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P-channel Ge/Si Hetero-nanocrystal Based MOSFET Memory
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作者 YANG Hong-guan ZHOU Shao-hua +1 位作者 ZENG Yun SHI Yi 《Semiconductor Photonics and Technology》 CAS 2005年第4期244-247,共4页
The charge storage characteristics of P-channel Ge/Si hetero-nanocrystal based MOSFET memory has been investigated and a logical array has been constructed using this memory cell. In the case of the thickness of tunne... The charge storage characteristics of P-channel Ge/Si hetero-nanocrystal based MOSFET memory has been investigated and a logical array has been constructed using this memory cell. In the case of the thickness of tunneling oxide Tox = 2 nm and the dimensions of Si- and Ge-nanocrystal Dsi = DGe = 5 nm, the retention time of this device can reach ten years(~1 × 108 s) while the programming and erasing time achieve the orders of microsecond and millisecond at the control gate voltage | Vg | = 3 V with respect to N-wells,respectively. Therefore, this novel device, as an excellent nonvolatile memory operating at room temperature,is desired to obtain application in future VLSI. 展开更多
关键词 GE/SI Hetero-nanocrystal nano-memory Direct tunneling Logic array
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