The studies on structure and electrical characteristic of Nb-doped SrTiO3 (SNTO) substrates by XRD, Hall measurements, R-T and SEM, show that the SNTO substrates with the same Nb-doping concentration have different el...The studies on structure and electrical characteristic of Nb-doped SrTiO3 (SNTO) substrates by XRD, Hall measurements, R-T and SEM, show that the SNTO substrates with the same Nb-doping concentration have different electrical properties be- cause of the nonuniformity of Nb-doping. The uni- formly doped high-quality substrates are extremely important for fabricating multilayer structure and de- vices. In addition, the experimental results also pro- vide us with SEM method to judge the uniformity of conducting material.展开更多
基金supported by the National Natural Science Foundation of China(Grant No.10334070)the National Key Basic Research&Development Programme of China(No.2004CB619004).
文摘The studies on structure and electrical characteristic of Nb-doped SrTiO3 (SNTO) substrates by XRD, Hall measurements, R-T and SEM, show that the SNTO substrates with the same Nb-doping concentration have different electrical properties be- cause of the nonuniformity of Nb-doping. The uni- formly doped high-quality substrates are extremely important for fabricating multilayer structure and de- vices. In addition, the experimental results also pro- vide us with SEM method to judge the uniformity of conducting material.
