A novel diffractive optical element, named phase zone photon sieve （PZPS）, is presented. There are three kinds of phase plates in PZPSs： PZPS1, PZPS2, and PZPS3. Each of the PZPSs has its own structure and is made ...A novel diffractive optical element, named phase zone photon sieve （PZPS）, is presented. There are three kinds of phase plates in PZPSs： PZPS1, PZPS2, and PZPS3. Each of the PZPSs has its own structure and is made on quartz substrate by etching. The three PZPSs have stronger diffraction peak intensity than a photon sieve （PS） when the margin pinhole and zone line width are kept the same. The PZPS3 can produce a smaller central diffractive spot than the ordinary PS with the same number of zones on the Fresnel zone plate. We have given the design method for and the simulation of PZPS and PS. PZPS has potential applications in optical maskless lithography.展开更多
Extreme ultraviolet(EUV)light is difficult to focus due to strong absorption of most materials.Photon sieves(PS),rather than Fresnel zone plates(FZP),can focus EUV to smaller spot and suppress the higher orders of sec...Extreme ultraviolet(EUV)light is difficult to focus due to strong absorption of most materials.Photon sieves(PS),rather than Fresnel zone plates(FZP),can focus EUV to smaller spot and suppress the higher orders of secondary maxima by several orders of magnitude.The number of pinholes used in PS is far more than that of transparent rings used in FZP,providing a great flexibility to manipulate structured focusing in EUV.In this work we investigate the Fermat-spiral PS to produce focused vortices with different topological charges.Experiment at the wavelength of 46.9 nm is carried out and multi-planar coherent diffractive imaging is used to retrieve the phase map of the focused EUV vortices.These results show the enormous potential of PS for manipulating EUV light.This study not only provides a compact,affordable substitute to focusing vortices where transmissive optics materials are unavailable,but also provides a route of converting various complex light manipulation ranging from visible light to EUV and soft x-ray.展开更多
基金Project supported by the National Key Basic Research Special Foundation of China (Grant No 2007CB935302)the National Natural Science Foundation of China (Grant No 60825403)
文摘A novel diffractive optical element, named phase zone photon sieve （PZPS）, is presented. There are three kinds of phase plates in PZPSs： PZPS1, PZPS2, and PZPS3. Each of the PZPSs has its own structure and is made on quartz substrate by etching. The three PZPSs have stronger diffraction peak intensity than a photon sieve （PS） when the margin pinhole and zone line width are kept the same. The PZPS3 can produce a smaller central diffractive spot than the ordinary PS with the same number of zones on the Fresnel zone plate. We have given the design method for and the simulation of PZPS and PS. PZPS has potential applications in optical maskless lithography.
基金supported by the National Natural Science Foundation of China(NSFC)(62175245,62005066,61875045,62105345,62305220 and 92050202)Shanghai Sailing Program(21YF1453700 and 23YF1429300)Strategic Priority Research Program of Chinese Academy of Sciences(XDA25020302 and XDA25020104).
文摘Extreme ultraviolet(EUV)light is difficult to focus due to strong absorption of most materials.Photon sieves(PS),rather than Fresnel zone plates(FZP),can focus EUV to smaller spot and suppress the higher orders of secondary maxima by several orders of magnitude.The number of pinholes used in PS is far more than that of transparent rings used in FZP,providing a great flexibility to manipulate structured focusing in EUV.In this work we investigate the Fermat-spiral PS to produce focused vortices with different topological charges.Experiment at the wavelength of 46.9 nm is carried out and multi-planar coherent diffractive imaging is used to retrieve the phase map of the focused EUV vortices.These results show the enormous potential of PS for manipulating EUV light.This study not only provides a compact,affordable substitute to focusing vortices where transmissive optics materials are unavailable,but also provides a route of converting various complex light manipulation ranging from visible light to EUV and soft x-ray.
