Organic-inorganic Hybrids Towards the Preparation of Nanoporous Composite Thin Films for Microelectronic Application

Silicon containing materials have traditionally been used in microelectronic fabrication. Semiconductor devices often have one or more arrays of patterned interconnect levels that serve to electrically couple the individual circuit elements forming an integrated circuit. These interconnect levels are typically separated by an insulating or dielectric film. Previously, a silicon oxide film was the most commonly used material for such dielectric films having dielectric constants( k ) near 4 0. However, as the feature size is continuously scaling down, the relatively high k of such silicon oxide films became inadequate to provide efficient electrical insulation. As such, there has been an increasing market demand for materials with even lower dielectric constant for Interlayer Dielectric(ILD) applications, yet retaining thermal and mechanical integrity. We wish to report here our investigations on the preparation of ultra low k ILD materials using a sacrificial approach whereby organic groups are burnt out to generate low k porous ORMOSIL films. We have been able to prepare a variety of organically modified silicone resins leading to highly microporous thin films, exhibiting ultra low k from 1 80 to 2 87, and good to high modulus, 1 5 to 5 5 GPa. Structure property influences on porosity, dielectric constant and modulus will be discussed.

Preparation and Optical Patterning of Organic-Inorganic Hybrid Color-Filter Films Using Latent Pigments by Utilizing Photo-Acid-Generator and Microwave Irradiation

Preparation and photo-patterning characteristics of organic-inorganic hybrid thin film containing latent pigment by using photo-acid-generator (PAG) and microwave irradiation have been investigated. The acrylic thin film modified with methoxysilane containing PAG was formed on a glass substrate and irradiated with ultraviolet rays to promote sol-gel reaction by catalytic action of acid which was generated from PAG. And then the film was hardened with microwave irradiation, yielding organic-inorganic hybrid polymer film having hardness, highly transparency and strong adhesion with a glass substrate. Since this reaction only occurred in the optically (UV) irradiated regions, by exploiting the difference between the adhesivenesses of these regions photo-irradiated through photomask with a glass substrate, it was possible to form a patterned film with pitch of 100 to 50 μm by a simple lift-off method. A pigment-containing film using latent pigments (with subtractive three primary colors of coloring materials) and a patterned film were prepared, and it was possible to make these films multi-colored by varying the mixing ratio of the pigments. This multi-colored film-preparation method is effective for simply and efficiently forming a color-filter film by applying optical and microwave irradiation.

Synthesis and characterization of hybrid organic-inorganic materials based on EA-MAn-APTES and silica

Poly (EA-MAn-APTES)/silica hybrid materials were successfully prepared fromEthyl acrylate (EA), maleic anhydride (MAn) and tetraethoxysilane (TEOS) in the presence of acoupling agent 3-aminopropyltriethoxysilane (APTES),by free-radical solution polymerization and insitu sol-gel process. The mass fraction of TEOS varied from 0 to 25%. The hybrid materials werecharacterized by the methods of FT-IR spectra, solvent extraction, scanning electron microscope (SEM), transmission electron microscope (TEM), differential scanning calorimetry (DSC) andthermogravimetric analysis (TGA) measuring apparatus to get their structures, gel contents,morphologies, particle sizes and thermal performances. The results show that the covalent bonds arebetween organic and inorganic phases, gel contents in the hybrid materials are much higher, theSiO_2 phase is well dispersed in the polymer matrix, silicon dioxide exist at nanoscale in thecomposites and have excellent thermal stability.

Effect of cerium ion(Ⅲ) on corrosion resistance of organic-inorganic hybrid coating on surface of aluminum-tube used in refrigeration equipment

Organic?inorganic hybrid coating on the surface of aluminum-tube used in refrigeration equipment using cerium ion (III) as the additive was fabricated by sol?gel method, and the structure of the coating was confirmed by FT-IR. The results of the characterization show that the corrosion resistance of the coating with 1.5 mmol/L cerium ion (III) gains significant improvement, in which the colour retention time of CuSO4 extends to 500 s, the anti-acid and alkali corrosion rates reduce by 67% and 70% compared with the blank one, respectively, and the salt spray tests also show good corrosion resistance. The electrochemical tests demonstrate that the self-corrosion current density and potential of the sample with hybrid coating are about 2.877×10?7 A/cm2 and?0.550 V, respectively. The metallographic and SEM images show that the hybrid coating is uniform and dense, and the EDS analysis confirms that the coating is mainly composed of Al, Si and Ce elements.

Synthesis and Characterization of Poly(St-co-BA) Latex with an Organic-Inorganic Hybrid Compound as Emulsifier

A poly (St-co-BA) latex was successfully synthesized by using an organic-inorganic hybrid compound (OIHC), an aliphatic carboxylate sodium/nano-silica composite, as the emulsifier, and investigated by particle size analyzer, transmission electron microscope (TEM), optical contact angle measurement (OCA) and dynamic mechanical analyzer (DMA). It was found that the protective agent, sodium polyacrylate (PA),could obviously improve the polymerization stability and the functional monomer, glycidyl methacrylate (GMA), could enhance the store stability of the latex. The particle size of poly(St-co-BA) latex decreased and then leveled off as OIHC content increased. TEM shows that the prepared polymers were actually organic-inorganic nanocomposites, and these films have better waterproof property than those prepared by traditional poly(St-co-BA) latex or organic silicone modified poly(St-co-BA) latex. The nanocomposite polymer has much higher glass transition temperature than organic silicone modified poly(St-co-BA) polymer containing the same organic silicone content.

Syntheses and Characterizations of Two New Organic-inorganic Hybrids Based on Heteropolymolybdates and Piperidine Molecules

Two new organic-inorganic compounds [（CH2）5NH2]3[PMo12O40]·3[（CH2）NH] 1 and [（CH2）5NH2]6[P2Mo18O62]·5H2O 2 have been synthesized using conventional and hydrothermal methods, respectively, and characterized by elemental analyses, IR, TG and single-crystal X-ray diffraction. X-ray analyses show that in these compounds heteropolymolybdates [PMo12O40]^3- and [P2Mo18O62]^6- are reserved their Keggin or Dawson structures and linked to piperidine through electrostatic and hydrogen-bonding interactions.

Fabrication of UV-Curing Linalool-Polysiloxane Hybrid Films with High Refractive Index and Transparency

In this article,a series of high refractive indices(1.50-1.53)thiol phenyl polysiloxane(TPS)were synthesized via hydrolytic sol-gel reaction.The Fourier transform infrared spectra(FT-IR)and nuclear magnetic resonance spectra(NMR)results showed that TPS conformed to the predicted structures.Natural terpene linalool was exploited as photocrosslinker to fabricate UV-curing linalool-polysiloxane hybrid films(LPH)with TPS via photoinitiated thiol-ene reaction.LPH rapidly cured under UV irradiation at the intensity of 80 mW/cm^(2) in 30 s,exhibiting good UV-curing properties.The optical transmittance of LPH in the wavelength of 300-800 nm was over 90%,exhibiting good optical transparency.The water contact angle and water vapor permeability results showed that the introduction of phenyl groups enhance the hydrophobicity and water vapor barrier properties of LPH.The results indicated the potential of LPHs in the applications of optical functional coatings.

Preparation of polythiophene/WO_3 organic-inorganic hybrids and their gas sensing properties for NO_2 detection at low temperature

Polythiophene/WO3（PTP/WO3）organic-inorganic hybrids were synthesized by an in situ chemical oxidative polymerization method,and char- acterized by X-ray diffraction（XRD）,transmission electron microscopy（TEM）and thermo-gravimetric analysis（TGA）.The Polythiophene/ WO3 hybrids have higher thermal stability than pure polythiophene,which is beneficial to potential application as chemical sensors.Gas sensing measurements demonstrate that the gas sensor based on the Polythiophene/WO3 hybrids has high response and good selectivity for de- tecting NO2 of ppm level at low temperature.Both the operating temperature and PTP contents have an influence on the response of PTP/WO3 hybrids to NO2.The 10 wt%PTP/WO3 hybrid showed the highest response at low operating temperature of 70-C.It is expected that the PTP/WO3 hybrids can be potentially used as gas sensor material for detecting the low concentration of NO2 at low temperature.

Synthesis and characterization of luminescent organic-inorganic hybrid nanocomposite from polyhedral oligomeric silsesquioxane

A novel polyhedral oligomeric silsesquioxane(POSS)-based organic-inorganic hybrid nanocomposite(EF-POSS) was prepared by Pt-catalyzed hydrosilylation reaction of octahydridosilsesquioxane(T_8H_8,POSS) with a luminescent substituted acetylene(2- ethynyl-7-(4-(4-methylstyryl)styryl)-9,9-dioctyl-9H-fluorene(EF)) in high yield.The hybrid nanocomposite was soluble in common solvents such as CH_2Cl_2,CHCl_3,THF and 1,4-dioxane.Its structure and property were characterized by FTIR, NMR,TGA,UV and PL,respectively.The results show that the hybrid nanocomposite with high thermal stability emits stable blue light as a result of photo excitation and possesses high photoluminescence quantum efficiency(φ_(FL)).

An Organic-inorganic Hybrid Assembly Based on Novel Arsenatomolybdate and Cu~Ⅰ-Organic Units

A novel organic-inorganic hybrid arsenatomolybdate based on infrequent[AsMoO(OH)]unit,[Cu ~I(phen)][AsMoO(OH)]·3HO(1,phen=1,10-phenanthroline),has been hydrothermally synthe-sized.This structure was determined by single-crystal X-ray diffraction analysis,and further characterized by elemental analysis,and IR and UV spectra.To the best of our knowledge,it is the first report of a novel arsenatomolybdate subunit[AsMoO(OH)].Photoluminescence of 1 is ascribed to???*emission of the aromatic rings derived from the phen ligand.

Giant magneto field effect in up-conversion amplified spontaneous emission via spatially extended states in organic-inorganic hybrid perovskites

Up-conversion lasing actions are normally difficult to realize in light-emitting materials due to small multi-photon absorp-tion cross section and fast dephasing of excited states during multi-photon excitation.This paper reports an easily ac-cessible up-conversion amplified spontaneous emission(ASE)in organic-inorganic hybrid perovskites(MAPbBr3)films by optically exciting broad gap states with sub-bandgap laser excitation.The broad absorption was optimized by adjust-ing the grain sizes in the MAPbBr3 films.At low sub-bandgap pumping intensities,directly exciting the gap states leads to 2-photon,3-photon,and 4-photon up-conversion spontaneous emission,revealing a large optical cross section of multi-photon excitation occurring in such hybrid perovskite films.At moderate pumping intensity(1.19 mJ/cm2)of 700 nm laser excitation,a significant spectral narrowing phenomenon was observed with the full width at half maximum(FWHM)de-creasing from 18 nm to 4 nm at the peak wavelength of 550 nm,simultaneously with a nonlinear increase on spectral peak intensity,showing an up-conversion ASE realized at low threshold pumping fluence.More interestingly,the up-con-version ASE demonstrated a giant magnetic field effect,leading to a magneto-ASE reaching 120%.In contrast,the up-conversion photoluminescence(PL)showed a negligible magnetic field effect(<1%).This observation provides an evid-ence to indicate that the light-emitting states responsible for up-conversion ASE are essentially formed as spatially exten-ded states.The angular dependent spectrum results further verify the existence of spatially extended states which are polarized to develop coherent in-phase interaction.Clearly,using broad gap states with spatially extended light-emitting states presents a new approach to develop up-conversion ASE in organic-inorganic hybrid perovskites.

Preparation and properties of organic-inorganic modified SiO_2 thin films

Polydimethylsiloxane （PDMS）, tetraethoxysilane （TEOS）, ethyl alcohol （EtOH） and deionized water were main raw materials to prepare silicone-modified hybrid thin films using sol-gel method. The effect of the contents of H2O and PDMS on thin films was studied. When the volume ratio of H20 to TEOS is 0.5, the optimum quality of thin films is obtained. And the gelation time is affected slightly by H20 content. Uniform thin films are obtained when the volume ratio of PDMS to TEOS is 0.2. Yet, the sol would be inactive in 6 d. Various properties of thin films were studied, including hardness, adhesive quality, hydrophobic property, corrosion protection property, and abrasion resistance. Test results show that the pencil hardness is generally 3-6 H, and adhesive quality achieves the highest standard of 0. When the sintering temperature is below 400℃, the contact angle is about 95° and hydrophobic films are obtained. The abrasion resistance of thin films is better than that of aluminum alloy when the sintering temperature is higher than 300℃. And the excellent corrosion protective effect is obtained by single-layer coating when the sintering temperature is higher than 400℃.

Colorless to black switching with high contrast ratio via the electrochemical process of a hybrid organic-inorganic perovskite

Colorless‐to‐black switching has attracted widespread attention for smart windows and multifunctional displays because they are more useful to control solar energy.However,it still remains a challenge owing to the tremendous difficulties in the design of completely reverse absorptions in transmissive and colored states.Herein,we report on an electrochemical device that can switch between colorless and black by using the electrochemical process of hybrid organic–inorganic perovskite MAPbBr_(3),which shows a high integrated contrast ratio of up to 73%from 400 to 800 nm.The perovskite solution can be used as the active layer to assemble the device,showing superior transmittance over the entire visible region in neutral states.By applying an appropriate voltage,the device undergoes reversible switching between colorless and black,which is attributed to the formation of lead and Br_(2)in the redox reaction induced by the electron transfer process in MAPbBr_(3).In addition,the contrast ratio can be modulated over the entire visible region by changing the concentration and the applied voltage.These results contribute toward gaining an insightful understanding of the electrochemical process of perovskites and greatly promoting the development of switchable devices.

Recent advances in atomic imaging of organic-inorganic hybrid perovskites

Three-dimensional organic-inorganic hybrid perovskites(OHPs)hold a great prospect for photovoltaic applications due to their outstanding electronic and optical properties.These fascinating properties of OHPs in combination with their scalable and low-cost production make OHPs promising candidates for next-generation optoelectronic devices.The ability to obtain atomistic insights into physicochemical properties of this class of materials is crucial for the future development of this field.Recent advances in various scanning probe microscopy techniques have demonstrated their extraordinary capability in real-space imaging and spectroscopic measurements of the structural and electronic properties of OHPs with atomic-precision.Moreover,these techniques can be combined with light illumination to probe the structural and optoelectronic properties of OHPs close to the real device operation conditions.The primary focus of this review is to summarize the recent progress in atomic-scale studies of OHPs towards a deep understanding of the phenomena discovered in OHPs and OHP-based optoelectronic devices.

Recent Advances in Organic-inorganic Hybrid Photoresists

Photoresists are radiation-sensitive materials used for forming patterns to build up IC devices.To date,most photoresists have been based on organic polymers,which have been dominating the semiconductor industries over the past few decades.It is obvious that extreme ultraviolet(EUV)lithography has become the next-generation lithography technology.The development of comprehensive performance EUV resist is one of the most critical issues.However,organic polymeric photoresists are difficult to meet the harsh requirements of EUV lithography.Pure inorganic photoresists such as metal salts,hydrogen silsesquioxane(HSQ)are expected for EUV lithography due to their high resistance and high resolution.But the low sensitivity makes them not suitable for high volume manufacturing(HVM).Organic-inorganic hybrid photoresists,containing both organic and inorganic components,are regarded as one of the most promising EUV resists.They combine both merits of organic and inorganic materials and have significant advantages in machinability,etching resistance,EUV absorption,and chemical/thermal stability.Organic-inorganic hybrid photoresists are considered as ideal materials for realizing industrialgrade patterns below 10 nm.This review mainly focuses on the development of organic-inorganic hybrid photoresists over the past decade.

Preparation and properties of a POSS-containing organic-inorganic hybrid crosslinked polymer

A novel POSS-containing organic-inorganic hybrid crosslinked polymer was prepared by hydrosilylation reaction of octahydridosilsesquioxane （TsHs） with 4,4＇-bis（4-altyloxybenzoyloxy）phenyl （diene A）. Its structure and property was characterized by FFIR, 29Si NMR, TGA and ellipsometer, respectively. The results show that the hybrid polymer possesses high thermal stability and low dielectric constant of 1.97 at optical frequencies.

Organic-inorganic Hybrid Materials Based on Piperidine Derivatives and Semi-conductive Metal Iodine

Reactions of piperidine derivatives 4-(aminomethyl)piperidine(4-AMPD) and 1-methylpiperidin-4-amine(1-MPDA) with semi-conductive metal iodine SbI3 and PbI2 in concentrated HI aqueous solution afforded two one-dimensional(1 D) chain compounds [(4-AMPD)SbI5]n(1), [(1-MPDA)SbI5]n(2) and a two-dimensional(2 D) single layered organicinorganic hybrid material [(1-MPDA)PbI4]n(3), which were confirmed by X-ray single-crystal diffraction, infrared(IR) spectroscopy and powder X-ray diffraction(PXRD). Simultaneously, compounds 1~3 exhibit strong emission peaks at 600 nm for 1 and 2 and 570 nm for 3, which were originated from their inorganic moieties.

A Three-dimensional Organic-inorganic Hybrid Material Supported by Decavanadate Clusters and Na-O Chains: Synthesis and Crystal Structure of [Na_6(H_2O)_(16)(dod)_4V_(10)O_(28)]

A new organic-inorganic hybrid material [Na6(H2O)16(dod)2V10O28] (dod = 1,4- diazoniabicyclo[2,2,2]octane-1,4-diacetate) has been synthesized and X-ray single-crystal structural analysis reveals it crystallizes in triclinic, space group P with a = 11.533(7), b = 12.031(7), c = 12.187(4) ? a = 72.47(1), b = 73.16(1), g = 68.21(1)o, C20H64N4Na6O52V10, V = 1467(1) ?, Z = 1, Mr = 1840.1, Dc = 2.083 g/cm3, MoKa, l = 0.71073 ? m = 1.686, F(000) = 924, S = 1.027, the final R = 0.0538 and wR = 0.1272 for 4398 observed reflections. The compound has a three-dimensional frame- work constructed from decavanadate clusters, NaO chains and dod ligands. A variety of OH…O and CH…O hydrogen bonds play an important role in stabilizing the framework.

Synthesis and Characterization of Layered Perovskite-type Organic-inorganic Hybrids(CnH2n+1NH3)2(CH3NH3)m-1PbmI3m+1(n=5-10,m=1,2)

Layered organic-inorganic hybrids（CnH2n＋1NH3）2（CH3NH3）m-1PbmI3m＋1 containing monolayer（m=1） and bilayer（m=2） perovsikte were synthesized by reactions in solution.The influences of the reactant ratio,solvent,reaction temperature,and reaction time on the structures of the products were investigated.The structures and the properties of the hybrids were characterized using X-ray diffraction（XRD）,scanning electron microscopy（SEM）,and ultraviolet and visible（UV） absorption spectroscopy.The XRD patterns and the SEM images demonstrate that the pure bilayer perovskite hybrids are obtained.The UV-vis spectra indicate that the number of the inorganic perovskite layer（m） has greater impact on the band gap than the number of the carbon atoms（n）.The band gap of bilayer hybrids（around 1.9 eV） is significantly less than that of monolayer hybrids（around 2.2 eV）.

Syntheses, Structures and Fluorescent Properties of Two 1D Chain Organic Amines and Metal Iodine Organic-inorganic Hybrid Compounds

Two bifunctional amines, 4-(2-aminoethyl)morpholine and histamine, were heated with PbI_2 and BiI_3 in concentrated HI aqueous solution to give one-dimensional(1D) organicinorganic hybrid compounds [(C_6H_(16)N_2O)PbI4]n(1) and [(C_(16)H_(20)N_(20))Bi_2I_(10)](2), respectively. In 1, the [PbI6] octahedra formed double chain anions through sharing-corner and-edge, and the protonated(C_6H_(16)N_2O)^(2+) cations were located at the vicinity of the double chains by hydrogen bonds. In 2, the [BiI_6] octahedra firstly formed dimeric [Bi_2I_(10)]^(4-) anion through sharing edge, and subsequently, the protonated histamine cations worked as bridge to link alternately with [Bi_2I_(10)]^(4-) anion by hydrogen bonds to form organic-inorganic hybrid 1D chains. In addition, compound 1 emitted a green light at the excitation wavelength of 400 nm and the maximum emission wavelength is at 503 nm.