蓝宝石R面上ZnO薄膜的NH_3掺杂研究

以NH3为掺杂源,利用金属有机化学气相沉积(MOCVD)系统在蓝宝石R面上生长出掺氮ZnO薄膜。通过XRD,SEM测量优化了其生长参数,在610℃和在80sccm的NH3流量下生长出了〈1120〉单一取向的ZnO薄膜。经Hall电阻率测量,得知该薄膜呈现弱p型或高电阻率,并对其光电子能谱进行了研究。

Selective Sensing Characteristics of Ca Doped BeO Nano-sized Tube toward H20 and NH3

By means of density functional calculations, the structural and electronic properties of chemical modification of pristine and Ca-doped BeO nanotubes were investigated with NH3 and H20 molecules. It was found that the NH3 and H20 molecules can be adsorbed on the Be atom of the tube sidewall with the adsorption energies of about 36.1 and 39.0 kcal/mol, respectively. Density of states analysis shows that the electronic properties of the BeONT are slightly changed after the adsorption processes. Substitution of a Be atom in the tube surface with a Ca atom increases the adsorption energies by about 7.4 and 14.7 kcal/mol for NH3 and H20, respectively. Unlike the pristine tube, the electronic properties of Ca-doped BeONT are sensitive to NH3 and H20 molecules. Also, the Ca-doped tube is much more sensitive to H20 molecule than NH3 one.

氮δ掺杂Cu_2O薄膜的生长及物性研究

采用等离子体增强原子层沉积(PEALD)技术,以NH3为掺杂源,制备了氮δ掺杂Cu_2O薄膜,研究了N掺杂对Cu_2O薄膜表面形貌、光学及电学性质的影响。研究结果表明,N掺杂引起了晶格畸变,Cu_2O薄膜的表面粗糙度增大;掺杂后Cu_2O薄膜的带隙宽度从2.70eV增加到3.20eV,吸收边变得陡峭;掺杂后载流子浓度为6.32×1019 cm^(-3),相比于未掺杂样品(5.77×1018 cm^(-3))的提升了一个数量级。