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金属诱导法低温多晶硅薄膜的制备与研究 被引量:8
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作者 刘传珍 杨柏梁 +6 位作者 袁剑峰 李牧菊 吴渊 寥燕平 张玉 王大海 黄锡珉 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第1期61-65,共5页
利用金属诱导晶化 ( Metal Induced Crystallization,MIC)的方法研究了 a- Si/ Ni的低温晶化 ,MIC晶化温度能降低到 44 0℃ .采用 XRD、Raman、SEM、XPS等分析手段研究了 Ni- MIC多晶硅薄膜的特性 ,对薄膜结构和组成进行了分析 。
关键词 金属诱导晶化 多晶硅 薄膜 ni-mic
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MIC薄膜多晶硅材料的动态镍吸除技术基本机理及其应用 被引量:2
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作者 李阳 孟志国 +4 位作者 吴春亚 王文 郭海成 张芳 熊绍珍 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第10期1574-1579,共6页
首先阐述了MIC薄膜多晶硅材料动态镍吸杂技术的基本机理和主要工艺过程,然后以多晶硅薄膜晶体管(poly-Si TFT)为例研究了动态吸杂技术的应用.在研究金属诱导晶化多晶硅材料(MIC poly-Si)和以之为有源层的poly-Si TFT的过程中,发现在MIC... 首先阐述了MIC薄膜多晶硅材料动态镍吸杂技术的基本机理和主要工艺过程,然后以多晶硅薄膜晶体管(poly-Si TFT)为例研究了动态吸杂技术的应用.在研究金属诱导晶化多晶硅材料(MIC poly-Si)和以之为有源层的poly-Si TFT的过程中,发现在MIC多晶硅薄膜中含有部分残余的镍成份.而大部分存在于对撞晶界的残余镍成份会造成大量的缺陷,这将导致TFT器件性能乃至整个系统的稳定性和可靠性的降低.为了改善MIC薄膜及器件质量,我们采用磷硅玻璃(PSG)动态镍吸杂技术,有效地吸除镍,降低多晶硅中镍的残留量,改善对撞晶界的缺陷密度,降低用之制备TFT的漏电流.该技术工艺过程简单,处理成本低,适合于大批量的工业化生产,有望成为制备高稳定性微电子器件与电路系统的必需工艺技术. 展开更多
关键词 金属诱导晶化多晶硅 磷硅玻璃 动态镍吸除 固溶度
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Ni-P-Cr-TiO_2非晶复合材料的耐海水及微生物腐蚀研究 被引量:3
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作者 姚忠科 马洁 +2 位作者 李大印 刘辉 路学丽 《腐蚀科学与防护技术》 CAS CSCD 北大核心 2006年第6期391-395,共5页
用直流电沉积方法制备了Ni-P-Cr-TiO2非晶复合材料,以SEM、EDX和XRD等手段分析了材料的表面形貌、元素组成和晶体结构,同时用极化曲线和电化学阻抗谱分别研究了所制备复合材料在模拟海水(3.5%NaCl溶液)和以硫酸盐还原菌为代表的微生物... 用直流电沉积方法制备了Ni-P-Cr-TiO2非晶复合材料,以SEM、EDX和XRD等手段分析了材料的表面形貌、元素组成和晶体结构,同时用极化曲线和电化学阻抗谱分别研究了所制备复合材料在模拟海水(3.5%NaCl溶液)和以硫酸盐还原菌为代表的微生物腐蚀介质中的耐蚀性能.结果表明,所制得Ni-P-Cr-TiO2复合材料的晶体结构为非晶态,表面均匀致密,具有优良的耐海水及微生物腐蚀性能. 展开更多
关键词 Ni—P—Cr-TiO2 非晶 海水腐蚀 微生物腐蚀
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Corrosion behavior of B30 Cu-Ni alloy and anti-corrosion coating in marine environment 被引量:2
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作者 李庆芬 李春辉 +1 位作者 许立坤 刘光洲 《中国有色金属学会会刊:英文版》 CSCD 2007年第A01期161-165,共5页
The corrosion behavior of B30 Cu-Ni alloy in a sterile seawater and a SRB solution was investigated. The results show that the corrosion potential of specimen in the SRB solution is much lower than that in the sterile... The corrosion behavior of B30 Cu-Ni alloy in a sterile seawater and a SRB solution was investigated. The results show that the corrosion potential of specimen in the SRB solution is much lower than that in the sterile seawater. The polarization resistance of specimen in the SRB solution decreases quickly after a period immersion and becomes much lower than that in the sterile seawater. It is concluded that the SRB accelerates the corrosion process of B30 Cu-Ni alloy greatly. An anti-corrosion electroless Ni-P coating was produced and applied to the alloy. The results show that specimens coated with Ni-P plating exhibit favorable corrosion resistance property in SRB solution. Severe pitting corrosion appears on the uncoated specimens in the SRB solution when the coated specimens are still in good condition. The anti-corrosion mechanism of Ni-P plating was analyzed. It is concluded that coating the B30 Cu-Ni alloy with electroless Ni-P plating is an effective technique against the attack of SRB in marine environment. 展开更多
关键词 镍合金 微观特性 抗腐蚀特性 生物技术
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Solution-based metal induced crystallization of a-Si
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作者 吴春亚 李学冬 +4 位作者 赵淑云 李娟 孟志国 熊绍珍 张芳 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第3期1237-1241,共5页
This paper investigates a simplified metal induced crystallization (MIC) of a-Si, named solution-based MIC (SMIC). The nickel inducing source was formed on a-Si from salt solution dissolved in de-ionized water or ... This paper investigates a simplified metal induced crystallization (MIC) of a-Si, named solution-based MIC (SMIC). The nickel inducing source was formed on a-Si from salt solution dissolved in de-ionized water or ethanol, a-Si thin film was deposited with low pressure chemical vapour deposition or plasma enhanced chemical vapour deposition as precursor material for MIC. It finds that the content of nickel source formed on a-Si can be controlled by solution concentration and dipping time. The dependence of crystallization rate of a-Si on annealing time illustrated that the linear density of nickel source was another critical factor that affects the crystallization of a-Si, besides the diffusion of nickel disilicide. The highest electron Hall mobility of thus prepared S-MIC poly-Si is 45.6 cm^2/(V· s). By using this S-MIC poly-Si, thin film transistors and display scan drivers were made, and their characteristics are presented. 展开更多
关键词 Ni-salt source metal induced crystallization (MIC) POLY-SI TFT
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