热阴极辉光PACVD金刚石厚膜的生长特性

对用热阴极辉光ＰＡＣＶＤ方法合成的金刚石厚膜，采用扫描电子显微镜进行了观察，研究了金刚石的生长机制．

爱恩邦德——全球领先的PVD、CVD和PACVD技术

总部和设备制造部设在瑞士的爱恩邦德公司是耐磨损和低摩擦涂层行业的领军者。业务范围包括PVD、CVD、CVA、PACVD设备制造和涂层服务，可在薄膜涂层技术领域提供更多的技术解决方案。爱恩邦德公司在全球拥有40多家涂层中心和本地设备销售和服务商．在中国有3个涂层中心和一个设备销售服务商。

类金刚石薄膜内应力的测试

采用射频-直流等离子增强化学气相沉积法制备出类金刚石薄膜,用弯曲法测定薄膜的内应力。结果表明,类金刚石薄膜中存在1～4.7GPa的压应力,沉积工艺对薄膜的内应力有很大的影响,薄膜的内应力随极板负偏压的升高而降低,陆C_2H_2气体含量的增加而增大。

B(C_2H_5)_3等离子辅助渗硼的研究

对新型渗硼剂Ｂ（Ｃ２Ｈ５）３的渗硼工艺进行了研究。结果表明：在正常渗硼工艺条件下，基体表面没有形成连续致密的渗硼层，而是形成了一层数μｍ厚的硼碳层；在间歇渗硼工艺条件下，基体表面形成了一层致密的渗硼层，这是因为通过溅射消除了在渗硼过程中沉积在基体表面的硼碳层。

B(CH_3O)_3等离子辅助渗硼的研究

研究了新型渗硼剂Ｂ（ＣＨ３Ｏ）３的分解离化行为及渗硼工艺。结果表明：在室温条件下Ｂ（ＣＨ３Ｏ）３主要分解离化为Ｂ（ＣＨ３Ｏ）Ｈ＋、Ｂ（ＣＨ３Ｏ）ＯＨ＋和Ｂ（ＣＨ３Ｏ）２＋；

塑料啤酒瓶的制造方案

介绍了国内外制造塑料啤酒瓶的材料及其加工工艺的现状和发展前景 ,提出了用PACVD(等离子辅助化学气相沉积 )技术与纳米聚合物提高啤酒瓶阻隔性的新成果 。

A perspective of microplasma oxidation (MPO) and vapor deposition coatings in surface engineering of aluminum alloys

Over the past years, great achievements have been made in the development of coating technologies for surface improvement of aluminum alloys. Despite these achievements, the role in the market strongly depends on the ability of surface coating technology under technical and economic considerations to meet the increased demands for heavy tribological applications of aluminum alloys. Microplasma oxidation (MPO) technology has recently been studied as a novel and effective means to provide thick and hard ceramic coating with improved properties such as excellent load-bearing and wear resistance properties on aluminum alloys. The present work covers the evaluation of the performances of current single and duplex coatings combining MPO, physical vapor deposition (PVD), and plasma assisted chemical vapor deposition (PACVD) coatings on aluminum alloys. It suggests that the MPO coating is a promising candidate for design engineers to apply aluminum alloys to heavy load-bearing applications. The prospective future for the research on MPO coatings is introduced as well.

氨气对热阴极CVD法制备纳米金刚石膜的影响

采用直流热阴级化学气相沉积(DC-PACVD)方法,以NH3+CH4+H2混合气体作为气源,通过改变氨气浓度,在单晶硅(111)基片上沉积纳米金刚石膜.采用扫描电子显微镜、原子力显微镜和拉曼光谱仪分析了不同氨气浓度下制备的纳米金刚石膜。结果表明:在基体温度为700℃条件下,随着氨气浓度的增大,纳米金刚石膜中的金刚石相含量增加,非金刚石相含量相对减少;晶粒的平均粒度减小。在一定范围内氨气浓度增加,有助于提高纳米金刚石膜质量;在氨气流量达到8 mL/min时,获得了质量最好的纳米金刚石膜,其平均晶粒尺寸约为64 nm、均方根粗糙度约为27.4 nm。并提出了掺氮纳米金刚石薄膜的生长模型,对相应现象给出了解释。