Effect of parallel resonance on the electron energy distribution function in a 60 MHz capacitively coupled plasma

In general,as the radio frequency(RF)power increases in a capacitively coupled plasma(CCP),the power transfer efficiency decreases because the resistance of the CCP decreases.In this work,a parallel resonance circuit is applied to improve the power transfer efficiency at high RF power,and the effect of the parallel resonance on the electron energy distribution function(EEDF)is investigated in a 60 MHz CCP.The CCP consists of a power feed line,the electrodes,and plasma.The reactance of the CCP is positive at 60 MHz and acts like an inductive load.A vacuum variable capacitor(VVC)is connected in parallel with the inductive load,and then the parallel resonance between the VVC and the inductive load can be achieved.As the capacitance of the VVC approaches the parallel resonance condition,the equivalent resistance of the parallel circuit is considerably larger than that without the VVC,and the current flowing through the matching network is greatly reduced.Therefore,the power transfer efficiency of the discharge is improved from 76%,70%,and 68%to 81%,77%,and 76%at RF powers of 100 W,150 W,and 200 W,respectively.At parallel resonance conditions,the electron heating in bulk plasma is enhanced,which cannot be achieved without the VVC even at the higher RF powers.This enhancement of electron heating results in the evolution of the shape of the EEDF from a biMaxwellian distribution to a distribution with the smaller temperature difference between high-energy electrons and low-energy electrons.Due to the parallel resonance effect,the electron density increases by approximately 4%,18%,and 21%at RF powers of 100 W,150 W,and 200 W,respectively.

Linearized Proximal Alternating Direction Method of Multipliers for Parallel Magnetic Resonance Imaging

In this study, we propose a linearized proximal alternating direction method with variable stepsize for solving total variation image reconstruction problems. Our method uses a linearized technique and the proximal function such that the closed form solutions of the subproblem can be easily derived.In the subproblem, we apply a variable stepsize, that is like Barzilai-Borwein stepsize, to accelerate the algorithm. Numerical results with parallel magnetic resonance imaging demonstrate the efficiency of the proposed algorithm.

Application of Parallel Resonant Circuit in Modulator Charging Power Supply

A novel high voltage switching circuit with parallel resonant topology is analyzed.Without adding other resonant components,this circuit makes full use of the transformer leakage inductance and winding capacitance so as to reduce the influence of the transformer parasitic parameter.Using device CD4046 to realize the switching control of MOS,this circuit can realize the constant-current charging to capacitor by operating the above resonance.The operating process of the circuit is analyzed,and the power calculation and some practical waveforms are given.

Constant frequency operation of parallel resonant converter for constant-current constant-voltage battery charger applications

This paper proposes a design and control approach to parallel resonant converter(PRC) based battery chargers.The proposed approach is particularly suitable for the constant-current constant-voltage(CC-CV)charging method, which is the most commonly utilized one.Since the PRC is operated at two different frequencies for each CC and CV charging modes, this approach eliminates the need for complicated control techniques such as the frequency-control and phase-shift-control.The proposed method not only simplifies the design and implementation processes of the converter unit but also simplifies the design of output filter configuration and decreases the number of the required components for the control of the charger.The proposed method is confirmed by two experimental setups.The results show that the designed charger circuit ensured a very stable constant current in CC charging phase, where the charging current is fixed to 1.75 A.Although a voltage increase in CV phase is observed, the charger circuit is able to decrease the charging current to 0.5 A in CV phase, as depicted in battery data-sheet.The efficiency of the charger is figured out to be in the range of 86%-93% in the first setup, while it is found to be in the range of 78%-88% in the second setup,where a high frequency transformer is employed.