The application of non-evaporable getters is increasing, they have been widely used in sealed-off vacuum or controlled atmosphere devices. A new type of Ti-based sintered non-evaporable getter has been studied. The ro...The application of non-evaporable getters is increasing, they have been widely used in sealed-off vacuum or controlled atmosphere devices. A new type of Ti-based sintered non-evaporable getter has been studied. The room temperature pumping speeds under three activation processes for H2 were measured as a function of sorbed gas quantities in this paper. At the same time, the optimal activation processes were discussed. The results indicate that the getter combines high porosity and large specific surface area which confirm good performances at room temperature. The threshold of activation temperature is about 500℃ and optimal pumping speed and pumping capacity can be achieved with activation temperature around 600℃ for 30 min. Besides, different configurations can be available in accordance with requirements.展开更多
The results of observation of different structuring techniques of thin metal layers applied in micro system technologies are presented. The Ti V getter films formed by magnetron sputtering have been explored using sca...The results of observation of different structuring techniques of thin metal layers applied in micro system technologies are presented. The Ti V getter films formed by magnetron sputtering have been explored using scanning electron and atomic-force microscopy, Brunauer-Emmett-Teller method, thermogravimetric analysis and fractal geometry. The film sorption capacity for hydrogen given by thermogravimetry was of 7.7 m3·Pa·g-1. To estimate the effective surface area, the fractal geometry tools were used and the calculated value of the specific surface area was about 155 m2/m3. The second object under investigation was a structure composed of micro- and mesoporous silicon and copper layer deposited electrochemically on the pore walls. Porous silicon when coupled with a reactive metal or alloy is expected to be an effective getter for micro system techniques. The use of porous silicon and specific conditions of depositions allows to form the structure of complex fractal type with a specific surface area of 167 m2/cm3.展开更多
Non-evaporable getter(NEG)films are an integral part of many particle accelerators.These films provide conductance-free evenly distributed pumping,a low thermal outgassing rate,and a low photon-and electron-stimulated...Non-evaporable getter(NEG)films are an integral part of many particle accelerators.These films provide conductance-free evenly distributed pumping,a low thermal outgassing rate,and a low photon-and electron-stimulated desorption.These characteristics make it an ideal solution for resolving the non-uniform pressure distribution in conductance-limited narrow vacuum tubes.In this study,ternary Ti-Zr-V films were deposited on Si substrates and Ag-Cu(Ag 0.085 wt%)tubes with an inner diameter of 22 mm.All Ti-Zr-V films were prepared from an alloy target using the same DC magnetron sputtering parameters.The compositions and corresponding chemical bonding states were analyzed by X-ray photoelectron spectroscopy after activation at different temperatures.The test particle Monte Carlo(TPMC)method was used to measure the sticking probability of the Ti-Zr-V film based on pressure readings during gas injection.The results indicate that activation commences at temperatures as low as 150℃and Ti~0,Zr~0,and V~0 exist on the surface after annealing at 180℃for 1 h.Ti-Zr-V films can be fully activated at 180℃for 24 h.The CO sticking probability reaches 0.15,with a pumping capacity of 1 monolayer.展开更多
Introduction The pumping performance of getter materials has becoming one of the hotspots in accelerator field.The recovery of pumping performance after air venting,also called aging effect,is important for applicatio...Introduction The pumping performance of getter materials has becoming one of the hotspots in accelerator field.The recovery of pumping performance after air venting,also called aging effect,is important for applications in accelerators.Materials and methods In this work,we investigated the aging effect of Ti-V-Zr-Hf-and Ti-V-Zr-coated copper tubular chambers,and the effect of initial air exposure time on the aging properties.The samples presented hierarchically micro/nano-structures and showed a featured aging curve,giving about 9 effective pumping cycles.Conclusion The pumping performance is inversely correlated with air exposure time suggesting that the getter coated cham-bers should be properly preserved before applied as a"pump".展开更多
文摘The application of non-evaporable getters is increasing, they have been widely used in sealed-off vacuum or controlled atmosphere devices. A new type of Ti-based sintered non-evaporable getter has been studied. The room temperature pumping speeds under three activation processes for H2 were measured as a function of sorbed gas quantities in this paper. At the same time, the optimal activation processes were discussed. The results indicate that the getter combines high porosity and large specific surface area which confirm good performances at room temperature. The threshold of activation temperature is about 500℃ and optimal pumping speed and pumping capacity can be achieved with activation temperature around 600℃ for 30 min. Besides, different configurations can be available in accordance with requirements.
文摘The results of observation of different structuring techniques of thin metal layers applied in micro system technologies are presented. The Ti V getter films formed by magnetron sputtering have been explored using scanning electron and atomic-force microscopy, Brunauer-Emmett-Teller method, thermogravimetric analysis and fractal geometry. The film sorption capacity for hydrogen given by thermogravimetry was of 7.7 m3·Pa·g-1. To estimate the effective surface area, the fractal geometry tools were used and the calculated value of the specific surface area was about 155 m2/m3. The second object under investigation was a structure composed of micro- and mesoporous silicon and copper layer deposited electrochemically on the pore walls. Porous silicon when coupled with a reactive metal or alloy is expected to be an effective getter for micro system techniques. The use of porous silicon and specific conditions of depositions allows to form the structure of complex fractal type with a specific surface area of 167 m2/cm3.
基金supported by the National Natural Science Foundation of China(Nos.11975226,11905219)the Fundamental Research Funds for the Central Universities(No.WK2310000071)the National Key Research and Development Program of China(2016YFA0402004).
文摘Non-evaporable getter(NEG)films are an integral part of many particle accelerators.These films provide conductance-free evenly distributed pumping,a low thermal outgassing rate,and a low photon-and electron-stimulated desorption.These characteristics make it an ideal solution for resolving the non-uniform pressure distribution in conductance-limited narrow vacuum tubes.In this study,ternary Ti-Zr-V films were deposited on Si substrates and Ag-Cu(Ag 0.085 wt%)tubes with an inner diameter of 22 mm.All Ti-Zr-V films were prepared from an alloy target using the same DC magnetron sputtering parameters.The compositions and corresponding chemical bonding states were analyzed by X-ray photoelectron spectroscopy after activation at different temperatures.The test particle Monte Carlo(TPMC)method was used to measure the sticking probability of the Ti-Zr-V film based on pressure readings during gas injection.The results indicate that activation commences at temperatures as low as 150℃and Ti~0,Zr~0,and V~0 exist on the surface after annealing at 180℃for 1 h.Ti-Zr-V films can be fully activated at 180℃for 24 h.The CO sticking probability reaches 0.15,with a pumping capacity of 1 monolayer.
基金supported by High Energy Photon Source(HEPS),a major national science and technology infrastructureprovided by National Development and Reform Commission(Grant No.发改高技(2017)2173号)
文摘Introduction The pumping performance of getter materials has becoming one of the hotspots in accelerator field.The recovery of pumping performance after air venting,also called aging effect,is important for applications in accelerators.Materials and methods In this work,we investigated the aging effect of Ti-V-Zr-Hf-and Ti-V-Zr-coated copper tubular chambers,and the effect of initial air exposure time on the aging properties.The samples presented hierarchically micro/nano-structures and showed a featured aging curve,giving about 9 effective pumping cycles.Conclusion The pumping performance is inversely correlated with air exposure time suggesting that the getter coated cham-bers should be properly preserved before applied as a"pump".
