This paper reports that dense and crack-free （100） oriented lead zirconate titanate （Pb（ Zr0. 52Ti0. 48 ）O3, PZT） thick film embedded with PZT nanopartieles has been successfully fabricated on Pt/Cr/SiO2/Si subs...This paper reports that dense and crack-free （100） oriented lead zirconate titanate （Pb（ Zr0. 52Ti0. 48 ）O3, PZT） thick film embedded with PZT nanopartieles has been successfully fabricated on Pt/Cr/SiO2/Si substrate by using PT transition layer and PVP additive. The thick film possesses single-phase perovskite structure and perfectly （100） oriented. The （100） orientation degree of the PZT films strongly depended on annealing time and for the 4μm-thick PZT film which was annealed at 700℃ for 5 min is the largest. The （100） orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing. The 3μm-thick PZT thick film which was annealed at 700℃ for 5 rain has the strongest （100） orientation degree, which is 82. 3%.展开更多
As rapid development in wearable/implantable electronic devices benefit human life in daily health monitoring and disease treatment medically, all kinds of flexible and/or stretchable electronic devices are booming, t...As rapid development in wearable/implantable electronic devices benefit human life in daily health monitoring and disease treatment medically, all kinds of flexible and/or stretchable electronic devices are booming, together with which is the demanding of energy supply with similar mechanical property. Due to its ability in converting mechanical energy lying in human body into electric energy, energy harvesters based on piezoelectric materials are promising for applications in wearable/implantable device's energy supply in a renewable, clean and life-long way. Here the mechanics of traditional piezoelectrics in energy harvesting is reviewed, including why piezoelectricity is the choice for minor energy harvesting to power the implantable/wearable electronics and how. Different kinds of up to date flexible piezoelectric devices for energy harvesting are introduced, such as nanogenerators based on Zn O and thin and conformal energy harvester based on PZT. A detailed theoretical model of the flexible thin film energy harvester based on PZT nanoribbons is summarized, together with the in vivo demonstration of energy harvesting by integrating it with swine heart. Then the initial researches on stretchable energy harvesters based on piezoelectric material in wavy or serpentine configuration are introduced as well.展开更多
基金Sponsored by 863 Scientific Project of China (Grant No.2007AA03Z103)the National Natural Science Foundation of China (Grant No.50742007)the Key Laboratory Foundation of Sonar Technology of China(Grant No. 9140C24KF0901)
文摘This paper reports that dense and crack-free （100） oriented lead zirconate titanate （Pb（ Zr0. 52Ti0. 48 ）O3, PZT） thick film embedded with PZT nanopartieles has been successfully fabricated on Pt/Cr/SiO2/Si substrate by using PT transition layer and PVP additive. The thick film possesses single-phase perovskite structure and perfectly （100） oriented. The （100） orientation degree of the PZT films strongly depended on annealing time and for the 4μm-thick PZT film which was annealed at 700℃ for 5 min is the largest. The （100） orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing. The 3μm-thick PZT thick film which was annealed at 700℃ for 5 rain has the strongest （100） orientation degree, which is 82. 3%.
基金supported by the National Basic Research Program of China(Grant No.2015CB351900)National Natural Science Foundation of China(Grant Nos.11222220,11320101001,11090331 and 11227801)Tsinghua University Initiative Scientific Research Program
文摘As rapid development in wearable/implantable electronic devices benefit human life in daily health monitoring and disease treatment medically, all kinds of flexible and/or stretchable electronic devices are booming, together with which is the demanding of energy supply with similar mechanical property. Due to its ability in converting mechanical energy lying in human body into electric energy, energy harvesters based on piezoelectric materials are promising for applications in wearable/implantable device's energy supply in a renewable, clean and life-long way. Here the mechanics of traditional piezoelectrics in energy harvesting is reviewed, including why piezoelectricity is the choice for minor energy harvesting to power the implantable/wearable electronics and how. Different kinds of up to date flexible piezoelectric devices for energy harvesting are introduced, such as nanogenerators based on Zn O and thin and conformal energy harvester based on PZT. A detailed theoretical model of the flexible thin film energy harvester based on PZT nanoribbons is summarized, together with the in vivo demonstration of energy harvesting by integrating it with swine heart. Then the initial researches on stretchable energy harvesters based on piezoelectric material in wavy or serpentine configuration are introduced as well.
