The electric energy injection from a pulsed power supply to a planar type of dielectric barrier discharge(DBD) reactor at atmospheric pressure was studied. Relations of the energy injection with barrier materials, b...The electric energy injection from a pulsed power supply to a planar type of dielectric barrier discharge(DBD) reactor at atmospheric pressure was studied. Relations of the energy injection with barrier materials, barrier thickness, peak voltage, gap distance, electrode area,and operation temperature were experimentally investigated. The energy injection is a function of relative permittivity, barrier thickness, peak voltage, gap distance, and electrode area. The influence of operation temperature on energy injection is slight in the range of 27-300℃ but becomes obvious in the range of 300-500℃. A model was established using which the energy injection can be easily predicted.展开更多
The (DC-GDPAU) is a DC glow discharge plasma experiment that was designed, established, and operated in the Physics Department at Ain Shams University (Egypt). The aim of this experiment is to study and improve some p...The (DC-GDPAU) is a DC glow discharge plasma experiment that was designed, established, and operated in the Physics Department at Ain Shams University (Egypt). The aim of this experiment is to study and improve some properties of a printed circuit board (PCB) by exposing it to the plasma. The device consists of cylindrical discharge chamber with movable parallel circular copper electrodes (cathode and anode) fixed inside it. The distance between them is 12 cm. This plasma experiment works in a low-pressure range (0.15 - 0.70 Torr) for Ar gas with a maximum DC power supply of 200 W. The Paschen curves and electrical plasma parameters (current, volt, power, resistance) characterized to the plasma have been measured and calculated at each cm between the two electrodes. Besides, the electron temperature and ion density are obtained at different radial distances using a double Langmuir probe. The electron temperature (<em>KT<sub>e</sub></em>) was kept stable in range 6.58 to 10.44 eV;whereas the ion density (<em>ni</em>) was in range from 0.91 × 10<sup>10</sup> cm<sup><span style="white-space:nowrap;">−</span>3</sup> to 1.79 × 10<sup>10</sup> cm<sup><span style="white-space:nowrap;">−</span>3</sup>. A digital optical microscope (800×) was employed to draw a comparison between the pre-and after effect of exposure to plasma on the shaping of the circuit layout. The experimental results show that the electrical conductivity increased after plasma exposure, also an improvement in the adhesion force in the Cu foil surface. A significant increase in the conductivity can be directly related to the position of the sample surfaces as well as to the time of exposure. This shows the importance of the obtained results in developing the PCBs manufacturing that uses in different microelectronics devices like those onboard of space vehicles.展开更多
Low-temperature plasmas(LTPs) driven by 1-100 MHz radio-frequency(MRF) are essential for many industrial applications,and their breakdown characteristics are different to that of direct current(DC) breakdown.This revi...Low-temperature plasmas(LTPs) driven by 1-100 MHz radio-frequency(MRF) are essential for many industrial applications,and their breakdown characteristics are different to that of direct current(DC) breakdown.This review seeks to understand the state of the art of electric breakdown in the MRF field and provide references for related basic and applied research.We have given a brief history of research into MRF-driven breakdown,including Paschen curves,the corresponding discharge modes and parameter spaces,and the evolution of the parameters during the breakdown process.It is shown that the focus has been transferred from the breakdown voltage and V-I characteristics to the evolution of plasma parameters during the breakdown,both in experiments and simulations.It is shown that many fundamental and applied problems still need to be investigated,especially with the new global model and the incorporation of the external circuit model.展开更多
A DC pseudo discharge for air has been studied. Air pressure is used in the range between 0.7 Torr and 12 Torr. The breakdown occurs between a plane cathode and a mesh anode at transparencies of 19%, 46%, and 65%. The...A DC pseudo discharge for air has been studied. Air pressure is used in the range between 0.7 Torr and 12 Torr. The breakdown occurs between a plane cathode and a mesh anode at transparencies of 19%, 46%, and 65%. The current-voltage characteristic curves of the discharge, which are measured at different pressures, distances, and mesh transparences, take effect in the region of abnormal glow. The discharge voltage decreases as the air pressure increases, while more voltage is needed to maintain the discharge when either the mesh transparency or the inter- electrode distance is increased. An increment of mesh transparency causes high negative potential behind the mesh due to the high concentration of electrons, which accumulate and collide with neutral atoms. Paschen curves deviate from the expected regular one. The left side of Paschen curves appears at inter-electrode distance of 1 mm, whereas the right side appears at inter-electrode distance of 5 mm. The intermediate region is observed only at 3 mm distance between the two electrodes. For the transparency range used in this work, it is found that the decrement of the breakdown voltage, on the right side, depends on the mesh transparency. For different electrode separations, the measured Paschen curves are coincident and deviate from the standard ones of Paschen's law.展开更多
基金supported by National Natural Science Foundation of China(No.11575159)National Natural Science Foundation of China(No.51206146)+1 种基金Zhejiang Provincial Natural Science Foundation of China(No.LY13B070004)Program for Zhejiang Leading Team of S&T Innovation(No.2013TD07)
文摘The electric energy injection from a pulsed power supply to a planar type of dielectric barrier discharge(DBD) reactor at atmospheric pressure was studied. Relations of the energy injection with barrier materials, barrier thickness, peak voltage, gap distance, electrode area,and operation temperature were experimentally investigated. The energy injection is a function of relative permittivity, barrier thickness, peak voltage, gap distance, and electrode area. The influence of operation temperature on energy injection is slight in the range of 27-300℃ but becomes obvious in the range of 300-500℃. A model was established using which the energy injection can be easily predicted.
文摘The (DC-GDPAU) is a DC glow discharge plasma experiment that was designed, established, and operated in the Physics Department at Ain Shams University (Egypt). The aim of this experiment is to study and improve some properties of a printed circuit board (PCB) by exposing it to the plasma. The device consists of cylindrical discharge chamber with movable parallel circular copper electrodes (cathode and anode) fixed inside it. The distance between them is 12 cm. This plasma experiment works in a low-pressure range (0.15 - 0.70 Torr) for Ar gas with a maximum DC power supply of 200 W. The Paschen curves and electrical plasma parameters (current, volt, power, resistance) characterized to the plasma have been measured and calculated at each cm between the two electrodes. Besides, the electron temperature and ion density are obtained at different radial distances using a double Langmuir probe. The electron temperature (<em>KT<sub>e</sub></em>) was kept stable in range 6.58 to 10.44 eV;whereas the ion density (<em>ni</em>) was in range from 0.91 × 10<sup>10</sup> cm<sup><span style="white-space:nowrap;">−</span>3</sup> to 1.79 × 10<sup>10</sup> cm<sup><span style="white-space:nowrap;">−</span>3</sup>. A digital optical microscope (800×) was employed to draw a comparison between the pre-and after effect of exposure to plasma on the shaping of the circuit layout. The experimental results show that the electrical conductivity increased after plasma exposure, also an improvement in the adhesion force in the Cu foil surface. A significant increase in the conductivity can be directly related to the position of the sample surfaces as well as to the time of exposure. This shows the importance of the obtained results in developing the PCBs manufacturing that uses in different microelectronics devices like those onboard of space vehicles.
基金supported by National Natural Science Foundation of China(Nos.12275095,11975174,11905030,12011530142)the National Magnetic Confinement Fusion Energy Research Project of China(No.2017YFE0301805)the Fundamental Research Funds for the Central Universities(No.2020IB023)
文摘Low-temperature plasmas(LTPs) driven by 1-100 MHz radio-frequency(MRF) are essential for many industrial applications,and their breakdown characteristics are different to that of direct current(DC) breakdown.This review seeks to understand the state of the art of electric breakdown in the MRF field and provide references for related basic and applied research.We have given a brief history of research into MRF-driven breakdown,including Paschen curves,the corresponding discharge modes and parameter spaces,and the evolution of the parameters during the breakdown process.It is shown that the focus has been transferred from the breakdown voltage and V-I characteristics to the evolution of plasma parameters during the breakdown,both in experiments and simulations.It is shown that many fundamental and applied problems still need to be investigated,especially with the new global model and the incorporation of the external circuit model.
文摘A DC pseudo discharge for air has been studied. Air pressure is used in the range between 0.7 Torr and 12 Torr. The breakdown occurs between a plane cathode and a mesh anode at transparencies of 19%, 46%, and 65%. The current-voltage characteristic curves of the discharge, which are measured at different pressures, distances, and mesh transparences, take effect in the region of abnormal glow. The discharge voltage decreases as the air pressure increases, while more voltage is needed to maintain the discharge when either the mesh transparency or the inter- electrode distance is increased. An increment of mesh transparency causes high negative potential behind the mesh due to the high concentration of electrons, which accumulate and collide with neutral atoms. Paschen curves deviate from the expected regular one. The left side of Paschen curves appears at inter-electrode distance of 1 mm, whereas the right side appears at inter-electrode distance of 5 mm. The intermediate region is observed only at 3 mm distance between the two electrodes. For the transparency range used in this work, it is found that the decrement of the breakdown voltage, on the right side, depends on the mesh transparency. For different electrode separations, the measured Paschen curves are coincident and deviate from the standard ones of Paschen's law.