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Nb:SrTiO_(3)阻变单元及1T1R复合结构的电离辐射总剂量效应研究
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作者 单月晖 连潞文 +6 位作者 高媛 魏佳男 杜翔 唐新悦 罗婷 谭开洲 张培健 《微电子学》 CAS 北大核心 2022年第6期1033-1038,共6页
开展了Nb∶SrTiO_(3)阻变单元及1T1R复合结构的X射线总剂量效应实验研究。结果表明,Nb∶SrTiO_(3)阻变单元在累积剂量达到10 Mrad(Si)时依然能够保持良好的阻变特性,高、低阻态未发生逻辑混乱。1T1R复合结构中的NMOS选通晶体管对电离辐... 开展了Nb∶SrTiO_(3)阻变单元及1T1R复合结构的X射线总剂量效应实验研究。结果表明,Nb∶SrTiO_(3)阻变单元在累积剂量达到10 Mrad(Si)时依然能够保持良好的阻变特性,高、低阻态未发生逻辑混乱。1T1R复合结构中的NMOS选通晶体管对电离辐射较为敏感,在栅氧化层中辐射感生氧化物陷阱电荷的作用下,NMOS器件阈值电压逐渐向负方向漂移,泄漏电流逐渐增加,进一步导致关态条件下(V_(G)=0 V)对阻变存储单元的错误读写。通过选用抗辐射加固NMOS选通晶体管,可显著提升1T1R复合结构的抗总剂量能力。 展开更多
关键词 nb∶srtio_(3)阻变单元 总剂量效应 1T1R X射线辐射
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Resistive switching and optical properties of strontium ferrate titanate thin film prepared via chemical solution deposition 被引量:1
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作者 Jun LI Xingui TANG +2 位作者 Qiuxiang LIU Yanping JIANG Zhenxun TANG 《Journal of Advanced Ceramics》 SCIE CAS CSCD 2021年第5期1001-1010,共10页
The polycrystalline strontium ferrate titanate(SrFe_(0.1)Ti_(0.9)O_(3),SFTO)thin films have been successfully prepared by chemical solution method.By analyzing the current-voltage(I-V)characteristics,we discuss the co... The polycrystalline strontium ferrate titanate(SrFe_(0.1)Ti_(0.9)O_(3),SFTO)thin films have been successfully prepared by chemical solution method.By analyzing the current-voltage(I-V)characteristics,we discuss the conduction mechanism of SFTO.It is found that the number of oxygen vacancy defects is increased by Fe ion doping,making SFTO be with better resistive switching property.Fe ion doping can also enhance the absorption of strontium titanate to be exposed to visible light,which is associated with the change of energy band.The band gap width(2.84 eV)of SFTO films is figured out,which is less than that of pure strontium titanate.Due to more oxygen vacancy defects caused by Fe ion doping,the band gap width of strontium titanate was reduced slightly.The defect types of SFTO thin films can be determined by electron paramagnetic resonance spectroscopy.In addition,we analyzed the energy band and state density of SFTO by first-principles calculation based on density functional theory,and found that Fe ion doping can reduce the band gap width of strontium titanate with micro-regulation on the band structure.A chemical state of SFTO was analyzed by X-ray photo electron spectroscopy.At the same time,the structure and morphology of SFTO were characterized by X-ray diffraction and scanning electron microscope.This study deepens further understanding of the influence of Fe ion doping on the structure and properties of strontium ferrate titanate,which is expected to be a functional thin film material for memristor devices. 展开更多
关键词 srtio_(3) thin films resistive switching oxygen vacancy first principles
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