Aluminum-doped zinc oxide （ZnO：Al）, abbreviated as ZAO, is a novel and widely used transparent conductive material. The ZAO powder was synthesized by chemical coprecipitation. The ZAO ceramic sputtering target mate...Aluminum-doped zinc oxide （ZnO：Al）, abbreviated as ZAO, is a novel and widely used transparent conductive material. The ZAO powder was synthesized by chemical coprecipitation. The ZAO ceramic sputtering target materials were fabricated by sintering in air, and ZAO transparent conductive films were prepared by RF magnetron sputtering on glass substrates. XRD proved that such films had an orientation of （002） crystal panel paralleled to the surface of the glass substrate. The average transmittance of the films in the visible region exceeded 80%.展开更多
The studies were made on the preparation processes of the rare earth metal and alloy target materials and their characterization. In this work the rare earth metals were prepared by electrolysis of the oxide in molten...The studies were made on the preparation processes of the rare earth metal and alloy target materials and their characterization. In this work the rare earth metals were prepared by electrolysis of the oxide in molten salt for Nd metal and metallothermic reduction of the fluorides for Gd, Tb, Dy metals. After vacuum refining and distillation purification these rare earth metals were used for manufacturing the element targets, mosaic targets and as the starting materials of preparing the rare earth-transition metal (RE-TM) alloy targets. The four kinds of Dy-FeCo, NdDy-FeCo, Tb-FeCo and GdTb-FeCo alloy targets with diameter of 100 mm and thickness of 3 mm were prepared using powder metallurgical technique. The oxygen content and microstructure of the prepared RE-TM cast alloys and sintered targets were analyzed. The features and requirements of the RE-TM alloy sputtering target materials were also discussed.展开更多
文摘Aluminum-doped zinc oxide （ZnO：Al）, abbreviated as ZAO, is a novel and widely used transparent conductive material. The ZAO powder was synthesized by chemical coprecipitation. The ZAO ceramic sputtering target materials were fabricated by sintering in air, and ZAO transparent conductive films were prepared by RF magnetron sputtering on glass substrates. XRD proved that such films had an orientation of （002） crystal panel paralleled to the surface of the glass substrate. The average transmittance of the films in the visible region exceeded 80%.
基金Former the Ministry of Metallurgical Industry of China (BJ95-06-01)
文摘The studies were made on the preparation processes of the rare earth metal and alloy target materials and their characterization. In this work the rare earth metals were prepared by electrolysis of the oxide in molten salt for Nd metal and metallothermic reduction of the fluorides for Gd, Tb, Dy metals. After vacuum refining and distillation purification these rare earth metals were used for manufacturing the element targets, mosaic targets and as the starting materials of preparing the rare earth-transition metal (RE-TM) alloy targets. The four kinds of Dy-FeCo, NdDy-FeCo, Tb-FeCo and GdTb-FeCo alloy targets with diameter of 100 mm and thickness of 3 mm were prepared using powder metallurgical technique. The oxygen content and microstructure of the prepared RE-TM cast alloys and sintered targets were analyzed. The features and requirements of the RE-TM alloy sputtering target materials were also discussed.
