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基于石墨烯敏感材料的NH3气体传感器 被引量:3
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作者 刘瑞芳 雷程 +6 位作者 梁庭 王凯 李奇思 王文涛 李志强 李永伟 单存良 《微纳电子技术》 北大核心 2020年第8期637-642,649,共7页
介绍了一种以石墨烯作为气敏材料的高灵敏度、快速响应的NH3气体传感器的制备与测试。该气体传感器制备工艺简单,仅需要在微电子机械系统(MEMS)工艺制备好的Au叉指电极上喷涂氧化还原处理后的石墨烯即可。在不同的温度、NH3体积分数下... 介绍了一种以石墨烯作为气敏材料的高灵敏度、快速响应的NH3气体传感器的制备与测试。该气体传感器制备工艺简单,仅需要在微电子机械系统(MEMS)工艺制备好的Au叉指电极上喷涂氧化还原处理后的石墨烯即可。在不同的温度、NH3体积分数下对其气敏特性进行测试。测试结果表明,在25~100℃时,传感器的灵敏度与温度的线性相关系数高达0.98142;在体积分数0~8×10-4的NH3中,传感器的灵敏度与NH3体积分数线性相关系数高达0.9956,在NH3体积分数为10-4、环境温度为25℃时,传感器的灵敏度为3.54436%。同时,该传感器具有较广的检测范围,在NH3体积分数为10-2时,其响应和恢复时间分别仅为38 s和26 s,且具有较好的选择性和重复性。 展开更多
关键词 石墨烯 微电子机械系统(MEMS)工艺 NH3传感器 叉指电极 气敏特性
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Ammonia sensing using arrays of silicon nanowires and graphene 被引量:2
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作者 K.Fobelets C.Panteli +1 位作者 O.Sydoruk Chuanbo Li 《Journal of Semiconductors》 EI CAS CSCD 2018年第6期112-118,共7页
Ammonia (NH3) is a toxic gas released in different industrial, agricultural and natural processes. It is also a biomarker for some diseases. These require NH3 sensors for health and safety reasons. To boost the sens... Ammonia (NH3) is a toxic gas released in different industrial, agricultural and natural processes. It is also a biomarker for some diseases. These require NH3 sensors for health and safety reasons. To boost the sensitiv- ity of solid-state sensors, the effective sensing area should be increased. Two methods are explored and compared using an evaporating pool of 0.5 mL NH4OH (28% NH3). In the first method an array of Si nanowires (Si NWA) is obtained via metal-assisted-electrochemical etching to increase the effective surface area. In the second method CVD graphene is suspended on top of the Si nanowires to act as a sensing layer. Both the effective surface area as well as the density of surface traps influences the amplitude of the response. The effective surface area of Si NWAs is 100 × larger than that of suspended graphene for the same top surface area, leading to a larger response in amp- litude by a factor of -7 notwithstanding a higher trap density in suspended graphene. The use of Si NWAs in- creases the response rate for both Si NWAs as well as the suspended graphene due to more effective NH3 diffu- sion processes. 展开更多
关键词 NH3 sensor silicon nanowires resistive sensor low frequency noise GRAPHENE
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Polyvinylpyrrolidone/graphene oxide thin films coated on quartz crystal microbalance electrode for NH_3 detection at room temperature 被引量:1
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作者 MA XingFang XIE GuangZhong +3 位作者 SU YuanJie DU HongFei XIE Tao JIANG YaDong 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2016年第9期1377-1382,共6页
In this paper, composite film based on polyvinylpyrrolidone(PVP)/graphene oxide(GO) was fabricated by spray method on AT-cut 9.986 MHz quartz crystal microbalance(QCM) for NH_3 sensing. The thin films were characteriz... In this paper, composite film based on polyvinylpyrrolidone(PVP)/graphene oxide(GO) was fabricated by spray method on AT-cut 9.986 MHz quartz crystal microbalance(QCM) for NH_3 sensing. The thin films were characterized by scanning electron microscope(SEM), Fourier transform infrared spectroscopy(FTIR) and ultraviolet-visible spectroscopy(UV-VIS) to investigate the morphologies and the composition contents, respectively. The experimental results reveal that PVP/GO based sensor holds higher sensitivity, larger responsiveness and smaller baseline drift than those based on pure PVP at room temperature. Besides, the prepared sensor exhibits greater response to NH_3 than other gases such as CO, CO_2 and NO_2 at the same concentration. The good linearity, reproducibility and stability demonstrate the practicability of PVP/GO hybrid film in detecting NH_3. 展开更多
关键词 POLYVINYLPYRROLIDONE graphene oxide quartz crystal microbalance NH3 gas sensor
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