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Nanoscale structural investigation of Zn_(1-x)Mg_(x)O alloy films on polar and nonpolar ZnO substrates with different Mg contents
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作者 Xin Liang Hua Zhou +3 位作者 Hui-Qiong Wang Lihua Zhang Kim Kisslinger a Junyong Kang 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第9期393-399,共7页
Zn_(1-x)Mg_(x)O alloy films are important deep ultraviolet photoelectric materials.In this work,we used plasma-assisted molecular beam epitaxy to prepare Zn_(1-x)Mg_(x)O films with different magnesium contents on pola... Zn_(1-x)Mg_(x)O alloy films are important deep ultraviolet photoelectric materials.In this work,we used plasma-assisted molecular beam epitaxy to prepare Zn_(1-x)Mg_(x)O films with different magnesium contents on polar(0001)and nonpolar(1010)ZnO substrates.The nanoscale structural features of the grown alloy films as well as the interfaces were investigated.It was observed that the cubic phases of the alloy films emerged when the Mg content reached 20%and 37%for the alloy films grown on the(0001)and(1010)ZnO substrates,respectively.High-resolution transmission electron microscopy images revealed cubic phases without visible hexagonal phases for the alloy films with more than 70%magnesium,and the cubic phases exhibited three-fold and two-fold rotations for the alloy films on the polar(0001)and nonpolar(1010)ZnO substrates,respectively.This work aims to provide references for monitoring the Zn_(1-x)Mg_(x)O film structure with respect to different substrate orientations. 展开更多
关键词 Zn_(1-x)Mg_(x)O films molecular beam epitaxy phase separation transmission electron microscopy
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Polycrystalline ZnSx Se1—x thin films deposited on ITO glass by MBE
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作者 沈大可 SOUI.K. +2 位作者 韩高荣 杜丕一 阙端麟 《Journal of Zhejiang University Science》 EI CSCD 2003年第2期131-135,共5页
MBE growth of ZnS_xSe_1-x thin films on ITO coated glass substrate s were carried o ut using ZnS and Se sources with the substrate temperature ranging from 270℃ to 330℃. The XRD θ/2θ spectra resulted from these... MBE growth of ZnS_xSe_1-x thin films on ITO coated glass substrate s were carried o ut using ZnS and Se sources with the substrate temperature ranging from 270℃ to 330℃. The XRD θ/2θ spectra resulted from these films indicated that the as-gro wn polycrystalline ZnS_xSe_1-x thin films had a preferred orientat ion along the (1 11) planes. The evaluated crystal sizes as deduced from the FWHM of the XRD laye r peaks showed strong growth temperature dependence, with the optimized temperat ure being about 290℃. Both AFM and TEM measurements of these thin films also in dicated a similar growth temperature dependence. High quality ZnS_xSe_1- x thin fil m grown at the optimized temperature had the smoothest surface with lowest RMS v alue of 1.2 nm and TEM cross-sectional micrograph showing a well defined column ar structure. 展开更多
关键词 MBE(molecular beam epitaxy) Polycrystalline ZnS_xS e_1-x thin film ITO glass Structural characterizations
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