A one-dimensional hybrid model was developed to study the electrical asymmetry effect（EAE） caused by the fourthorder harmonic in a dual-frequency capacitively coupled Ar plasma.The self-bias voltage caused by the fo...A one-dimensional hybrid model was developed to study the electrical asymmetry effect（EAE） caused by the fourthorder harmonic in a dual-frequency capacitively coupled Ar plasma.The self-bias voltage caused by the fourth-order frequency changes periodically with the phase angle,and the cycle of self-bias with the phase angle is π/2,which is half of that in the second-order case.The influence of the phase angle between the fundamental and its fourth-order frequency on the ion density profiles and the ion energy distributions（IEDs） were studied.Both the ion density profile and the IEDs can be controlled by the phase angle,which provides a convenient way to adjust the sheath characters without changing the main discharge parameters.展开更多
To solve the problem about the inhomogeneous thermal effect of pot heated by coils along the circumference, a novel coil winding method is proposed and compared with the general winding method in the paper. First, bas...To solve the problem about the inhomogeneous thermal effect of pot heated by coils along the circumference, a novel coil winding method is proposed and compared with the general winding method in the paper. First, based on the Biot-Savart law and Ampere＇s rule, the magnetic induction generated by a straight current carrying conductor and a current loop is discussed, respectively. Then the novel coil winding method is developed by adjusting the location of inhomogeneous joints. The joints are periodically scattered along the circumferential direction and symmetrically designed around the central axis.Numerical results show that the quite non-uniform temperature in the base of pot at the circular direction is effectively improved by using the proposed winding method. The potential danger produced by high temperature at some region of coils plate is minimized.It is energy-efficient and safe for residential appliances.展开更多
基金Project supported by the National Natural Science Foundation of China(Grant Nos.11305032,11305028,11375163,and 11275039)the Scientific Foundation of Ministry of Education of China(Grant No.N130405008)
文摘A one-dimensional hybrid model was developed to study the electrical asymmetry effect（EAE） caused by the fourthorder harmonic in a dual-frequency capacitively coupled Ar plasma.The self-bias voltage caused by the fourth-order frequency changes periodically with the phase angle,and the cycle of self-bias with the phase angle is π/2,which is half of that in the second-order case.The influence of the phase angle between the fundamental and its fourth-order frequency on the ion density profiles and the ion energy distributions（IEDs） were studied.Both the ion density profile and the IEDs can be controlled by the phase angle,which provides a convenient way to adjust the sheath characters without changing the main discharge parameters.
基金supported by the National Natural Science Foundation of China under Grant No.41304119,No.41104097,and No.61201007the Specialized Research Fund for the Doctoral Program of Higher Education under Grant No.20120185120012the Oversea Academic Training Fund sponsored by China Scholarship Council and University of Electronic Science and Technology of China under Grant No.201306075027
文摘To solve the problem about the inhomogeneous thermal effect of pot heated by coils along the circumference, a novel coil winding method is proposed and compared with the general winding method in the paper. First, based on the Biot-Savart law and Ampere＇s rule, the magnetic induction generated by a straight current carrying conductor and a current loop is discussed, respectively. Then the novel coil winding method is developed by adjusting the location of inhomogeneous joints. The joints are periodically scattered along the circumferential direction and symmetrically designed around the central axis.Numerical results show that the quite non-uniform temperature in the base of pot at the circular direction is effectively improved by using the proposed winding method. The potential danger produced by high temperature at some region of coils plate is minimized.It is energy-efficient and safe for residential appliances.
