多
关键词 Cu3n film DC magnetron sputtering n2-gas partial pressure RESISTIVITY
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A MOLECULAR BEAM INVESTIGATION ON ACTIVATED CHEMISORPTION OF N_2 ON Ni SURFACE AND La FILM
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作者 Shumin Shao, Guangkang Xi, Junrong Wang, Shenglin Li Xuezhu Yang, Jinhe Wang, Tianxi He, Baoxia Yu Department of Electron Science, Nankai University, 300071 Tianjin, China 《真空科学与技术学报》 EI CAS CSCD 1992年第Z1期263-266,共4页
The activated chemisorption of N<sub>2</sub> on Ni (poly) and La film was performed on a molecular beam—surface scattering apparatus. Experimental results indicate that the initial sticking probability ... The activated chemisorption of N<sub>2</sub> on Ni (poly) and La film was performed on a molecular beam—surface scattering apparatus. Experimental results indicate that the initial sticking probability s<sub>o</sub> increases linearly from 0 to 0.03 as normal component of translational energy of the molecuar beam E<sub>n</sub> increases from 11.00 to 19.91 kcal/mol for N<sub>2</sub>/Ni system and S<sub>0</sub> from 0 to 0. 10 as E<sub>n</sub> from 10. 40 to 19.91 kcal/mol for N<sub>2</sub>/La system. The apparent activation energy △E are 6.16 kcal/mol and 5.30 kcal/mol for N<sub>2</sub>/Ni and N<sub>2</sub>/La systems respectively. 展开更多
关键词 PRO A MOLECULAR BEAM InVESTIGATIOn On ACTIVATED CHEMISORPTIOn OF n2 On ni SURFACE AnD La film LA nI
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N_2流量对反应共溅射TiN/Ni纳米复合膜结构和结合强度的影响 被引量:7
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作者 贺春林 高建君 +3 位作者 王苓飞 马国峰 刘岩 王建明 《材料导报》 EI CAS CSCD 北大核心 2018年第12期2038-2042,共5页
以高纯Ti和Ni为靶材,在不同N_2气流量下反应磁控共溅射了TiN/Ni纳米复合膜,采用原子力显微镜、X射线衍射、X射线光电子能谱、场发射扫描电镜和划痕试验研究了N_2气流量对复合膜微结构、界面结合力和摩擦系数的影响。结果表明,共溅射TiN... 以高纯Ti和Ni为靶材,在不同N_2气流量下反应磁控共溅射了TiN/Ni纳米复合膜,采用原子力显微镜、X射线衍射、X射线光电子能谱、场发射扫描电镜和划痕试验研究了N_2气流量对复合膜微结构、界面结合力和摩擦系数的影响。结果表明,共溅射TiN/Ni纳米复合膜组织细小、表面光滑、致密。TiN为fcc结构,其择优取向为(111)面。随N_2气流量增加,复合膜孔隙率、晶粒尺寸和沉积速率均出现不同程度的下降;而膜表面粗糙度先减小后增大,界面结合力则先提高后下降。本实验条件下,在N_2气流量为16mL/min时所沉积的复合膜表面粗糙度最小、界面结合力最好,分别为2.75nm和44.6N,此时复合膜的摩擦系数最低,为0.14。 展开更多
关键词 Tin/ni 纳米复合膜 反应磁控共溅射 微结构 n2流量 界面结合力
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SnO_2超微粒非晶薄膜对n-Si光电效应的影响
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作者 王雅静 姜月顺 +1 位作者 戴国瑞 李铁津 《沈阳化工学院学报》 CAS 1998年第4期271-275,共5页
用等离子激活化学气相沉积(PECVD)法制备了SnO2超微粒非晶薄膜.X光电子能谱分析结果表明SnO2中的O/Sn比超过化学计量比.nSi和SnO2/nSi的表面光电压谱显示,SnO2薄膜的处理条件不同,光电压... 用等离子激活化学气相沉积(PECVD)法制备了SnO2超微粒非晶薄膜.X光电子能谱分析结果表明SnO2中的O/Sn比超过化学计量比.nSi和SnO2/nSi的表面光电压谱显示,SnO2薄膜的处理条件不同,光电压响应所需光强也不同.将SnO2薄膜沉积在nSi上,可使其光电转换效率提高3个数量级以上,并且也能使nSi光电流和光电压有所提高. 展开更多
关键词 光电压 二氧化锡 PEVCD 非晶薄膜
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n-ZnO/p-CuInSe_2多晶异质结薄膜太阳电池的光电流和转换效率的理论计算
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作者 周炳卿 《内蒙古师范大学学报(自然科学汉文版)》 CAS 2001年第4期307-310,322,共5页
用隧道 -复合模型对n-ZnO/p-CuInSe2 多晶异质结薄膜太阳电池的光电流和转换效率进行了理论计算 ,考虑到在多晶材料中的晶界复合损失 ,引入修正因子 ,并用Roth warf的晶界复合模型进行修正 .对晶粒半径R为 1 μm的电池进行计算 ,得到电... 用隧道 -复合模型对n-ZnO/p-CuInSe2 多晶异质结薄膜太阳电池的光电流和转换效率进行了理论计算 ,考虑到在多晶材料中的晶界复合损失 ,引入修正因子 ,并用Roth warf的晶界复合模型进行修正 .对晶粒半径R为 1 μm的电池进行计算 ,得到电池的短路电流密度为 35 .4mA/cm2 ,开路电压为 0 .42V ,转换效率为 1 0 .1 % .理论计算和实验结果基本一致 . 展开更多
关键词 隧道-复合模型 n-ZnO/p-CuInSe2 薄膜太阳电池 光电流 半导体材料 多晶异质结 转换效率
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N掺杂对β-Ga_(2)O_(3)薄膜日盲紫外探测器性能的影响 被引量:6
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作者 周树仁 张红 +6 位作者 莫慧兰 刘浩文 熊元强 李泓霖 孔春阳 叶利娟 李万俊 《物理学报》 SCIE EI CAS CSCD 北大核心 2021年第17期313-321,共9页
单斜氧化镓(β-Ga_(2)O_(3))材料因其独特而优异的光电特性在日盲紫外探测领域具有广阔的应用前景,受到国内外研究者的广泛关注.本研究工作采用射频磁控溅射技术,在c面蓝宝石衬底上制备了未掺杂和氮(N)掺杂β-Ga_(2)O_(3)薄膜,研究了N... 单斜氧化镓(β-Ga_(2)O_(3))材料因其独特而优异的光电特性在日盲紫外探测领域具有广阔的应用前景,受到国内外研究者的广泛关注.本研究工作采用射频磁控溅射技术,在c面蓝宝石衬底上制备了未掺杂和氮(N)掺杂β-Ga_(2)O_(3)薄膜,研究了N掺杂对β-Ga_(2)O_(3)薄膜结构及光学特性的影响;在此基础上,构筑了未掺杂和N掺杂β-Ga_(2)O_(3)薄膜基金属-半导体-金属(metal-semiconductor-metal,MSM)型日盲紫外探测器,并讨论了N掺杂影响器件性能的物理机制.结果表明,N掺杂会导致β-Ga_(2)O_(3)薄膜表面形貌变得相对粗糙,且会促使β-Ga_(2)O_(3)薄膜由直接带隙向间接带隙转变.所有器件均表现出较高的稳定性和日盲特性,相比之下,N掺杂β-Ga_(2)O_(3)薄膜器件能展现出较低的暗电流和更快的光响应速度(响应时间和恢复时间分别为40和8 ms),与氧空位相关缺陷的抑制密切相关.本研究对开发新型的高性能日盲紫外探测器具有一定的借鉴意义. 展开更多
关键词 β-Ga_(2)O_(3) 薄膜 n 掺杂 日盲紫外探测器 快速响应
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溶胶凝胶法制备SiO2(Eu^n+∶SiO2)多层膜及其性能研究
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作者 王海风 董云谷 +2 位作者 王若轩 熊能 胡煜林 《玻璃与搪瓷》 CAS 2018年第6期6-11,共6页
利用溶胶-凝胶法于硅基片表面制备SiO_2及Eu^(n+)∶SiO_2单层及多层薄膜。通过X射线衍射仪(XRD)、傅里叶红外光谱仪(FT-IR)、接触角测量仪、动态力学分析仪(DMA)以及扫描电镜(SEM)等对样品的性能进行系统的测试和分析。研究结果表明,经... 利用溶胶-凝胶法于硅基片表面制备SiO_2及Eu^(n+)∶SiO_2单层及多层薄膜。通过X射线衍射仪(XRD)、傅里叶红外光谱仪(FT-IR)、接触角测量仪、动态力学分析仪(DMA)以及扫描电镜(SEM)等对样品的性能进行系统的测试和分析。研究结果表明,经多层镀膜后基片表面膜层厚度增加,且薄膜与基片之间没有明显的间隙,结合紧密。多层镀膜,尤其是镀膜超过6层后,可以显著提高基片的抗弯强度。Eu^(n+)∶SiO_2薄膜对抗弯强度的提高量大于单层SiO_2薄膜。SiO_2薄膜对硅基片亲水性影响不明显,但稀土掺杂Eu^(n+)∶SiO_2薄膜可以显著提高基片的亲水性。 展开更多
关键词 溶胶-凝胶法 SiO 2薄膜 EU ^n+ 掺杂 力学性能
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N掺杂对Y_(2)O_(3)薄膜界面特性的影响
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作者 陈元安 《商丘职业技术学院学报》 2021年第2期83-86,共4页
采用射频反应磁控溅射法制备了N掺杂Y2O3栅介质薄膜,并研究了N掺杂对Y_(2)O_(3)薄膜界面特性的影响.研究结果表明:N原子在YOxNy薄膜中以N-O键和N≡O3键两种结合态存在.在热处理过程中,N-O键是稳定的,而N≡O3键不稳定;N-O键的生成能够阻... 采用射频反应磁控溅射法制备了N掺杂Y2O3栅介质薄膜,并研究了N掺杂对Y_(2)O_(3)薄膜界面特性的影响.研究结果表明:N原子在YOxNy薄膜中以N-O键和N≡O3键两种结合态存在.在热处理过程中,N-O键是稳定的,而N≡O3键不稳定;N-O键的生成能够阻止退火气氛中的氧原子在Y_(2)O_(3)薄膜中的扩散,从而有效抑制了界面层SiO_(2)的生长. 展开更多
关键词 n掺杂 Y_(2)O_(3)薄膜 射频反应磁控溅射 光学特性
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(AlCrTiZrNb)N/Al_(2)O_(3)纳米多层膜的微观结构和力学性能研究 被引量:2
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作者 陈立强 李伟 +5 位作者 刘平 何代华 张柯 马凤仓 刘新宽 陈小红 《有色金属材料与工程》 CAS 2021年第1期10-16,共7页
在单晶硅片基底上采用反应磁控溅射技术交替溅射AlCrTiZrNb靶与Al_(2)O_(3)靶,制备了不同厚度Al_(2)O_(3)层的(AlCrTiZrNb)N/Al_(2)O_(3)纳米多层膜。采用X射线衍射仪(X-ray diffraction,XRD),高分辨率透射电子显微镜(high resolution t... 在单晶硅片基底上采用反应磁控溅射技术交替溅射AlCrTiZrNb靶与Al_(2)O_(3)靶,制备了不同厚度Al_(2)O_(3)层的(AlCrTiZrNb)N/Al_(2)O_(3)纳米多层膜。采用X射线衍射仪(X-ray diffraction,XRD),高分辨率透射电子显微镜(high resolution transmission electron microscopes,HRTEM),扫描电子显微镜(scanning electron microscope,SEM)以及纳米压痕测试仪对(AlCrTiZrNb)N/Al_(2)O_(3)纳米多层膜的微观结构、力学性能等进行表征。结果表明:当Al_(2)O_(3)层厚度小于0.8 nm时,Al_(2)O_(3)层在(AlCrTiZrNb)N层的模板效应下由非晶态转化为立方结构亚稳态,与(AlCrTiZrNb)N层之间形成共格界面外延生长结构;(AlCrTiZrNb)N/Al_(2)O_(3)纳米多层膜的弹性模量和硬度随着Al_(2)O_(3)层厚度的增加先增大后减小,当Al_(2)O_(3)层厚度为0.8 nm时达到最大值,分别为317.6 GPa和29.8 GPa;薄膜的结晶性良好,清晰的柱状晶结构贯穿整个调制周期。 展开更多
关键词 (AlCrTiZrnb)n/Al_(2)O_(3)纳米多层膜 磁控溅射 力学性能
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对向靶溅射α″-Fe_(16)N_2薄膜结构及其热稳定性
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作者 许英华 姜恩永 +2 位作者 王怡 侯登录 赵慈 《天津大学学报(自然科学与工程技术版)》 EI CAS CSCD 北大核心 2001年第4期558-561,共4页
用对向靶反应溅射法制备了α″- Fe1 6 N2 薄膜 ,用 X射线衍射 (XRD)、透射电子显微镜(TEM)和振动样品磁强计 (VSM)对α″- Fe1 6 N2 的结构、磁性以及结构的热稳定性进行了分析讨论 .结果表明 ,随退火温度的升高 ,α″- Fe1 6 N2 相逐... 用对向靶反应溅射法制备了α″- Fe1 6 N2 薄膜 ,用 X射线衍射 (XRD)、透射电子显微镜(TEM)和振动样品磁强计 (VSM)对α″- Fe1 6 N2 的结构、磁性以及结构的热稳定性进行了分析讨论 .结果表明 ,随退火温度的升高 ,α″- Fe1 6 N2 相逐渐分解为 α″- Fe和 γ′- Fe4N两相 .对磁性的分析表明 ,造成饱和磁化强度存在较大差异的原因与其内在的结构差别有很大的关系 . 展开更多
关键词 饱和磁化强度 对向靶溅射 Fe16n2薄膜 热稳定性 结构
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The low temperature growth of stable p-type ZnO films in HiPIMS 被引量:2
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作者 Qian LI Minju YING +2 位作者 Zhongwei LIU Lizhen YANG Qiang CHEN 《Plasma Science and Technology》 SCIE EI CAS CSCD 2021年第9期154-162,共9页
In this study,the influence of substrate temperature on properties of Al-N co-doped p-type ZnO films is explored.Benefitting from the high ionization rate in high-power impulsed magnetron sputtering,the concentration ... In this study,the influence of substrate temperature on properties of Al-N co-doped p-type ZnO films is explored.Benefitting from the high ionization rate in high-power impulsed magnetron sputtering,the concentration of ionized nitrogen N+and ionized zinc Zn+were increased,which promoted the formation of ZnO films and lowered the necessary substrate temperature.After optimization,a co-doped p-type ZnO thin film with a resistivity lower than 0.35Ωcm and a hole concentration higher than 5.34×10^(18)cm^(-3)is grown at 280°C.X-ray diffraction results confirm that Al-N co-doping does not destruct the ZnO wurtzite structure.X-ray photoelectron spectroscopy demonstrates that the presence of Al promotes the formation of acceptor(No)defects in ZnO films,and ensures the role of Al in stabilizing p-type ZnO. 展开更多
关键词 HIPIMS Al-n co-doped ZnO film substrate temperature p-type conduction n+/n2+
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用SiCl4/H2沉积纳米晶硅薄膜过程中氢稀释量对SiCln(n=0~2)密度的影响
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作者 娄艳辉 王照奎 +1 位作者 林揆训 林璇英 《功能材料》 EI CAS CSCD 北大核心 2008年第1期12-15,共4页
用质谱、朗缪尔探针诊断技术研究了氢稀释的SiCl4作为源气体,用等离子体增强化学气相方法进行纳米晶硅薄膜的生长。进一步研究了氢稀释比率对SiCl4等离子体中SiCln(n=0-2)基团浓度的影响。等离子体中,平均电子能量和电子密度分别随着... 用质谱、朗缪尔探针诊断技术研究了氢稀释的SiCl4作为源气体,用等离子体增强化学气相方法进行纳米晶硅薄膜的生长。进一步研究了氢稀释比率对SiCl4等离子体中SiCln(n=0-2)基团浓度的影响。等离子体中,平均电子能量和电子密度分别随着氢稀释比率的增加而达到9.25eV和3.7×10^9cm^-3。结果发现,在0.4-0.67范围的氢稀释比率对于形成SiCln(n=0-2)基团很有利。在这个范围,平均电子能量和电子密度都有较大的值。生成较多的SiCln(n=0-2)基团将有利于提高薄膜沉积速率和薄膜质量。 展开更多
关键词 氢稀释 纳米硅薄膜 SiCln(n=0~2)基团
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EFFECTS OF TREATMENT TEMPERATURE ON THE MICROSTRUCTURE AND MAGNETIC PROPERTIES OF Fe-N THIN FILMS 被引量:1
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作者 B.L. Li H.M. Du +3 位作者 X.F. Wang E.Y. Jiang Z.Q.Li P. Wu 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2007年第4期293-300,共8页
Fe-N thin films were fabricated on both 100Si and NaCl substrates by RF magnetron sputtering under low nitrogen partial pressure. The microstructure and magnetic properties of Fe-N thin films were investigated with th... Fe-N thin films were fabricated on both 100Si and NaCl substrates by RF magnetron sputtering under low nitrogen partial pressure. The microstructure and magnetic properties of Fe-N thin films were investigated with the increase of the substrate temperature (Ts) and the annealing temperature (Ta). It is more difficult for nitrogen atoms to enter the Fe lattice under higher Ts above 150℃. The phase evolution is visible at higher Ta above 200℃. The phase transformation of α''-Fe16N2 occurred at 400℃. The change of crystal size with Ta was clearly visible from bright and dark field images. The clear high-resolution electron microscope (HREM) images of 110α, 111γ', 112α'', and 200α'' phases were observed. The interplanar distances from TEM (transmission electron microscope) and HREM match the calculated values very well. From the results of the vibrating sample magnetometer (VSM), the good magnetic properties of Fe-N films were obtained at 150℃ of Ts and 200℃ of Ta, respectively. 展开更多
关键词 Fe-n thin film magnetic property HREM α''-Fe16n2
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磁控溅射SnO_(2)/ZnO复合纳米薄膜的气敏特性研究
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作者 吴鹏举 刘文强 +3 位作者 汤子鑫 郭兰兰 王瑗瑗 杨莹丽 《传感器与微系统》 CSCD 北大核心 2023年第12期21-24,共4页
采用射频磁控溅射方法,在溅射气压为2.5 Pa时,在p-Si衬底上沉积氧化锡(SnO_(2))/氧化锌(ZnO)复合纳米薄膜。沉积过程中,SnO_(2)薄膜的沉积厚度固定为40 nm,通过改变ZnO薄膜的沉积厚度来改变SnO_(2)/ZnO的膜厚比。详细分析了工作温度和... 采用射频磁控溅射方法,在溅射气压为2.5 Pa时,在p-Si衬底上沉积氧化锡(SnO_(2))/氧化锌(ZnO)复合纳米薄膜。沉积过程中,SnO_(2)薄膜的沉积厚度固定为40 nm,通过改变ZnO薄膜的沉积厚度来改变SnO_(2)/ZnO的膜厚比。详细分析了工作温度和膜厚比变化对复合纳米薄膜气敏特性的影响。结果表明,SnO_(2)/ZnO复合纳米薄膜的最佳工作温度为350℃,与ZnO和SnO_(2)单层薄膜相比,复合纳米薄膜的气敏性能显著提升。当SnO_(2)与ZnO的膜厚比为4︰3时,其气敏性能最佳,在350℃下,对于5×10^(-6)乙醇气体的灵敏度最高可达4。该SnO_(2)/ZnO复合纳米薄膜气敏性能的提升归因于ZnO与SnO_(2)之间形成的n-n异质结。 展开更多
关键词 复合纳米薄膜 氧化锌 氧化锡 射频磁控溅射 n-n异质结
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