Phase change memory （PCM） has been regarded as a promising candidate for the next generation of nonvolatile memory. To decrease the power required to reset the PCM cell, titanium nitride （TIN） is preferred to be u...Phase change memory （PCM） has been regarded as a promising candidate for the next generation of nonvolatile memory. To decrease the power required to reset the PCM cell, titanium nitride （TIN） is preferred to be used as the bottom electrode of PCM due to its low thermal and suitable electrical conductivity. However, during the manufacture of PCM cell in 40 nm process node, abnormally high and discrete distribution of the resistance of TiN bottom electrode was found, which might be induced by the surface oxidation of TiN bottom electrode during the photoresist ashing process by oxygen plasma. In this work, we have studied the oxidation of TiN and found that with the increasing oxygen plasma ashing time, the thickness of the TiO2 layer became thicker and the state of the TiO2 layer changed from amorphous to crystalline, respectively. The resistance of TiN electrode contact chain with 4-5 nm TiO2 layer was confirmed to be almost three-orders of magnitude higher than that of pure TiN electrode, which led to the failure issue of PCM cell. We efficiently removed the oxidation TiO2 layer by a chemical mechanical polishing （CMP） process, and we eventually recovered the resistance of TiN bottom electrode from 1×10^5Ω/via back to 6×10^2 Ωvia and successfully achieved a uniform resistance distribution of the TiN bottom electrode.展开更多
Municipal solid waste incinerator （MSWI） fly ash was melted using a set of direct current （DC） arc plasma furnace system for the first time in China. At a feed-rate of flying ash of 80 kg/h, the temperature at the...Municipal solid waste incinerator （MSWI） fly ash was melted using a set of direct current （DC） arc plasma furnace system for the first time in China. At a feed-rate of flying ash of 80 kg/h, the temperature at the gas outlet was above 1300℃. Dioxins in the off-gas were recorded as 0.029 ng I-TEQ/Nma （international toxic equivalent, I-TEQ）, well below 0.5 ngTEQ/Nm^3（toxic equivalent, TEQ）, while those in the melted product （slag） were 0.00035 ng/g I-TEQ. Molten slag from the furnace showed excellent resistance against the leaching of heavy metals. These results prove that the plasma furnace is effective for the detoxification and stabilization of MSWI fly ash.展开更多
Municipal solid waste incinerator （MSWI） fly ash with high basicity （about 1.68） was vitrified in a thermal plasma melting furnace system. Through the thermal plasma treatment, the vitrified product （slag） with ...Municipal solid waste incinerator （MSWI） fly ash with high basicity （about 1.68） was vitrified in a thermal plasma melting furnace system. Through the thermal plasma treatment, the vitrified product （slag） with amorphous dark glassy structure was obtained, and the leachability of hazardous metals in slag was significantly reduced. Meanwhile, it was found that the cooling rate affects significantly the immobility of heavy metals in slag. The mass distribution of heavy metals （Zn, Cd, Cr, Pb, As, Hg） was investigated in residual products （slag, secondary residues and flue gas）, in order to analyze the behavior of heavy metals in thermal plasma atmosphere. Heavy metal species with low boiling points accounting for the major fraction of their input-mass were adsorbed in secondary residues by pollution abatement devices, while those with high boiling points tended to be encapsulated in slag.展开更多
Fly ash from a municipal solid waste incinerator （MSWI） without preprocessing （original fly ash, OFA） was melted by a direct current （DC） plasma arc furnace to investigate how the feed forms governed the results...Fly ash from a municipal solid waste incinerator （MSWI） without preprocessing （original fly ash, OFA） was melted by a direct current （DC） plasma arc furnace to investigate how the feed forms governed the results. Dioxins in flue gas from stack and bag-filter ash （BFA） were detected. The distribution of heavy metals of Pb, Cd, As, and Cr along the flue gas process system was analyzed. Through a comparison of the results for dioxins and heavy metals in this study and previous work, carrying-over of fly ash particles with the flue gas stream can be deduced. Based on the magnetic induction equation and Navier-Stokes equations, a magnetohydrodynamic （MHD） model for the plasma arc was developed to describe the particle-carrying effect. The results indicate that, a. when melted, the feed forms of MSWI fly ash affect the results significantly; b. it is not preferable to melt MSWI fly ash directly, and efforts should be made to limit the mass transfer of OFA from the plasma furnace.展开更多
In order to treat hazardous municipal solid waste incinerator＇s （MSWI） fly ash, a new DC arc plasma furnace was developed. Taking an arc of 100 V/1000 A DC as an example, the heat transfer characteristics of the DC...In order to treat hazardous municipal solid waste incinerator＇s （MSWI） fly ash, a new DC arc plasma furnace was developed. Taking an arc of 100 V/1000 A DC as an example, the heat transfer characteristics of the DC arc plasma, ablation of electrodes, heat properties of the fly ash during melting, heat transfer characteristics of the flue gas, and heat loss of the furnace were analyzed based on the energy conservation law, so as to achieve the total heat information and energy balance during plasma processing, and to provide a theoretical basis for an optimized design of the structure and to improve energy efficiency.展开更多
The research paper focuses on evaluating the dry sliding wear behaviour of plasma sprayed coatings like red mud (RM), RM + 5% Fly Ash (FA) and RM + 5% FA + 5% Al on mild steel cylindrical shape substrate. Spraying was...The research paper focuses on evaluating the dry sliding wear behaviour of plasma sprayed coatings like red mud (RM), RM + 5% Fly Ash (FA) and RM + 5% FA + 5% Al on mild steel cylindrical shape substrate. Spraying was done at 10 kW operating power level. A conventional pin on disc wear tester is adopted for wear analysis. The wear test was performed at track diameter of 50 mm and sliding speed of 60 rpm (0.157 m/s) with normal load of 10 N. The duration of sliding varies from 54 minutes for pure red mud coating to a maximum value of 102 minutes for RM + 5% FA + 5% Al composite coating. A significant decrease in wear rate (in terms of mass loss) is observed by reinforcement of fly ash and aluminium to red mud, which might be due to improved interfacial properties.展开更多
The characteristics of a nitrogen arc using a graphite cathode and a melting anode in a pilot-scale plasma furnace are investigated. The voltage is examined as a function of current and apparent plasma length. The vol...The characteristics of a nitrogen arc using a graphite cathode and a melting anode in a pilot-scale plasma furnace are investigated. The voltage is examined as a function of current and apparent plasma length. The voltage increases non-linearly with the increase of apparent plasma length, with the current fixed. The experimental data so obtained are compared with the predictions of the Bowman model for the electric arc, and with numerical simulations as well. The level of agreement between the experimental data at the melting anode and the numerical predictions confirms the suitability of the proposed the Bowman model. These characteristics are relevant to the engineering design and evaluation of a DC plasma furnace and reactor for the treatment of hazardous fly ash waste.展开更多
基金Project supported by the National Key Basic Research Program of China(Nos.2010CB934300,2013CBA01900,2011CBA00607,2011CB932804)the Strategic Priority Research Program of the Chinese Academy of Sciences(No.XDA09020402)+2 种基金the National Integrate Circuit Research Program of China(No.2009ZX02023-003)the National Natural Science Foundation of China(Nos.61176122,61106001,61261160500,61376006)the Science and Technology Council of Shanghai(Nos.12nm0503701,13DZ2295700,12QA1403900,13ZR 1447200)
文摘Phase change memory （PCM） has been regarded as a promising candidate for the next generation of nonvolatile memory. To decrease the power required to reset the PCM cell, titanium nitride （TIN） is preferred to be used as the bottom electrode of PCM due to its low thermal and suitable electrical conductivity. However, during the manufacture of PCM cell in 40 nm process node, abnormally high and discrete distribution of the resistance of TiN bottom electrode was found, which might be induced by the surface oxidation of TiN bottom electrode during the photoresist ashing process by oxygen plasma. In this work, we have studied the oxidation of TiN and found that with the increasing oxygen plasma ashing time, the thickness of the TiO2 layer became thicker and the state of the TiO2 layer changed from amorphous to crystalline, respectively. The resistance of TiN electrode contact chain with 4-5 nm TiO2 layer was confirmed to be almost three-orders of magnitude higher than that of pure TiN electrode, which led to the failure issue of PCM cell. We efficiently removed the oxidation TiO2 layer by a chemical mechanical polishing （CMP） process, and we eventually recovered the resistance of TiN bottom electrode from 1×10^5Ω/via back to 6×10^2 Ωvia and successfully achieved a uniform resistance distribution of the TiN bottom electrode.
基金supported by the Knowledge Innovation Project in the Chinese Academy of Sciences(O45CF3A211)
文摘Municipal solid waste incinerator （MSWI） fly ash was melted using a set of direct current （DC） arc plasma furnace system for the first time in China. At a feed-rate of flying ash of 80 kg/h, the temperature at the gas outlet was above 1300℃. Dioxins in the off-gas were recorded as 0.029 ng I-TEQ/Nma （international toxic equivalent, I-TEQ）, well below 0.5 ngTEQ/Nm^3（toxic equivalent, TEQ）, while those in the melted product （slag） were 0.00035 ng/g I-TEQ. Molten slag from the furnace showed excellent resistance against the leaching of heavy metals. These results prove that the plasma furnace is effective for the detoxification and stabilization of MSWI fly ash.
基金supported by the Knowledge Innovation Project in the Chinese Academy of Sciences(No.O45CF3A211)National Natural Science Foundation of China(No.21171169)
文摘Municipal solid waste incinerator （MSWI） fly ash with high basicity （about 1.68） was vitrified in a thermal plasma melting furnace system. Through the thermal plasma treatment, the vitrified product （slag） with amorphous dark glassy structure was obtained, and the leachability of hazardous metals in slag was significantly reduced. Meanwhile, it was found that the cooling rate affects significantly the immobility of heavy metals in slag. The mass distribution of heavy metals （Zn, Cd, Cr, Pb, As, Hg） was investigated in residual products （slag, secondary residues and flue gas）, in order to analyze the behavior of heavy metals in thermal plasma atmosphere. Heavy metal species with low boiling points accounting for the major fraction of their input-mass were adsorbed in secondary residues by pollution abatement devices, while those with high boiling points tended to be encapsulated in slag.
基金supported by the Knowledge Innovation Project in Chinese Academy of Sciences (045CF3A211)
文摘Fly ash from a municipal solid waste incinerator （MSWI） without preprocessing （original fly ash, OFA） was melted by a direct current （DC） plasma arc furnace to investigate how the feed forms governed the results. Dioxins in flue gas from stack and bag-filter ash （BFA） were detected. The distribution of heavy metals of Pb, Cd, As, and Cr along the flue gas process system was analyzed. Through a comparison of the results for dioxins and heavy metals in this study and previous work, carrying-over of fly ash particles with the flue gas stream can be deduced. Based on the magnetic induction equation and Navier-Stokes equations, a magnetohydrodynamic （MHD） model for the plasma arc was developed to describe the particle-carrying effect. The results indicate that, a. when melted, the feed forms of MSWI fly ash affect the results significantly; b. it is not preferable to melt MSWI fly ash directly, and efforts should be made to limit the mass transfer of OFA from the plasma furnace.
基金supported by the Knowledge Innovation Project in the Chinese Academy of Sciences (No. O45CF3A211)
文摘In order to treat hazardous municipal solid waste incinerator＇s （MSWI） fly ash, a new DC arc plasma furnace was developed. Taking an arc of 100 V/1000 A DC as an example, the heat transfer characteristics of the DC arc plasma, ablation of electrodes, heat properties of the fly ash during melting, heat transfer characteristics of the flue gas, and heat loss of the furnace were analyzed based on the energy conservation law, so as to achieve the total heat information and energy balance during plasma processing, and to provide a theoretical basis for an optimized design of the structure and to improve energy efficiency.
文摘The research paper focuses on evaluating the dry sliding wear behaviour of plasma sprayed coatings like red mud (RM), RM + 5% Fly Ash (FA) and RM + 5% FA + 5% Al on mild steel cylindrical shape substrate. Spraying was done at 10 kW operating power level. A conventional pin on disc wear tester is adopted for wear analysis. The wear test was performed at track diameter of 50 mm and sliding speed of 60 rpm (0.157 m/s) with normal load of 10 N. The duration of sliding varies from 54 minutes for pure red mud coating to a maximum value of 102 minutes for RM + 5% FA + 5% Al composite coating. A significant decrease in wear rate (in terms of mass loss) is observed by reinforcement of fly ash and aluminium to red mud, which might be due to improved interfacial properties.
基金supported by the National Natural Science Foundation of China (Grant No. 21171169)the Knowledge Innovation Project of the Chinese Academy of Sciences (Grant No. O45CF3A211)
文摘The characteristics of a nitrogen arc using a graphite cathode and a melting anode in a pilot-scale plasma furnace are investigated. The voltage is examined as a function of current and apparent plasma length. The voltage increases non-linearly with the increase of apparent plasma length, with the current fixed. The experimental data so obtained are compared with the predictions of the Bowman model for the electric arc, and with numerical simulations as well. The level of agreement between the experimental data at the melting anode and the numerical predictions confirms the suitability of the proposed the Bowman model. These characteristics are relevant to the engineering design and evaluation of a DC plasma furnace and reactor for the treatment of hazardous fly ash waste.
