Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating,which can be employed as a scale for multi-axis optical encoders or a diffractive optical...Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating,which can be employed as a scale for multi-axis optical encoders or a diffractive optical element in many types of optical sensors.Especially,optical configurations such as Lloyd's mirror interferometer based on the division of wavefront method can generate interference fringe fields for the patterning of grating pattern structures at a single exposure in a stable manner.For the fabrication of a two-dimensional scale grating to be used in a planar/surface encoder,an orthogonal two-axis Lloyd's mirror interferometer,which has been realized through innovation to Lloyd’s mirror interferometer,has been developed.In addition,the concept of the patterning of the two-dimensional orthogonal pattern structure at a single exposure has been extended to the non-orthogonal two-axis Lloyd’s mirror interferometer.Furthermore,the optical setup for the non-orthogonal two-axis Lloyd's mirror interferometer has been optimized for the fabrication of a large-area scale grating.In this review article,principles of generating interference fringe fields for the fabrication of a scale grating based on the interference lithography are reviewed,while focusing on the fabrication of a two-dimensional scale grating for planar/surface encoders.Verification of the pitch of the fabricated pattern structures,whose accuracy strongly affects the performance of planar/surface encoders,is also an important task to be addressed.In this paper,major methods for the evaluation of a grating pitch are also reviewed.展开更多
We present a theoretical analysis of corrugated long-period gratings in planar waveguides. In particular, we calculate the transmission spectra for both the TE and TM polarizations and highlight the polarization-indep...We present a theoretical analysis of corrugated long-period gratings in planar waveguides. In particular, we calculate the transmission spectra for both the TE and TM polarizations and highlight the polarization-independence conditions.展开更多
The self-formation of periodic subwavelength ripples by linear polarized femtosecond laser scanning planar and non-planar tungsten targets on the employed laser wavelength, scanning speed, and energy fluence are exami...The self-formation of periodic subwavelength ripples by linear polarized femtosecond laser scanning planar and non-planar tungsten targets on the employed laser wavelength, scanning speed, and energy fluence are examined systematically. The results show that, for a certain laser wavelength, the scanning conditions have no obvious effect to the morphological features of grating structures in the threshold range of laser fluence. The spatial structured period of gratings can be self-consistently interpreted by recently presented physical model of surface two-plasmon resonance. The subwavelength structures on cylindrical surface would be a good method to realize unique surface functions on complex surface of micro-devices.展开更多
基金supported by the Japan Society for the Promotion of Science(JSPS).The author would like to thank Professor Wei Gao(Tohoku University,Japan)for the fruitful discussions and valuable comments on the topic of this review article.
文摘Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating,which can be employed as a scale for multi-axis optical encoders or a diffractive optical element in many types of optical sensors.Especially,optical configurations such as Lloyd's mirror interferometer based on the division of wavefront method can generate interference fringe fields for the patterning of grating pattern structures at a single exposure in a stable manner.For the fabrication of a two-dimensional scale grating to be used in a planar/surface encoder,an orthogonal two-axis Lloyd's mirror interferometer,which has been realized through innovation to Lloyd’s mirror interferometer,has been developed.In addition,the concept of the patterning of the two-dimensional orthogonal pattern structure at a single exposure has been extended to the non-orthogonal two-axis Lloyd’s mirror interferometer.Furthermore,the optical setup for the non-orthogonal two-axis Lloyd's mirror interferometer has been optimized for the fabrication of a large-area scale grating.In this review article,principles of generating interference fringe fields for the fabrication of a scale grating based on the interference lithography are reviewed,while focusing on the fabrication of a two-dimensional scale grating for planar/surface encoders.Verification of the pitch of the fabricated pattern structures,whose accuracy strongly affects the performance of planar/surface encoders,is also an important task to be addressed.In this paper,major methods for the evaluation of a grating pitch are also reviewed.
文摘We present a theoretical analysis of corrugated long-period gratings in planar waveguides. In particular, we calculate the transmission spectra for both the TE and TM polarizations and highlight the polarization-independence conditions.
基金supported by the National Natural Science Foundation of China under Grant No.51275012
文摘The self-formation of periodic subwavelength ripples by linear polarized femtosecond laser scanning planar and non-planar tungsten targets on the employed laser wavelength, scanning speed, and energy fluence are examined systematically. The results show that, for a certain laser wavelength, the scanning conditions have no obvious effect to the morphological features of grating structures in the threshold range of laser fluence. The spatial structured period of gratings can be self-consistently interpreted by recently presented physical model of surface two-plasmon resonance. The subwavelength structures on cylindrical surface would be a good method to realize unique surface functions on complex surface of micro-devices.
