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Optimization of Plasma Etching Parameters and Mask for Silica Optical Waveguides 被引量:1
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作者 周立兵 刘文 吴国阳 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第6期1104-1110,共7页
Optical waveguides in silica-on-silicon are one of the key elements in optical communications.The processes of deep etching silica waveguides using resist and metal masks in RIE plasma are investigated.The etching res... Optical waveguides in silica-on-silicon are one of the key elements in optical communications.The processes of deep etching silica waveguides using resist and metal masks in RIE plasma are investigated.The etching responses,including etching rate and selectivity as functions of variation of parameters,are modeled with a 3D neural network.A novel resist/metal combined mask that can overcome the single-layer masks’ limitations is developed for enhancing the waveguides deep etching and low-loss optical waveguides are fabricated at last. 展开更多
关键词 reactive ion etching silica-on-silicon optical waveguides 3D neural network
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Mode-field half-widths of Gaussian approximation for the fundamental mode of two kinds of optical waveguides
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作者 李连煌 郭福源 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第6期2398-2403,共6页
This paper analyzes the characteristic of matching efficiency between the fundamental mode of two kinds of optical waveguides and its Gaussian approximate field.Then, it presents a new method where the mode-field half... This paper analyzes the characteristic of matching efficiency between the fundamental mode of two kinds of optical waveguides and its Gaussian approximate field.Then, it presents a new method where the mode-field half-width of Caussian approximation for the fundamental mode should be defined according to the maximal matching efficiency method. The relationship between the mode-field half-width of the Gaussian approximate field obtained from the maximal matching efficiency and normalized frequency is studied; furthermore, two formulas of mode-field half-widths as a function of normalized frequency are proposed. 展开更多
关键词 mode-field half-width Gaussian approximation normalized frequency optical waveguide
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Design and fabrication of GeAsSeS chalcogenide waveguides with thermal annealing
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作者 Limeng Zhang Jinbo Chen +4 位作者 Jierong Gu Yixiao Gao Xiang Shen Yimin Chen Tiefeng Xu 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第3期320-325,共6页
We reported a chalcogenide glass-based rib waveguide fabricated using photolithography and dry etching method. A commercial software(COMSOL Multiphysics) was used to optimize the waveguide structure and the distributi... We reported a chalcogenide glass-based rib waveguide fabricated using photolithography and dry etching method. A commercial software(COMSOL Multiphysics) was used to optimize the waveguide structure and the distribution of the fundamental modes in the waveguide based on the complete vector finite component. We further employed thermal annealing to optimize the surface and sidewalls of the rib waveguides. It was found that the optimal annealing temperature for Ge As Se S films is 220℃, and the roughness of the films could be significantly reduced by annealing. The zero-dispersion wavelength(ZDW) could be shifted to a short wavelength around ~2.1 μm via waveguide structural optimization, which promotes supercontinuum generation with a short wavelength pump laser source. The insertion loss of the waveguides with cross-sectional areas of 4.0 μm×3.5 μm and 6.0 μm×3.5 μm was measured using lens fiber and the cut-back method. The propagation loss of the 220℃ annealed waveguides could be as low as 1.9 d B/cm at 1550 nm. 展开更多
关键词 chalcogenide film dispersion engineering optical waveguide thermal annealing
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Full-vectorial analysis of optical waveguides by the finite difference method based on polynomial interpolation
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作者 肖金标 张明德 孙小菡 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第1期143-148,共6页
Based on the polynomial interpolation, a new finite difference (FD) method in solving the full-vectorial guidedmodes for step-index optical waveguides is proposed. The discontinuities of the normal components of the... Based on the polynomial interpolation, a new finite difference (FD) method in solving the full-vectorial guidedmodes for step-index optical waveguides is proposed. The discontinuities of the normal components of the electric field across abrupt dielectric interfaces are considered in the absence of the limitations of scalar and semivectorial approximation, and the present PD scheme can be applied to both uniform and non-uniform mesh grids. The modal propagation constants and field distributions for buried rectangular waveguides and optical rib waveguides are presented. The hybrid nature of the vectorial modes is demonstrated and the singular behaviours of the minor field components in the corners are observed. Moreover, solutions are in good agreement with those published early, which tests the validity of the present approach. 展开更多
关键词 polynomial interpolation finite difference full vectorial mode solver optical waveguides photonic integrated circuits
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Optical properties of He^(+)-implanted and diamond blade-diced terbium gallium garnet crystal planar and ridge waveguides
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作者 Jia-Li You Yu-Song Wang +5 位作者 Tong Wang Li-Li Fu Qing-Yang Yue Xiang-Fu Wang Rui-Lin Zheng Chun-Xiao Liu 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第11期324-328,共5页
Terbium gallium garnet(Tb_(3)Ga_(5)O_(12),TGG)crystal can be used to fabricate various magneto-optical devices due to its optimal Faraday effect.In this work,400-keV He^(+)ions with a fluence of 6.0×10^(16)ions/c... Terbium gallium garnet(Tb_(3)Ga_(5)O_(12),TGG)crystal can be used to fabricate various magneto-optical devices due to its optimal Faraday effect.In this work,400-keV He^(+)ions with a fluence of 6.0×10^(16)ions/cm^(2)are irradiated into the TGG crystal for the planar waveguide formation.The precise diamond blade dicing with a rotation speed of 2×10^(4)rpm and a cutting velocity of 0.1 mm/s is performed on the He^(+)-implanted TGG planar waveguide for the ridge structure.The darkmode spectrum of the He^(+)-implanted TGG planar waveguide is measured by the prism-coupling method,thereby obtaining the relationship between the reflected light intensity and the effective refractive index.The refractive index profile of the planar waveguide is reconstructed by the reflectivity calculation method.The near-field light intensity distribution of the planar waveguide and the ridge waveguide are recorded by the end-face coupling method.The He^(+)-implanted and diamond blade-diced TGG crystal planar and ridge waveguides are promising candidates for integrated magneto-optical devices. 展开更多
关键词 TGG crystal optical waveguide ion implantation precise diamond blade dicing
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Optical soliton with group delay in microring coupled-resonator optical waveguides
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作者 田赫 掌蕴东 +3 位作者 王号 欧阳秋云 王楠 袁萍 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第1期221-224,共4页
This paper derives the dispersion relation of microring coupled-resonator optical waveguides (CROWs) without any approximation by using the transfer matrix method. Based on the established dispersion relation of CRO... This paper derives the dispersion relation of microring coupled-resonator optical waveguides (CROWs) without any approximation by using the transfer matrix method. Based on the established dispersion relation of CROWs it obtains the slow group velocity and dispersion coefficient. It finds that the effect Of dispersion on optical pulses can be adjusted to balance the effect of nonlinearity by changing coupling coefficient or loss, so optical soliton with group delay can be obtained in microring CROWs. The optical soliton with group delay is of great significance for applications of microring CROWs in delay lines and optical buffers of future all-optical communication systems. 展开更多
关键词 optical waveguide optical soliton group delay
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FLUORINATED PHTHALAZINONE-CONTAINING COPOLYIMIDES FOR PASSIVE OPTICAL WAVEGUIDES
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作者 Jin-yanWang Gong-xiongLiao YuanSong Shu-deXiao Xi-gaoJian 《Chinese Journal of Polymer Science》 SCIE CAS CSCD 2005年第1期71-74,共4页
A series of fluorinated copolyimides containing phthalazinone moieties were prepared from 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride(6FDA),3,3'4,4'-benzophenone-tetracarboxylic dianhydride(BPDA)... A series of fluorinated copolyimides containing phthalazinone moieties were prepared from 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride(6FDA),3,3'4,4'-benzophenone-tetracarboxylic dianhydride(BPDA)and2-(4-aminophenyl)-4-[4-(4-aminophenoxyl)phenyl]-2,3-phthalazin-1-one(DHPZ-2NH_2)for making polymeric opticalwaveguides.The resulting copolymers containing 0-50 mo1% BPDA/DHPZ-2NH_2 show good solubility and are soluble insome organic polar aprotic solvents.The copolyimides also present excellent thermal stability.These polymers possess highglass transition temperature higher than 603 K and high decomposition temperature above 742 K determined by differentialscanning calorimetry and thennogravimetric analysis,respectively,under a nitrogen atmosphere.Their refractive indicescould be controlled by varying the ratio of 6FDA and BPDA in the copolymer from 0.5 to 1.0,and the in-plane refractiveindices(n_(TE))range from 1.6366 to 1.6668 and the out-of-plane refractive indices(n_(TM))from 1.6024 to 1.6280 at 632.8 nm.The polymers birefringence(0.0342-0.0388)is almost independent of the 6FDA content of copolymer,which indicated thatthe phthalazinone-containing copolyimides could be suitable to fabricate optical waveguides possessing a low polarizationdependent loss(PDL). 展开更多
关键词 Polymeric optical waveguides Fluorinated polyimides Phthalazinone.
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Second harmonic generation from precise diamond blade diced ridge waveguides
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作者 Hui Xu Ziqi Li +7 位作者 Chi Pang Rang Li Genglin Li ShAkhmadaliev Shengqiang Zhou Qingming Lu Yuechen Jia Feng Chen 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第9期340-345,共6页
Carbon ion irradiation and precise diamond blade dicing are applied to fabricate Nd∶GdCOB ridge waveguides.The propagation properties of the fabricated Nd∶GdCOB waveguides are investigated through experiments and th... Carbon ion irradiation and precise diamond blade dicing are applied to fabricate Nd∶GdCOB ridge waveguides.The propagation properties of the fabricated Nd∶GdCOB waveguides are investigated through experiments and theoret-ical analysis.Micro-Raman analysis reveals that the Nd∶GdCOB crystal lattice expands during the irradiation process.Micro-second harmonic spectroscopic analysis suggests that the original nonlinear properties of the Nd∶GdCOB crystal are greatly enhanced within the waveguide volume.Under pulsed 1064 nm laser pumping,second harmonic generation(SHG)at 532 nm has been achieved in the fabricated waveguides.The maximum SHG conversion efficiencies are determined to be~8.32%·W^(-1) and~22.36%·W^(-1) for planar and ridge waveguides,respectively. 展开更多
关键词 optical waveguides Nd:GdCOB crystal second harmonic generation
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Revised RPS Method for Complex Solution of Multimode Slab Waveguides with Metal layers
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作者 LIJian-jun SHENGuang-di 《Semiconductor Photonics and Technology》 CAS 2004年第3期190-193,共4页
The RPS method,which integrates the real numerical solution, the perturbation solution and the shooting solution reasonably,can obtain the complex solution of a slab waveguide with small gain/loss regions without sear... The RPS method,which integrates the real numerical solution, the perturbation solution and the shooting solution reasonably,can obtain the complex solution of a slab waveguide with small gain/loss regions without searching the root in the entire complex plan.A revision to the RPS method is presented so that it can deal with the waveguide including large gain/loss regions.The application indicated that the simulation results are precise. 展开更多
关键词 Optical waveguides Slab waveguides Simulation RPS method
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Asymptotic Theory of Guided Modes for Cladded Slab Waveguides
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作者 王子华 陈振宜 《Advances in Manufacturing》 SCIE CAS 1997年第1期64-69,共6页
Multilayer cladded slab waveguides have been solved by using asymptotic theory once or twice. Based on the solution of a three layer slab waveguide, the wave number of guided modes has been expanded in series of one o... Multilayer cladded slab waveguides have been solved by using asymptotic theory once or twice. Based on the solution of a three layer slab waveguide, the wave number of guided modes has been expanded in series of one or two small parameters. One side cladded slab, two side cladded slab and two parallel cladded slab waveguide system are demonstrated to show how to use this essentially analytic method. Numerical examples have also been given and compared with exact solutions, eved the first or second order solutions are highly accurate. 展开更多
关键词 planar optical waveguide guided mode asymptotic theory
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Loss Measurements on Polymer Thin Film Optical Waveguides
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作者 MAChang-bao MENGFan-qing 《Semiconductor Photonics and Technology》 CAS 2000年第1期37-39,共3页
A simple setup for the measurement of transmission loss in polymer thin film optical waveguides is described. A new electro-optic polymer film has been prepared. The transmission loss of the film is measured before an... A simple setup for the measurement of transmission loss in polymer thin film optical waveguides is described. A new electro-optic polymer film has been prepared. The transmission loss of the film is measured before and after corona poling. And the loss is determined to be 1.84 dB/cm and 2.14 dB/cm, respectively. 展开更多
关键词 Loss measurement Optical waveguide Polymer thin film
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Single-photon interconnector composed of two individual one-dimensional nano-waveguides and a single emitter
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作者 张新琴 夏秀文 +1 位作者 许静平 羊亚平 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第5期177-182,共6页
Recently, theoretical and experimental nano-sized fundamental devices for optical circuits have been proposed at the single-photon level. The assembly of a realistic optical circuit is now a reality. In this work, we ... Recently, theoretical and experimental nano-sized fundamental devices for optical circuits have been proposed at the single-photon level. The assembly of a realistic optical circuit is now a reality. In this work, we introduce a single-photon interconnector composed of two individual nanowires and an optical N-type four-level emitter that can turn the optical connection on and off optically. Because of dipole-induced transmission at the single-photon level, a single photon can travel between the two nanowires reciprocally, which guarantees its application as an all-optical interconnector. 展开更多
关键词 photon emitter waveguide realistic guarantees sized assembly dipole optically reality
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Frequency-tunable single-photon router based on a microresonator containing a driven three-level emitter
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作者 黄劲松 胡菁兰 +1 位作者 李艳玲 徐中辉 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第6期377-381,共5页
We propose a frequency-tunable router of single photons with high routing efficiency, which is constructed by two waveguides mediately linked by a single-mode whispering gallery resonator with a driven three-level emi... We propose a frequency-tunable router of single photons with high routing efficiency, which is constructed by two waveguides mediately linked by a single-mode whispering gallery resonator with a driven three-level emitter. Quantum routing probability in the output port is obtained via the real-space Hamiltonian. By adjusting the resonator–emitter coupling and the drive, the desired continuous central frequencies for the resonance peaks of routing photons can be manipulated nearly linearly, with the assistance of Rabi splitting effect and optical Stark shift. The proposed routing system may provide potential applications in designing other frequency-modulation quantum optical devices, such as multiplexers,filters, and so on. 展开更多
关键词 quantum routing scattering theory optical waveguide MICRORESONATOR
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Single-photon scattering and quantum entanglement of two giant atoms with azimuthal angle differences in a waveguide system
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作者 黄劲松 黄红武 +1 位作者 李艳玲 徐中辉 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第5期337-342,共6页
We theoretically investigate coherent scattering of single photons and quantum entanglement of two giant atoms with azimuthal angle differences in a waveguide system.Using the real-space Hamiltonian,analytical express... We theoretically investigate coherent scattering of single photons and quantum entanglement of two giant atoms with azimuthal angle differences in a waveguide system.Using the real-space Hamiltonian,analytical expressions are derived for the transport spectra scattered by these two giant atoms with four azimuthal angles.Fano-like resonance can be exhibited in the scattering spectra by adjusting the azimuthal angle difference.High concurrence of the entangled state for two atoms can be implemented in a wide angle-difference range,and the entanglement of the atomic states can be switched on/off by modulating the additional azimuthal angle differences from the giant atoms.This suggests a novel handle to effectively control the single-photon scattering and quantum entanglement. 展开更多
关键词 quantum transport quantum entanglement scattering theory optical waveguide
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Progress and realization platforms of dynamic topological photonics
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作者 闫秋辰 马睿 +1 位作者 胡小永 龚旗煌 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第1期75-87,共13页
Dynamic topological photonics is a novel research field, combining the time-domain optics and topological physics.In this review, the recent progress and realization platforms of dynamic topological photonics have bee... Dynamic topological photonics is a novel research field, combining the time-domain optics and topological physics.In this review, the recent progress and realization platforms of dynamic topological photonics have been well introduced.The definition, measurement methods and the evolution process of the dynamic topological photonics are demonstrated to better understand the physical diagram. This review is meant to bring the readers a different perspective on topological photonics, grasp the advanced progress of dynamic topology, and inspire ideas about future prospects. 展开更多
关键词 dynamic topological photonics optical waveguide array topological optical lattice ultrafast spectroscopy
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Tunable Multichannel Quantum Routing of Single Photons Based on Single-Mode Microresonators
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作者 Jinsong Huang Jinglan Hu Hongwu Huang 《Journal of Modern Physics》 2024年第4期480-490,共11页
We have suggested a novel multiport quantum router of single photons with reflection feedback, which is formed by three waveguides coupled with four single-mode microresonators. The single-photon routing probabilities... We have suggested a novel multiport quantum router of single photons with reflection feedback, which is formed by three waveguides coupled with four single-mode microresonators. The single-photon routing probabilities of four channels in the coupled system are studied theoretically by applying the real-space approach. Numerical results indicate that unidirectional routing in these output channels can be effectively implemented, and the router is tunable to route desired frequencies into the output ports, by varying the inter-resonator detunings via spinning resonator technology. Therefore, the proposed multichannel system can provide potential applications in optical quantum communication. 展开更多
关键词 Quantum Routing Scattering Theory Optical Waveguide MICRORESONATORS
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Application of Padé Approximation in Simulating Photonic Crystals 被引量:2
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作者 黄永箴 陈沁 +1 位作者 国伟华 于丽娟 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第7期1281-1286,共6页
To save finite-difference time-domain(FDTD) computing time, several methods are proposed to convert the time domain FDTD output into frequency domain. The Pad6 approximation with Baker's algorithm and the program a... To save finite-difference time-domain(FDTD) computing time, several methods are proposed to convert the time domain FDTD output into frequency domain. The Pad6 approximation with Baker's algorithm and the program are introduced to simulate photonic crystal structures. For a simple pole system with frequency 160THz and quality factor of 5000, the intensity spectrum obtained by the Padé approximation from a 2^8-item sequence output is more exact than that obtained by fast Fourier transformation from a 2^20-item sequence output. The mode frequencies and quality factors are calculated at different wave vectors for the photonic crystal slab from a much shorter FDTD output than that required by the FFT method, and then the band diagrams are obatined. In addition, mode frequencies and Q-factors are calculated for photonic crystal microcavity. 展开更多
关键词 optical waveguides photonic bandgap photonic crystal MICROCAVITY finite-difference time-domain
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Temperature sensor based on polymer thin film optical waveguide
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作者 王龙德 张彤 +2 位作者 张晓阳 李若舟 汪鲁宁 《Journal of Southeast University(English Edition)》 EI CAS 2013年第2期152-157,共6页
Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature ... Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature sensor are comprehensively analyzed. Combined with theoretical analysis and experimental investigation, the sensitivity of the temperature sensor is related to the thicknesses of the upper cladding layer, the waveguide layer, the optical loss of the polymer material and the guided wave modes. The results show that the slope value about reflectivity and temperature, which stands for the sensitivity of the polymer thin film temperature sensor, is associated with the waveguide film thickness and the guided wave modes, and the slope value is the highest in the zero reflectance of a certain transverse electric (TE) mode. To improve the sensitivity of the temperature sensor, the sensor's working incident light exterior angle α should be chosen under a certain TE mode with the reflectivity to be zero. This temperature sensor is characterized by high sensitivity and simple structure and it is easily fabricated. 展开更多
关键词 temperature sensor planar optical waveguide guided wave mode thermo-optic effect prism coupling
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Design,Fabrication,and Testing of Single-Side Alignment of 16×0.8nm Arrayed-Waveguide Grating
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作者 李健 安俊明 +2 位作者 王红杰 夏君磊 胡雄伟 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第2期254-257,共4页
A novel design of 100GHz-spaced 16channel arrayed-waveguide grating (AWG) based on silica-on-silicon chip is reported.AWG is achieved by adding a Y-branch to the AWG and arranging the input/output channel in a neat ro... A novel design of 100GHz-spaced 16channel arrayed-waveguide grating (AWG) based on silica-on-silicon chip is reported.AWG is achieved by adding a Y-branch to the AWG and arranging the input/output channel in a neat row,so the whole configuration can be aligned and packaged using only one fiber-array.This configuration can decrease the device’s size,enlarge the minimum radius of curvature,save time on polishing and alignment,and reduce the chip’s fabrication cost. 展开更多
关键词 optical planar waveguide phased arrays wavelength division multiplexing
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AN OPTICAL FIBER SENSOR TECHNIQUE BASED ON SLIGHT DISTURBANCE RADIATION LOSS OF STOCHASTIC WALL
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作者 赵志敏 张永梅 林有义 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 1997年第2期126-130,共5页
This paper presents an optical sensor technique used in the damage evaluation which is formed by structurally integrated fiber optic reticulate sensors embedded in the composite materials. The fibers are processed by ... This paper presents an optical sensor technique used in the damage evaluation which is formed by structurally integrated fiber optic reticulate sensors embedded in the composite materials. The fibers are processed by chemical method and their outsides are peeled to form particles of irregular distribution and they differ in size, so the slight disturbance range of stochastic wall are formed in fibers. According to the characteristics of power loss of waveguide mode caused by slight disturbance of stochastic wall and radiative mode transmission, the range of slight disturbance of stochastic wall may be served as the sensitive range of the sensor. On the basis of theory of slight disturbance of stochastic wall of planar optical waveguide, the relation between the corrosion time and the opposite power loss by experiments is investigated. In this paper, the measurement results of object of SIFORS are also presented. The results show that the optical sensor technique may be used in the damage evaluation of an aircraft. 展开更多
关键词 composite materials optical fibers optical fiber sensor planar optical waveguide stochastic wall slight disturbance damage evaluation
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