The development and applications of low temperature plasma technology used in surface modification of materials are presented in this paper. Based on plasma sources and ion sources technology, multi-functions ion impl...The development and applications of low temperature plasma technology used in surface modification of materials are presented in this paper. Based on plasma sources and ion sources technology, multi-functions ion implantation and deposition technologies were developed and the related processes are also used to treat different products. The related technologies were translated into industrial productions supported by national research projects. Following the last development of international plasma researches, the standardization and internationalization processes of plasma technologies are executed in our center.展开更多
文摘The development and applications of low temperature plasma technology used in surface modification of materials are presented in this paper. Based on plasma sources and ion sources technology, multi-functions ion implantation and deposition technologies were developed and the related processes are also used to treat different products. The related technologies were translated into industrial productions supported by national research projects. Following the last development of international plasma researches, the standardization and internationalization processes of plasma technologies are executed in our center.