TiN single coatings and TiN/Ti(C,N) multilayer coatings deposited on Cr12MoV substrate have been completed by pulsed DC plasma enhanced chemical vapor deposition(PCVD) process. The SEM, XRD and microvicker’s hardness...TiN single coatings and TiN/Ti(C,N) multilayer coatings deposited on Cr12MoV substrate have been completed by pulsed DC plasma enhanced chemical vapor deposition(PCVD) process. The SEM, XRD and microvicker’s hardness as well as the indentation test were used to study the microstructure and mechanical properties of TiN/Ti(C,N) multilayer coatings. The results show that TiN/Ti(C,N) coatings are fine and have free column structure, and carbon atoms take the place of some nitrogen atoms in Ti(C,N) coatings when lower flow ratio of CH 4 is used. The microvicker’s hardness and interfacial adhesion between TiN/Ti(C,N) coatings and Cr12MoV substrate increases more obviously than that of TiN single hard coatings due to the more dense and free column structure when process is optimized.展开更多
A TiA1N coating was deposited on a heat resistant steel X12CrMoWVNbN10-1-1 by vacuum arc ion plating. The tensile and fatigue properties of the coated steel were investigated at room temperature （RT） and 650 ℃. The...A TiA1N coating was deposited on a heat resistant steel X12CrMoWVNbN10-1-1 by vacuum arc ion plating. The tensile and fatigue properties of the coated steel were investigated at room temperature （RT） and 650 ℃. The results reveal that the TiA1N coating is compact, on which a small number of large particle and pits are present. The Ti/Al atomic ratio in the coating is about 0.94. The average hardness of the coating is 1 868 HV0.1 and the interface bonding force between TiAIN coating and the substrate is about 3 l N. The elastic modulus and the strength of the steel are improved by the deposition of TiAIN coating. The influence of the TiA1N coating on the tensile properties of the steel can be ignored at both RT and 650 ℃. Moreover, there is no obvious decrease of the fatigue limit of substrate when the steel is coated by the coating at the investigated temperature.展开更多
Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4,BCl3,H2,N2,and Ar.By virtue of X-ray diffraction analys...Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4,BCl3,H2,N2,and Ar.By virtue of X-ray diffraction analysis,X-ray photoelectron spectroscopy,scanning electron microscope,and high-resolution transmission electron microscope,the influences of B content on the microstructure and properties of Ti B N coatings were investigated systematically.The results indicated that the microstructure and mechanical properties of Ti-B-N coatings largely depend on the transformation from FCC-TiN phase to HCP-TiB2 phase.With increasing B content and decreasing N content in the coatings,the coating microstructure evolves gradually from FCC-TiN/a-BN to HCP-TiB2 /a-BN via FCC-TiN+HCP-TiB2/a-BN.The highest microhardness of about 34 GPa is achieved,which corresponds to the nanocomposite Ti-63%B-N (mole fraction) coating consisting of the HCP-TiB2 nano-crystallites and amorphous BN phase.The lowest friction-coefficient was observed for the nanocomposite Ti-41%B-N (mole fraction) coating consisting of the FCC-TiN nanocrystallites and amorphous BN展开更多
Cr-Al-Si-N coatings were deposited on SUS 304 substrate by a hybrid coating system. A Cr interlayer was introduced between Cr-Al-Si-N coating and SUS 304 substrate to improve the coating adherence. The effects of Cr i...Cr-Al-Si-N coatings were deposited on SUS 304 substrate by a hybrid coating system. A Cr interlayer was introduced between Cr-Al-Si-N coating and SUS 304 substrate to improve the coating adherence. The effects of Cr interlayer on the microhardness, adhesion, and tribological behavior of Cr-Al-Si-N coatings were systematically investigated. The results indicate that the microhardness of the Cr-Al-Si-N coatings gradually deceases with increasing thickness of Cr interlayers. The adhesion between Cr-Al-Si-N and SUS 304 substrate is improved by addition of the Cr interlayers. A peak critical load of ~50 N is observed for the coating containing Cr interlayer of 60 nm as compared ~ 20 N for the coating without Cr interlayer. The thicker Cr interlayers result in reduced critical load values. Moreover, the wear resistance of the Cr-Al-Si-N coatings is greatly enhanced by introducing the Cr interlayer with thickness of 60 nm in spite of the decreased microhardness. The friction coefficient of the coating system is also moderately reduced.展开更多
Magnetron sputtered (Ti, Al)N monolayer and TiN/(Ti, Al)N multilayer coatings grown on cemented carbide substrates were studied by using energy dispersive X-ray spectroscopy (EDX), scanning electron microscopy(SEM), n...Magnetron sputtered (Ti, Al)N monolayer and TiN/(Ti, Al)N multilayer coatings grown on cemented carbide substrates were studied by using energy dispersive X-ray spectroscopy (EDX), scanning electron microscopy(SEM), nanoindentation, Rockwell A indentation test, strength measurements and cutting tests. The results show that the (Ti, Al)N monolayer and TiN/(Ti, Al)N multilayer coatings perform good affinity to substrate, and the TiN/(Ti, Al)N multilayer coating exhibits higher hardness, higher toughness and better cutting performance compared with the (Ti, Al)N monolayer coating. Moreover, the strength measurement indicates that the physical vapour deposition (PVD) coating has no effect on the substrate strength.展开更多
Inorganic coating was fabricated on the surface of the porous Si3N4 ceramic by polymer derived（PD） and spraying technology, via using vinyl-polysilazane（PSN-1） as a preceramic polymer and Si3N4 and lithium alumino...Inorganic coating was fabricated on the surface of the porous Si3N4 ceramic by polymer derived（PD） and spraying technology, via using vinyl-polysilazane（PSN-1） as a preceramic polymer and Si3N4 and lithium aluminosilicate（LAS） powders as fillers. The phase and microstructure of the coatings were analyzed by X-ray diffraction（XRD） analysis and scanning electron microscopy（SEM）, respectively. The effect of the coatings on mechanical property and humidity resistance of the porous Si3N4 ceramic was investigated. The experimental results showed that we successfully fabricated the uniform and dense coating which preferably combined with the substrate upon the addition of fillers. The bending strength of the porous Si3N4 ceramic sprayed the coating increased by more than 18%, and the surface hardness increased by 1.7 times. The apparent porosity of the materials reduced by an average of 97.7%, and water absorption was below 0.5%. Therefore, the prepared coating with preferable density had an obviously moisture-proof and enhanced effect on the porous Si3N4 ceramic.展开更多
The hardness, toughness and electrochemical properties of the CrN coatings were studied by the method of Ion Beam Enhanced DePosition(IBED). The results show that the fraction of CrN phase and its hardness increase wi...The hardness, toughness and electrochemical properties of the CrN coatings were studied by the method of Ion Beam Enhanced DePosition(IBED). The results show that the fraction of CrN phase and its hardness increase with increasing N2 partial pressure and N ions bombarding energy in a certain range, but the toughness decreases. When the N ions: Cr atoms ratio changes from 1. 45 × 1O-2, 3. 67 × 10-2 to 5. 87 ×10 - 2, Cr2O3 is produced. In terms of corrosion resistance, the coated specimen shows a slight improvement in comparison with substrate 52100 steel. The Cr-N coated specimen is characterized with pitting corrosion by penetrating the agent throngh the defects involved very thin coating layer.展开更多
Titanium-aluminium-nitride (Ti1-xAlxN) coatings were deposited by close-field un balanced magnetron sputtering on M42 steel substrates and WC-6wt%Co inserts at 4 50℃. The tribological behavior was analyzed by sliding...Titanium-aluminium-nitride (Ti1-xAlxN) coatings were deposited by close-field un balanced magnetron sputtering on M42 steel substrates and WC-6wt%Co inserts at 4 50℃. The tribological behavior was analyzed by sliding against steel and WC- 6wt%Co balls, while the turning performance was evaluated by a conventional tu rning machine at high cutting speeds without using coolants. In the tribological tests, the formation of transfer layer and the variations of hardness of the co atings played an important role for sliding against steel balls. For the coating s sliding against WC-6wt%Co balls, the Ti-Al-N coatings showed a similar frictio n coefficient, but the TiN coating exhibited a lower value. The difference could be explained by the tri-oxidation wear mechanism. In the turning tests, a super ior cutting performance of the coating was found at x=0.45, which endured 38 min utes before the tool flank wear reached the maximum value of 0.3mm, whereas only 20 minutes were endured for the TiN coating. The excellent performance of the c oatings in the turning tests could be explained by the enhanced mechanical prope rties and oxidation/diffusion resistance of the coatings.展开更多
Ti-Si-N composite coatings were synthesized on a novel combining cathode and middle-frequency magnetron sputtering system, designed on an industrial scale. Ti was produced from the arc target and Si from magnetron tar...Ti-Si-N composite coatings were synthesized on a novel combining cathode and middle-frequency magnetron sputtering system, designed on an industrial scale. Ti was produced from the arc target and Si from magnetron target during deposition. The influences of negative bias voltage and Si content on the hardness and microstructure of the coatings were investigated. The composite coatings prepared under optimized conditions were characterized to be nc-TiN/a-Si3N4 structure with grain sizes of TiN ranging from 8-15 nm and exhibited a high hardness of 40 GPa. The enhancement of the hardness is suggested to be caused by the nanograin-amorphous structure effects.展开更多
(Ti, Al)N gradient nano-coating was deposited on the surface of 1Cr11Ni2W2MoV stainless steel by the MTP-8-800 arc ion plating equipment. And the oxidation performance at high temperature for 500h was tested under t...(Ti, Al)N gradient nano-coating was deposited on the surface of 1Cr11Ni2W2MoV stainless steel by the MTP-8-800 arc ion plating equipment. And the oxidation performance at high temperature for 500h was tested under the condition of the surrounding air temperature 700℃. The test results show that, because of the structural features of the （Ti, Al）N coating, the coating becomes the compact and continuous Al2O3 film, which can protect the basis material effectively in the process of the high temperature oxidizing. The oxidation kinetics of the coating accord with parabolic law.展开更多
The fine rnicrostrueture of the Y-modified ion plated Ti(Y)N coating/substrate steel A3 system has been examined by means of TEM and microdiffraction technique.It was revealed that the interface consists of 3 sublayer...The fine rnicrostrueture of the Y-modified ion plated Ti(Y)N coating/substrate steel A3 system has been examined by means of TEM and microdiffraction technique.It was revealed that the interface consists of 3 sublayers,i.e.α-Fe+Y_6Fe_(23),Ti+Y+FeTi and Ti_2N+YN +Ti_xN_y.The thicknesses of them are about 200,50 and 120 nm respectively.The phases in the transition area seem to have certain orientation relations.The mechanism of interface formation has also been discussed.展开更多
Ti(C, N)-TiB2 composite coatings were deposited by means of reactive low pressure plasma spraying (LPPS) based on the technology of self-propagating high-temperature synthesis (SHS). The original powders were mixtures...Ti(C, N)-TiB2 composite coatings were deposited by means of reactive low pressure plasma spraying (LPPS) based on the technology of self-propagating high-temperature synthesis (SHS). The original powders were mixtures of Ti and B4C powders. The powders were mixed by ball mill and then spray-dried and at last sintered to be suitable for spraying. Two spraying distances were selected for LPPS. Scanning electron microscopy (SEM) was used to investigate the morphologies of powders for spraying and the microstructures of the coatings. The phase compositions of coatings were measured by X-ray diffraction (XRD). Spray-dried and sintered powders are denser and better bond than only spray-dried powders. The composite coating is composed of TiB2, TiC0.3N0.7, TiN0.3, Ti4N3-x and impurity phase of Ti5Si3 with 300 mm spraying distance. Partly unreacted B4C powders remained in the coating for 240 mm spraying distance, which may be inadequate reaction. No titanium oxide was detected in the composite coating for the relative high vacuum degree of LPPS. The anti-corrosion property of LPPS sprayed Ti(C, N)-TiB2 composite coating with 300 mm spraying distance in electrolytic solution is superior to that of 240 mm spraying distance. Microhardness of Ti(C, N)-TiB2 composite coating is relatively low due to the unconsolidated structure of the coating. The solving methods to improve property of composite coating are finally put forward in the paper.展开更多
ZrN/Zr-N/Zr coatings were deposited on H13 steel by close field unbalanced magnetron sputtering ion plating （CFUBMSIP） technique. The effect of two main parameters such as OEM and bias voltage for the CFUBMSIP proce...ZrN/Zr-N/Zr coatings were deposited on H13 steel by close field unbalanced magnetron sputtering ion plating （CFUBMSIP） technique. The effect of two main parameters such as OEM and bias voltage for the CFUBMSIP process on the microstructure, mechanical properties and impact fatigue behavior of the coatings was investigated. The results indicate that with OEM increasing from 55% to 65% the surface particles size of the coatings increases while it remains almost similar when the bias voltage changes from 60 to 75 V. An aggregation of the particles occurs on the coatings surface, with further increasing the OEM and bias voltage to 75% and 90 V, respectively. The coatings show a columnar grain structure and are mainly composed of two phases of ZrN and Zr. The coating hardness decreases with OEM value increasing and both the coating hardness and modulus go up with bias voltage. The coating deposited under OEM of 65% and bias voltage of 75 V shows the best impact fatigue property.展开更多
文摘TiN single coatings and TiN/Ti(C,N) multilayer coatings deposited on Cr12MoV substrate have been completed by pulsed DC plasma enhanced chemical vapor deposition(PCVD) process. The SEM, XRD and microvicker’s hardness as well as the indentation test were used to study the microstructure and mechanical properties of TiN/Ti(C,N) multilayer coatings. The results show that TiN/Ti(C,N) coatings are fine and have free column structure, and carbon atoms take the place of some nitrogen atoms in Ti(C,N) coatings when lower flow ratio of CH 4 is used. The microvicker’s hardness and interfacial adhesion between TiN/Ti(C,N) coatings and Cr12MoV substrate increases more obviously than that of TiN single hard coatings due to the more dense and free column structure when process is optimized.
基金Funded by National Science Foundation of China(No.51172182)the Program for New Century Excellent Talents in University(No.NCET-08-0460)the 111 Project(No.B08040)
文摘A TiA1N coating was deposited on a heat resistant steel X12CrMoWVNbN10-1-1 by vacuum arc ion plating. The tensile and fatigue properties of the coated steel were investigated at room temperature （RT） and 650 ℃. The results reveal that the TiA1N coating is compact, on which a small number of large particle and pits are present. The Ti/Al atomic ratio in the coating is about 0.94. The average hardness of the coating is 1 868 HV0.1 and the interface bonding force between TiAIN coating and the substrate is about 3 l N. The elastic modulus and the strength of the steel are improved by the deposition of TiAIN coating. The influence of the TiA1N coating on the tensile properties of the steel can be ignored at both RT and 650 ℃. Moreover, there is no obvious decrease of the fatigue limit of substrate when the steel is coated by the coating at the investigated temperature.
基金funded by a grant from the National Core Research Center(NCRC)Program through the National Research Foundation of Korea funded by the Ministry of Education,Science and Technology(No.2012-0000-957)by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy,Republic of Korea
文摘Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4,BCl3,H2,N2,and Ar.By virtue of X-ray diffraction analysis,X-ray photoelectron spectroscopy,scanning electron microscope,and high-resolution transmission electron microscope,the influences of B content on the microstructure and properties of Ti B N coatings were investigated systematically.The results indicated that the microstructure and mechanical properties of Ti-B-N coatings largely depend on the transformation from FCC-TiN phase to HCP-TiB2 phase.With increasing B content and decreasing N content in the coatings,the coating microstructure evolves gradually from FCC-TiN/a-BN to HCP-TiB2 /a-BN via FCC-TiN+HCP-TiB2/a-BN.The highest microhardness of about 34 GPa is achieved,which corresponds to the nanocomposite Ti-63%B-N (mole fraction) coating consisting of the HCP-TiB2 nano-crystallites and amorphous BN phase.The lowest friction-coefficient was observed for the nanocomposite Ti-41%B-N (mole fraction) coating consisting of the FCC-TiN nanocrystallites and amorphous BN
基金supported by a grant from the National Core Research Center (NCRC) Program through the National Research Foundation of Korea funded by the Ministry of Education, Science and Technology (No. 2010-0001-226)a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy, Republic of Korea
文摘Cr-Al-Si-N coatings were deposited on SUS 304 substrate by a hybrid coating system. A Cr interlayer was introduced between Cr-Al-Si-N coating and SUS 304 substrate to improve the coating adherence. The effects of Cr interlayer on the microhardness, adhesion, and tribological behavior of Cr-Al-Si-N coatings were systematically investigated. The results indicate that the microhardness of the Cr-Al-Si-N coatings gradually deceases with increasing thickness of Cr interlayers. The adhesion between Cr-Al-Si-N and SUS 304 substrate is improved by addition of the Cr interlayers. A peak critical load of ~50 N is observed for the coating containing Cr interlayer of 60 nm as compared ~ 20 N for the coating without Cr interlayer. The thicker Cr interlayers result in reduced critical load values. Moreover, the wear resistance of the Cr-Al-Si-N coatings is greatly enhanced by introducing the Cr interlayer with thickness of 60 nm in spite of the decreased microhardness. The friction coefficient of the coating system is also moderately reduced.
文摘Magnetron sputtered (Ti, Al)N monolayer and TiN/(Ti, Al)N multilayer coatings grown on cemented carbide substrates were studied by using energy dispersive X-ray spectroscopy (EDX), scanning electron microscopy(SEM), nanoindentation, Rockwell A indentation test, strength measurements and cutting tests. The results show that the (Ti, Al)N monolayer and TiN/(Ti, Al)N multilayer coatings perform good affinity to substrate, and the TiN/(Ti, Al)N multilayer coating exhibits higher hardness, higher toughness and better cutting performance compared with the (Ti, Al)N monolayer coating. Moreover, the strength measurement indicates that the physical vapour deposition (PVD) coating has no effect on the substrate strength.
文摘Inorganic coating was fabricated on the surface of the porous Si3N4 ceramic by polymer derived（PD） and spraying technology, via using vinyl-polysilazane（PSN-1） as a preceramic polymer and Si3N4 and lithium aluminosilicate（LAS） powders as fillers. The phase and microstructure of the coatings were analyzed by X-ray diffraction（XRD） analysis and scanning electron microscopy（SEM）, respectively. The effect of the coatings on mechanical property and humidity resistance of the porous Si3N4 ceramic was investigated. The experimental results showed that we successfully fabricated the uniform and dense coating which preferably combined with the substrate upon the addition of fillers. The bending strength of the porous Si3N4 ceramic sprayed the coating increased by more than 18%, and the surface hardness increased by 1.7 times. The apparent porosity of the materials reduced by an average of 97.7%, and water absorption was below 0.5%. Therefore, the prepared coating with preferable density had an obviously moisture-proof and enhanced effect on the porous Si3N4 ceramic.
文摘The hardness, toughness and electrochemical properties of the CrN coatings were studied by the method of Ion Beam Enhanced DePosition(IBED). The results show that the fraction of CrN phase and its hardness increase with increasing N2 partial pressure and N ions bombarding energy in a certain range, but the toughness decreases. When the N ions: Cr atoms ratio changes from 1. 45 × 1O-2, 3. 67 × 10-2 to 5. 87 ×10 - 2, Cr2O3 is produced. In terms of corrosion resistance, the coated specimen shows a slight improvement in comparison with substrate 52100 steel. The Cr-N coated specimen is characterized with pitting corrosion by penetrating the agent throngh the defects involved very thin coating layer.
文摘Titanium-aluminium-nitride (Ti1-xAlxN) coatings were deposited by close-field un balanced magnetron sputtering on M42 steel substrates and WC-6wt%Co inserts at 4 50℃. The tribological behavior was analyzed by sliding against steel and WC- 6wt%Co balls, while the turning performance was evaluated by a conventional tu rning machine at high cutting speeds without using coolants. In the tribological tests, the formation of transfer layer and the variations of hardness of the co atings played an important role for sliding against steel balls. For the coating s sliding against WC-6wt%Co balls, the Ti-Al-N coatings showed a similar frictio n coefficient, but the TiN coating exhibited a lower value. The difference could be explained by the tri-oxidation wear mechanism. In the turning tests, a super ior cutting performance of the coating was found at x=0.45, which endured 38 min utes before the tool flank wear reached the maximum value of 0.3mm, whereas only 20 minutes were endured for the TiN coating. The excellent performance of the c oatings in the turning tests could be explained by the enhanced mechanical prope rties and oxidation/diffusion resistance of the coatings.
基金Funded by the Natural Science Foundation of China(No.10435060 andNo. 10675095)
文摘Ti-Si-N composite coatings were synthesized on a novel combining cathode and middle-frequency magnetron sputtering system, designed on an industrial scale. Ti was produced from the arc target and Si from magnetron target during deposition. The influences of negative bias voltage and Si content on the hardness and microstructure of the coatings were investigated. The composite coatings prepared under optimized conditions were characterized to be nc-TiN/a-Si3N4 structure with grain sizes of TiN ranging from 8-15 nm and exhibited a high hardness of 40 GPa. The enhancement of the hardness is suggested to be caused by the nanograin-amorphous structure effects.
文摘(Ti, Al)N gradient nano-coating was deposited on the surface of 1Cr11Ni2W2MoV stainless steel by the MTP-8-800 arc ion plating equipment. And the oxidation performance at high temperature for 500h was tested under the condition of the surrounding air temperature 700℃. The test results show that, because of the structural features of the （Ti, Al）N coating, the coating becomes the compact and continuous Al2O3 film, which can protect the basis material effectively in the process of the high temperature oxidizing. The oxidation kinetics of the coating accord with parabolic law.
文摘The fine rnicrostrueture of the Y-modified ion plated Ti(Y)N coating/substrate steel A3 system has been examined by means of TEM and microdiffraction technique.It was revealed that the interface consists of 3 sublayers,i.e.α-Fe+Y_6Fe_(23),Ti+Y+FeTi and Ti_2N+YN +Ti_xN_y.The thicknesses of them are about 200,50 and 120 nm respectively.The phases in the transition area seem to have certain orientation relations.The mechanism of interface formation has also been discussed.
文摘Ti(C, N)-TiB2 composite coatings were deposited by means of reactive low pressure plasma spraying (LPPS) based on the technology of self-propagating high-temperature synthesis (SHS). The original powders were mixtures of Ti and B4C powders. The powders were mixed by ball mill and then spray-dried and at last sintered to be suitable for spraying. Two spraying distances were selected for LPPS. Scanning electron microscopy (SEM) was used to investigate the morphologies of powders for spraying and the microstructures of the coatings. The phase compositions of coatings were measured by X-ray diffraction (XRD). Spray-dried and sintered powders are denser and better bond than only spray-dried powders. The composite coating is composed of TiB2, TiC0.3N0.7, TiN0.3, Ti4N3-x and impurity phase of Ti5Si3 with 300 mm spraying distance. Partly unreacted B4C powders remained in the coating for 240 mm spraying distance, which may be inadequate reaction. No titanium oxide was detected in the composite coating for the relative high vacuum degree of LPPS. The anti-corrosion property of LPPS sprayed Ti(C, N)-TiB2 composite coating with 300 mm spraying distance in electrolytic solution is superior to that of 240 mm spraying distance. Microhardness of Ti(C, N)-TiB2 composite coating is relatively low due to the unconsolidated structure of the coating. The solving methods to improve property of composite coating are finally put forward in the paper.
基金the financial supports from the National Natural Science Foundation of China(No.52065009)the Science and Technology Planning Project of Guizhou Province,China(No.ZK2021269)the Science and Technology Planning Project of Guiyang,China(No.2021.1-4)。
基金Funded by the National Natural Science Foundation of China(No.50771070)the Shanxi Province Science and Technology Key Project(No.20120321017-03)
文摘ZrN/Zr-N/Zr coatings were deposited on H13 steel by close field unbalanced magnetron sputtering ion plating （CFUBMSIP） technique. The effect of two main parameters such as OEM and bias voltage for the CFUBMSIP process on the microstructure, mechanical properties and impact fatigue behavior of the coatings was investigated. The results indicate that with OEM increasing from 55% to 65% the surface particles size of the coatings increases while it remains almost similar when the bias voltage changes from 60 to 75 V. An aggregation of the particles occurs on the coatings surface, with further increasing the OEM and bias voltage to 75% and 90 V, respectively. The coatings show a columnar grain structure and are mainly composed of two phases of ZrN and Zr. The coating hardness decreases with OEM value increasing and both the coating hardness and modulus go up with bias voltage. The coating deposited under OEM of 65% and bias voltage of 75 V shows the best impact fatigue property.
