This paper reports that dense and crack-free （100） oriented lead zirconate titanate （Pb（ Zr0. 52Ti0. 48 ）O3, PZT） thick film embedded with PZT nanopartieles has been successfully fabricated on Pt/Cr/SiO2/Si subs...This paper reports that dense and crack-free （100） oriented lead zirconate titanate （Pb（ Zr0. 52Ti0. 48 ）O3, PZT） thick film embedded with PZT nanopartieles has been successfully fabricated on Pt/Cr/SiO2/Si substrate by using PT transition layer and PVP additive. The thick film possesses single-phase perovskite structure and perfectly （100） oriented. The （100） orientation degree of the PZT films strongly depended on annealing time and for the 4μm-thick PZT film which was annealed at 700℃ for 5 min is the largest. The （100） orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing. The 3μm-thick PZT thick film which was annealed at 700℃ for 5 rain has the strongest （100） orientation degree, which is 82. 3%.展开更多
基金Sponsored by 863 Scientific Project of China (Grant No.2007AA03Z103)the National Natural Science Foundation of China (Grant No.50742007)the Key Laboratory Foundation of Sonar Technology of China(Grant No. 9140C24KF0901)
文摘This paper reports that dense and crack-free （100） oriented lead zirconate titanate （Pb（ Zr0. 52Ti0. 48 ）O3, PZT） thick film embedded with PZT nanopartieles has been successfully fabricated on Pt/Cr/SiO2/Si substrate by using PT transition layer and PVP additive. The thick film possesses single-phase perovskite structure and perfectly （100） oriented. The （100） orientation degree of the PZT films strongly depended on annealing time and for the 4μm-thick PZT film which was annealed at 700℃ for 5 min is the largest. The （100） orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing. The 3μm-thick PZT thick film which was annealed at 700℃ for 5 rain has the strongest （100） orientation degree, which is 82. 3%.
