Electric Potential in Surface Produced Negative Ion Source with Magnetic Field Increasing Toward a Wall

Electric potential near a wall for plasma with the surface produced negative ions with magnetic field increasing toward a wall is investigated analytically. The potential profile is derived analytically by using a plasma-sheath equation, where negative ions produced on the plasma grid （PG） surface are considered in addition to positive ions and electrons. The potential profile depends on the amount and the temperature of the surface produced negative ions and the profile of the magnetic field. The negative potential peak is formed in the sheath region near the PG surface for the case of strong surface production of negative ions or low temperature negative ions. As the increase rate of the magnetic field near the wall becomes large, the negative potential peak becomes small.

引出负离子的永磁边引出PIG源

介绍了一个可相出Ｈ、Ｏ、Ｆ等负离子的永磁边引出ＰＩＧ源．在１５ｋＶ的引出电压下，可获得Ｏ－离子１３０μＡ．Ｆ－离子７５μＡ，功率消耗分别约为１１０、２８０Ｗ．

永磁端引出溅射PIG源进展

介绍了永磁端引出溅射ＰＩＧ离子源的进展状况，通常它可用于引出气体的与金属的单或多电荷离子，在２０－３０ｋＶ的引出电压下，可引出ｍＡ级的气体离子和数十微安的金属离子，功耗小于５０Ｗ。同时也可用于直接引出某些电子亲合势较强的气体元素，如Ｈ、Ｏ、Ｆ等的负离子。当采用ＬａＢ６阴极，在１５－２０ｋＶ的引出电压下，引出的总束流中，Ｈ－离子＞５０μＡ，０－离子接近１．４ｍＡ和Ｆ－离子可达１．８ｍＡ，功耗分别为４０、５０和７５Ｗ左右。