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Surface Microstructure Characterization of Sol-gel Derived Porous TiO_2 Thin Films 被引量:1
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作者 Jiaguo Yu, Jimmy C. Yu, Bei Cheng, A. S. K. Li, Pak Kan Tse 1) Department of Chemistry, The Chinese University of Hong Kong, Hong Kong, China 2) State Key Lab of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, W 《Rare Metals》 SCIE EI CAS CSCD 2001年第3期157-163,共7页
Porous TiO2 thin films were prepared from alkoxide solutions with and without polyethylene glycol (PEG) by sol-get route on soda lime glass, and were characterized by atomic force microscopy (AFM), transmission electr... Porous TiO2 thin films were prepared from alkoxide solutions with and without polyethylene glycol (PEG) by sol-get route on soda lime glass, and were characterized by atomic force microscopy (AFM), transmission electron microscopy (TEM) and X-ray diffraction (XRD). The results show that TiO2 film prepared from precursor solution without PEG is composed of spherical particles of about 100 nm and several nanometer mesoporous pores. With the increase of the amount of PEG added to the precursor solution, the diameter and the depth of the pores in the resultant films increas on the decomposition of PEG during heat-treatment, which lead to them increase of the surface roughness of the films. XRD and TEM results show that the single anatase phase is precipitated and there are some orientation effects in (101) direction. 展开更多
关键词 sol-gel route porous tio2 thin films surface microstructure CHARACTERIZAtioN
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Preparation and Photocatalytic Property of Porous TiO_2 Film with Net-like Framework
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作者 XU Rong-guo YAO Jian-xi +3 位作者 LAI Xiao-yong MAO Dan XING Chao-jian WANG Dan 《Chemical Research in Chinese Universities》 SCIE CAS CSCD 2009年第1期95-97,共3页
By the UV-curing method, a porous TiO2 film with net-like framework has been prepared. The characterization results of the porous TiO2 film by means of SEM, TEM, XRD, and N2 adsorption-desorption analysis show that th... By the UV-curing method, a porous TiO2 film with net-like framework has been prepared. The characterization results of the porous TiO2 film by means of SEM, TEM, XRD, and N2 adsorption-desorption analysis show that the net-like framework of the porous TiO2 film is composed of TiO2 nanoparticles, forming three dimensional porous structure. The porous TiO2 film exhibits higher photocatalytic activity for the degradation of methylene blue(MB) dye compared with the conventional dense TiO2 film. 展开更多
关键词 UV-CURING tio2 porous film Photocatalytic activity
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Fabrication and photodegradation properties of TiO_2 nanotubes on porous Ti by anodization 被引量:8
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作者 曹国剑 崔博 +3 位作者 王文奇 唐光泽 冯义成 王丽萍 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2014年第8期2581-2587,共7页
Both Ti foil and porous Ti were anodized in 0.5%HF and in ethylene glycol electrolyte containing 0.5%NH4F(mass fraction) separately. The results show that TiO2 nanotubes can be formed on Ti foil by both processes, whe... Both Ti foil and porous Ti were anodized in 0.5%HF and in ethylene glycol electrolyte containing 0.5%NH4F(mass fraction) separately. The results show that TiO2 nanotubes can be formed on Ti foil by both processes, whereas TiO2 nanotubes can be formed on porous Ti only in the second process. The overhigh current density led to the failure of the formation nanotubes on porous Ti in 0.5%HF electrolyte. TiO2 nanotubes were characterized by SEM and XRD. TiO2 nanotubes on porous Ti were thinner than those on Ti foil. Anatase was formed when TiO2 nanotubes were annealed at 400 °C and fully turned into rutile at 700 °C. To obtain good photodegradation, the optimal heat treatment temperature of TiO2 nanotubes was 450 °C. The porosity of the substrates influenced photodegradation properties. TiO2 nanotubes on porous Ti with 60% porosity had the best photodegradation. 展开更多
关键词 tio_2 nanotubes anodization PHOTODEGRADAtioN porous Ti
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纳米TiO_(2)对NH_(3)-H_(2)O-LiBr工质降膜吸收性能的影响
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作者 李彦军 金正浩 李舒宏 《制冷技术》 2024年第1期16-23,共8页
为了探讨纳米TiO_(2)对三元NH_(3)-H_(2)O-LiBr工质降膜吸收的影响,本文利用数值分析建立了三元工作流体薄膜吸收的连续方程、能量方程和组分质量平衡方程,采用Matlab软件进行编程和计算纳米流体的降膜吸收性能,将其与实验数据进行对比... 为了探讨纳米TiO_(2)对三元NH_(3)-H_(2)O-LiBr工质降膜吸收的影响,本文利用数值分析建立了三元工作流体薄膜吸收的连续方程、能量方程和组分质量平衡方程,采用Matlab软件进行编程和计算纳米流体的降膜吸收性能,将其与实验数据进行对比验证,并进一步分析了纳米TiO_(2)质量分数、初始氨浓度、初始温度、冷却水进口温度、吸收压力和下降薄膜管长度对薄膜吸收性能的影响。研究表明:添加纳米TiO_(2)可以增强降膜吸收的传质速率,主要原因为液膜中氨的扩散系数增加。当纳米TiO_(2)质量分数从0%增加到0.1%、0.3%和0.5%时,扩散系数分别增加了3.44倍、6.42倍和11.76倍。此外,增加初始氨浓度、降低初始温度、提高冷却水进口温度或降低吸收压力都可以提高最终溶液的饱和度。 展开更多
关键词 降膜 吸收 纳米tio_(2) NH_(3)-H_(2)O-LiBr 模拟研究
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(Ag,Cu)/TiO_(2)汽车玻璃隔热膜的制备与表征
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作者 王宁 时方晓 《广州化工》 CAS 2024年第7期69-72,共4页
利用磁控溅射技术制备由金属(Ag,Cu)膜、介质层TiO_(2)膜组成的双层汽车玻璃隔热膜样品。利用单因素分析法考察了溅射时间、溅射功率和Ar溅射流量三个因素对(Ag,Cu)/TiO_(2)汽车玻璃隔热膜透光隔热性能的影响。实验结果表明,在在本底真... 利用磁控溅射技术制备由金属(Ag,Cu)膜、介质层TiO_(2)膜组成的双层汽车玻璃隔热膜样品。利用单因素分析法考察了溅射时间、溅射功率和Ar溅射流量三个因素对(Ag,Cu)/TiO_(2)汽车玻璃隔热膜透光隔热性能的影响。实验结果表明,在在本底真空度3×10^(-3) Pa,溅射气压2.1 Pa条件下,靶基距均为70 mm时,金属(Ag,Cu)膜溅射时间18 s,溅射功率80 W,Ar溅射流量20 sccm;介质层TiO_(2)膜溅射时间50 min,溅射功率115 W,溅射流量25 sccm时,(Ag,Cu)/TiO_(2)汽车玻璃隔热膜的透光隔热性能最佳。 展开更多
关键词 (Ag Cu)/tio_(2)膜 汽车玻璃 隔热性能 透光率
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N-doped graphene quantum dot-decorated N-TiO2/P-doped porous hollow g-C_(3)N_(4) nanotube composite photocatalysts for antibiotic photodegradation and H2 production 被引量:2
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作者 Jingshu Yuan Yao Zhang +2 位作者 Xiaoyan Zhang Junjie Zhang Shen’gen Zhang 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CSCD 2024年第1期165-178,共14页
Exclusive responsiveness to ultraviolet light (~3.2 eV) and high photogenerated charge recombination rate are the two primary drawbacks of pure TiO_(2). We combined N-doped graphene quantum dots (N-GQDs), morphology r... Exclusive responsiveness to ultraviolet light (~3.2 eV) and high photogenerated charge recombination rate are the two primary drawbacks of pure TiO_(2). We combined N-doped graphene quantum dots (N-GQDs), morphology regulation, and heterojunction construction strategies to synthesize N-GQD/N-doped TiO_(2)/P-doped porous hollow g-C_(3)N_(4) nanotube (PCN) composite photocatalysts (denoted as G-TPCN). The optimal sample (G-TPCN doped with 0.1wt% N-GQD, denoted as 0.1% G-TPCN) exhibits significantly enhanced photoabsorption, which is attributed to the change in bandgap caused by elemental doping (P and N), the improved light-harvesting resulting from the tube structure, and the upconversion effect of N-GQDs. In addition, the internal charge separation and transfer capability of0.1% G-TPCN are dramatically boosted, and its carrier concentration is 3.7, 2.3, and 1.9 times that of N-TiO_(2), PCN, and N-TiO_(2)/PCN(TPCN-1), respectively. This phenomenon is attributed to the formation of Z-scheme heterojunction between N-TiO_(2) and PCNs, the excellent electron conduction ability of N-GQDs, and the short transfer distance caused by the porous nanotube structure. Compared with those of N-TiO_(2), PCNs, and TPCN-1, the H2 production activity of 0.1%G-TPCN under visible light is enhanced by 12.4, 2.3, and 1.4times, respectively, and its ciprofloxacin (CIP) degradation rate is increased by 7.9, 5.7, and 2.9 times, respectively. The optimized performance benefits from excellent photoresponsiveness and improved carrier separation and migration efficiencies. Finally, the photocatalytic mechanism of 0.1% G-TPCN and five possible degradation pathways of CIP are proposed. This study clarifies the mechanism of multiple modification strategies to synergistically improve the photocatalytic performance of 0.1% G-TPCN and provides a potential strategy for rationally designing novel photocatalysts for environmental remediation and solar energy conversion. 展开更多
关键词 N-doped tio_(2) N-doped graphene quantum dots P-doped g-C_(3)N_(4) porous hollow nanotube heterojunction photocatalysis
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不同制备参数对多孔TiO_(2)薄膜光学性能的影响
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作者 贺文凡 徐均琪 李阳 《应用光学》 CAS 北大核心 2024年第6期1277-1283,共7页
多孔薄膜的制备工艺是其实现光学特性的重要环节。采用溶胶-凝胶法,以石英玻璃为基底,在不同工艺条件下制备出了多孔TiO_(2)薄膜,并通过椭偏仪、分光光度计和白光干涉仪对薄膜光学性能进行了表征和分析,研究了原料配比、盐酸浓度、致孔... 多孔薄膜的制备工艺是其实现光学特性的重要环节。采用溶胶-凝胶法,以石英玻璃为基底,在不同工艺条件下制备出了多孔TiO_(2)薄膜,并通过椭偏仪、分光光度计和白光干涉仪对薄膜光学性能进行了表征和分析,研究了原料配比、盐酸浓度、致孔剂聚乙二醇(polyethylene glycol,PEG)添加量等工艺参数对多孔TiO_(2)薄膜折射率、孔隙率、透射率以及表面形貌的影响,并最终确定出制备多孔TiO_(2)薄膜的优化工艺参数。结果表明,在300 nm~700 nm光谱范围内,采用钛酸丁酯、盐酸(20%)、去离子水和无水乙醇以3∶1∶10∶8的比例,且溶液中PEG添加量为0.03 g·ml^(-1),涂膜2次时,可将TiO_(2)薄膜的折射率调低为1.4960(波长550 nm);膜层孔穴分布较均匀,孔隙率为48.3%;薄膜光学带隙值为3.77 eV。 展开更多
关键词 多孔tio_(2)薄膜 溶胶-凝胶法 折射率 孔隙率 透射率 光学带隙
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脉冲激光沉积过程中TiO_(2)等离子体状态诊断及薄膜特性的研究
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作者 王源 高亚青 +2 位作者 蔡芸丽 苏茂根 董晨钟 《西北师范大学学报(自然科学版)》 CAS 2024年第2期51-57,共7页
脉冲激光沉积技术由于具有较高的沉积速率和良好的兼容性,已广泛应用于各种纳米薄膜材料的制备.探究激光等离子体状态与沉积薄膜特性之间的关系,有助于进一步调控与优化脉冲激光技术对薄膜材料的沉积.本文将等离子体状态诊断与沉积薄膜... 脉冲激光沉积技术由于具有较高的沉积速率和良好的兼容性,已广泛应用于各种纳米薄膜材料的制备.探究激光等离子体状态与沉积薄膜特性之间的关系,有助于进一步调控与优化脉冲激光技术对薄膜材料的沉积.本文将等离子体状态诊断与沉积薄膜性能相结合,讨论了不同脉冲激光能量下等离子体状态对沉积薄膜性能的影响.结果表明,低烧蚀能量下产生的等离子体更有助于获得质地更好,且与靶材晶相一致的优良薄膜材料.该结果也为探索和调控沉积过程提供参考. 展开更多
关键词 脉冲激光沉积 激光等离子体诊断 光学发射光谱 tio_(2)薄膜表征
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TiO_2 thin film photocatalyst 被引量:12
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作者 YUJiaguo 《Rare Metals》 SCIE EI CAS CSCD 2004年第4期289-295,共7页
It is well known that the photocatalytic activity of TiO_2 thin filmsstrongly depends on the preparing methods and post-treatment conditions, since they have a decisiveinfluence on the chemical and physical properties... It is well known that the photocatalytic activity of TiO_2 thin filmsstrongly depends on the preparing methods and post-treatment conditions, since they have a decisiveinfluence on the chemical and physical properties of TiO_2 thin films. Therefore, it is necessary toelucidate the influence of the preparation process and post-treatment conditions on thephoto-catalytic activity and surface microstructures of the films. This review deals with thepreparation of TiO_2 thin film photo-catalysts by wet-chemical methods (such as sol-gel,-reversemicellar and liquid phase deposition) and the comparison of various preparation methods as well astheir advantage and disadvantage. Furthermore, it is discussed that the advancement ofphotocatalytic activity, super-hydrophilicity and bactericidal activity of TiO_2 thin filmphotocatalyst in recent years. 展开更多
关键词 inorganic non-metal materials tio_2 thin films preparation sol-gel method liquid phase deposition method reverse micellar method photocatalytic activity SUPER-HYDROPHILICITY bactericidal activity
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Rapid communication Preparation of TiO_2 nanometer thin films with high photocatalytic activity by reverse micellar method 被引量:6
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作者 WU Qide, CHENG Bei, and ZHANG GaokeThe Key Laboratory of Silicon Materials Science and Engineering of Ministry of Education, Wuhan University of Technology, Wuhan 430070, China (Received 2003-01-10) 《Rare Metals》 SCIE EI CAS CSCD 2003年第2期150-154,共5页
Two kinds of TiO_2 nanometer thin films were prepared on stainless steel bythe reverse micellar and sol-gel methods, respectively. The calcined TiO_ 2 thin films werecharacterized by X-ray diffraction (XRD), atomic fo... Two kinds of TiO_2 nanometer thin films were prepared on stainless steel bythe reverse micellar and sol-gel methods, respectively. The calcined TiO_ 2 thin films werecharacterized by X-ray diffraction (XRD), atomic force microscopy (AFM), BET surface area and X-rayphotoelectron spectroscopy (XPS). Photocatalytic activity was evaluated by photocatalyticdecoloration of methyl orange aqueous solution. The results showed that the TiO_2 thin filmsprepared by reverse micellar method (designated as RM-TiO_2 films) showed higher photocatalyticactivity than those by sol-gel method (designated as SG-TiO_2 films). This is attributed to the factthat the former is composed of smaller monodispersed spherical particles with a size of about 15 nmand possesses higher surface areas. 展开更多
关键词 Inorganic non-metal materials tio_2 nanometer thin films reversemicellar method stainless steel PREPARAtioN photocatalytic activity
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Enhancing performance of low-temperature processed CsPbI2Br all-inorganic perovskite solar cells using polyethylene oxide-modified TiO_(2)
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作者 Xu Zhao Naitao Gao +2 位作者 Shengcheng Wu Shaozhen Li Sujuan Wu 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2024年第4期786-794,共9页
CsPbX_(3)-based(X=I,Br,Cl)inorganic perovskite solar cells(PSCs)prepared by low-temperature process have attracted much attention because of their low cost and excellent thermal stability.However,the high trap state d... CsPbX_(3)-based(X=I,Br,Cl)inorganic perovskite solar cells(PSCs)prepared by low-temperature process have attracted much attention because of their low cost and excellent thermal stability.However,the high trap state density and serious charge recombination between low-temperature processed TiO_(2)film and inorganic perovskite layer interface seriously restrict the performance of all-inorganic PSCs.Here a thin polyethylene oxide(PEO)layer is employed to modify TiO_(2)film to passivate traps and promote carrier collection.The impacts of PEO layer on microstructure and photoelectric characteristics of TiO_(2)film and related devices are systematically studied.Characterization results suggest that PEO modification can reduce the surface roughness of TiO_(2)film,decrease its average surface potential,and passivate trap states.At optimal conditions,the champion efficiency of CsPbI_(2)Br PSCs with PEO-modified TiO_(2)(PEO-PSCs)has been improved to 11.24%from 9.03%of reference PSCs.Moreover,the hysteresis behavior and charge recombination have been suppressed in PEO-PSCs. 展开更多
关键词 polyethylene oxide-modified tio_(2) film low-temperature process CsPbI_(2)Br-based all-inorganic perovskite solar cells photo-voltaic performance
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Uniform deposition of ultra-thin TiO_(2) film on mica substrate by atmospheric pressure chemical vapor deposition: Effect of precursor concentration 被引量:2
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作者 Ming Liu Ying Li +4 位作者 Rui Wang Guoqiang Shao Pengpeng Lv Jun Li Qingshan Zhu 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2023年第8期99-107,共9页
The performance of pearlescent pigment significantly affected by the grain size and the roughness of deposited film. The effect of TiCl_(4) concentration on the initial deposition of TiO_(2) on mica by atmospheric pre... The performance of pearlescent pigment significantly affected by the grain size and the roughness of deposited film. The effect of TiCl_(4) concentration on the initial deposition of TiO_(2) on mica by atmospheric pressure chemical vapor deposition(APCVD) was investigated. The precursor concentration significantly affected the deposition and morphology of TiO_(2) grains assembling the film. The deposition time for fully covering the surface of mica decreased from 120 to 10 s as the TiCl_(4) concentration increased from 0.38%to 2.44%. The grain size increased with the TiCl_(4) concentration. The AFM and TEM analysis demonstrated that the aggregation of TiO_(2) clusters at the initial stage finally result to the agglomeration of fine TiO_(2) grains at high TiCl_(4) concentrations. Following the results, it was suggested that the nucleation density and size was easy to be adjusted when the TiCl_(4) concentration is below 0.90%. 展开更多
关键词 Chemical vapor deposition tio_(2)thin film Nucleation reaction Precursor concentration Pearlescent pigment
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等离子体电解氧化法制备多孔TiO_(2)/V_(2)O_(5)复合物膜层及其增强光催化产氢活性
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作者 贾方舟 姚忠平 姜兆华 《材料科学与工艺》 CAS CSCD 北大核心 2024年第2期12-19,共8页
较差的光催化产氢效率极大地阻碍了TiO_(2)光催化剂的工业化应用。为此,本文在含有NH_(4)VO_(3)的磷酸盐溶液中,采用等离子体电解氧化(PEO)法制备了多孔TiO_(2)/V_(2)O_(5)复合膜光催化剂,通过扫描电子显微镜(SEM)、能谱仪(EDS)、X射线... 较差的光催化产氢效率极大地阻碍了TiO_(2)光催化剂的工业化应用。为此,本文在含有NH_(4)VO_(3)的磷酸盐溶液中,采用等离子体电解氧化(PEO)法制备了多孔TiO_(2)/V_(2)O_(5)复合膜光催化剂,通过扫描电子显微镜(SEM)、能谱仪(EDS)、X射线衍射(XRD)、X射线光电子谱(XPS)和紫外可见漫反射光谱(UV-Vis DRS)对其组成、结构及光吸收性质进行了表征,并采用气相色谱评价了薄膜催化剂的光催化产氢性能,研究了电解液中NH_(4)VO_(3)含量对膜的结构、组成和光催化产氢性能的影响。结果表明:复合膜催化剂主要由锐钛矿和金红石型TiO_(2)组成,具有微孔结构,V_(2)O_(5)主要以无定形形式存在于膜中,与TiO_(2)有很强的相互作用,影响TiO_(2)的晶面间距。研究发现,元素V抑制了TiO_(2)的结晶和金红石型TiO_(2)的形成,扩大了薄膜的光学吸收范围。针对Na_(2)S+Na_(2)SO_(3)溶液中的光催化产氢性能的研究显示,在质量浓度为1 g/L NH_(4)VO_(3)的电解液中制备的TiO_(2)/V_(2)O_(5)薄膜的光催化活性最高,优于近年来报道的其他光催化剂。光催化重复实验表明,该复合膜催化剂具有较高的稳定性和较为恒定的光催化活性。 展开更多
关键词 tio_(2) V_(2)O_(5) 膜层光催化剂 等离子体电解氧化 产氢
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Preparation and Characterization of Nano-ZnFe_2O_4/TiO_2 Films 被引量:1
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作者 Kejing Xu 《Journal of Natural Gas Chemistry》 EI CAS CSCD 2007年第1期100-105,共6页
The nano-ZnFe2O4/TiO2 films possess the functions of desulfurization and degradation for organic pollutants. The sols of ZnFe2O4/TiO2 were prepared by sol-gel method and coated on glass and porous ceramic by vertical ... The nano-ZnFe2O4/TiO2 films possess the functions of desulfurization and degradation for organic pollutants. The sols of ZnFe2O4/TiO2 were prepared by sol-gel method and coated on glass and porous ceramic by vertical coating and dipping-lift processes, respectively, and the samples were obtained after drying and sintering. The composition, appearance, absorption spectrum of the films, and the influence of the film on porous ceramic performances were analyzed using SEM, AFM, UVVis spectrometer, and mercury porosimeter, respectively, to determine the operation parameters of the multifunction porous ceramic elements for gas-purification. 展开更多
关键词 sol-gel method nano-ZnFe2O4/tio2 film porous ceramic element DESULFURIZAtioN DEGRADAtioN
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Humidity sensing properties of spray deposited Fe doped TiO_(2)thin film 被引量:1
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作者 Dipak L Gapale Pranav P.Bardapurkar +3 位作者 Sandeep A.Arote Sanjaykumar Dalvi Prashant Baviskar Ratan Y Borse 《Journal of Semiconductors》 EI CAS CSCD 2021年第12期62-71,共10页
In the present work,ferrite(Fe)doped TiO_(2)thin films with different volume percentage(vol%)were synthesized using a spray pyrolysis technique.The effect of Fe doping on structural properties such as crystallite size... In the present work,ferrite(Fe)doped TiO_(2)thin films with different volume percentage(vol%)were synthesized using a spray pyrolysis technique.The effect of Fe doping on structural properties such as crystallite size,texture coefficient,microstrain,dislocation densities etc.were evaluated from the X ray diffratometry(XRD)data.XRD data revealed a polycrystalline anatase TiO_(2)phase for sample synthesized up to 2 vol%and mixed anatase and rutile crystalline phase for sample synthesized at 4 vol%Fe doped TiO_(2).The crystalline size was observed to decrease with increase in Fe dopant vol%and also other structural parameters changes with Fe dopant percentage.In the present work,electrical resistance was observed to decrease with a rise in Fe dopant vol%and temperature of the sample.Thermal properties like temperature coefficient of resistance and activation energy also showed strong correlation with Fe dopant vol%.Humidity sensing properties of the synthesized sample altered with a change in Fe dopant vol%.In the present paper,maximum sensitivity of about 88.7%for the sample synthesized with 2 vol%Fe doped TiO_(2)and also the lowest response and recovery time of about 52 and 3 s were reported for the same sample. 展开更多
关键词 Fe doped tio_(2) thin films spray pyrolysis humidity sensing
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静电场对超声雾化热解喷涂制备TiO_(2)薄膜的影响研究
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作者 李冬梅 周俊 +3 位作者 吴非凡 吕家波 肖黎 龚恒翔 《人工晶体学报》 CAS 北大核心 2024年第12期2173-2180,共8页
基于自主搭建的超声雾化热解喷涂装置进行静电场作用耦合,通过在反应沉积腔体的上、下壁面间施加非匀强电场,探究了形成静电场所施加的直流电压对喷涂TiO_(2)薄膜结构与性能的影响。电场作用下雾滴颗粒被极化并获得垂直衬底表面的动量,... 基于自主搭建的超声雾化热解喷涂装置进行静电场作用耦合,通过在反应沉积腔体的上、下壁面间施加非匀强电场,探究了形成静电场所施加的直流电压对喷涂TiO_(2)薄膜结构与性能的影响。电场作用下雾滴颗粒被极化并获得垂直衬底表面的动量,克服了热泳力作用的影响,提高了钛源前驱体在衬底表面的附着效率,同时增强了薄膜结晶性能及成膜均匀性。结果表明,当加载电压为1.0 kV时,获得了优化锐钛矿相TiO_(2)薄膜,其(101)晶面半峰全宽为0.29°,平均晶粒尺寸达到94.19 nm,可见光区平均透过率为85%,表面粗糙度为16.70 nm。通过静电场的施加,调控了衬底近表面处入射粒子的动量,构建了更有利于TiO_(2)薄膜生长的稳定环境,为TiO_(2)薄膜制备工艺的优化提供了参考。 展开更多
关键词 tio_(2)薄膜 超声雾化热解喷涂 热泳力 静电场 晶体生长
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TiO_2 Thin Film UV Detectors Deposited by DC Reactive Magnetron Sputtering 被引量:1
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作者 ZHANGLi-wei YAONing ZHANGBing-lin FANZhi-qin YANGShi-e LUZhan-ling 《Semiconductor Photonics and Technology》 CAS 2004年第4期245-247,共3页
Crystalline TiO2 thin films were prepared by DC reactive magnetron sputtering on indium-tin oxide(ITO) thin film deposited on quartz substrate, the photoconductive UV detector on TiO2 thin films was based on a sandw... Crystalline TiO2 thin films were prepared by DC reactive magnetron sputtering on indium-tin oxide(ITO) thin film deposited on quartz substrate, the photoconductive UV detector on TiO2 thin films was based on a sandwich structure of C/ TiO2/ITO. The measurement of the I-V characteristics for these devices shows good ohmic contact. The photoresponse of TiO2 thin films was analyzed at different bias voltage. The detector shows a good photoresponse with a rise time of 2 s and a fall time of 40 s, the photocurrent is linearly increased with the bias voltage. 展开更多
关键词 tio_(2) thin films SPUTTERING Photoconductive UV detector PHOTORESPONSE
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沉积参数对TiO_(2)纳米薄膜的显微结构和光学性能的影响
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作者 纪建超 颜悦 哈恩华 《真空》 CAS 2024年第3期57-62,共6页
采用直流脉冲磁控溅射的方法,在有机玻璃上沉积了纳米TiO_(2)光学薄膜。研究了沉积功率、基片温度等参数对TiO_(2)薄膜结构及光学性能的影响。借助椭圆偏振光测试仪、X射线光电子能谱仪(XPS)、X射线衍射仪(XRD)、分光光度计、原子力显微... 采用直流脉冲磁控溅射的方法,在有机玻璃上沉积了纳米TiO_(2)光学薄膜。研究了沉积功率、基片温度等参数对TiO_(2)薄膜结构及光学性能的影响。借助椭圆偏振光测试仪、X射线光电子能谱仪(XPS)、X射线衍射仪(XRD)、分光光度计、原子力显微镜(AFM)等表征手段分析了薄膜的光学特性、元素组成、结晶性能及显微结构。结果表明:随沉积功率的增加,薄膜氧含量降低,粒径减小,折射率递增,可见光波段的透过率和反射率递减;随基片温度上升,薄膜的沉积速率降低,这促进了薄膜粒子的聚集,在光学方面表现为随温度上升,折射率及可见光透过率同时增加;TiO_(2)薄膜的禁带宽度在3.12~3.16eV之间,随沉积功率增加和基片温度上升,其禁带宽度递减。 展开更多
关键词 tio_(2)薄膜 磁控溅射 显微结构 光学性能
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TiO_(2)纳米线薄膜的水热法合成及其光催化性能研究
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作者 常迎 鄂磊 +1 位作者 陈亚楠 李环 《天津城建大学学报》 CAS 2024年第3期180-185,共6页
以钛箔为钛源和基底,NaOH为形貌控制剂,采用水热法制备TiO_(2)纳米线薄膜.通过调控NaOH溶液的浓度,研究了形貌控制剂用量对样品晶体结构、表面形貌、光催化性能的影响,并对TiO_(2)纳米线薄膜的形成机理进行了阐述.通过SEM、XRD对样品进... 以钛箔为钛源和基底,NaOH为形貌控制剂,采用水热法制备TiO_(2)纳米线薄膜.通过调控NaOH溶液的浓度,研究了形貌控制剂用量对样品晶体结构、表面形貌、光催化性能的影响,并对TiO_(2)纳米线薄膜的形成机理进行了阐述.通过SEM、XRD对样品进行表征及光催化降解,实验结果表明:随着NaOH溶液浓度的增加,TiO_(2)纳米线薄膜的表面形貌和光催化活性也随之改变;当NaOH溶液浓度为1 M时,所制得的锐钛矿型TiO_(2)薄膜表面具有均匀的一维纳米线形貌;样品在紫外光下照射10 h后,甲基橙溶液的光催化降解率达到了90%. 展开更多
关键词 tio_(2)纳米线薄膜 NAOH 水热法 光催化
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Ti/TiO_(2)/p-Si阻变存储器中非线性电阻转变机制的研究
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作者 罗涵琼 胡全丽 《山东化工》 CAS 2024年第4期12-14,共3页
采用磁控溅射沉积技术在p型硅片(p-Si)上沉积TiO_(2)薄膜,然后使用掩模板沉积Ti顶电极,制备出具有Ti/TiO_(2)/p-Si结构的阻变存储器。该器件表现出了稳定的非线性电阻转变特性,该器件具有自整流效应,并且具有较大的开关比(高于10^(3))... 采用磁控溅射沉积技术在p型硅片(p-Si)上沉积TiO_(2)薄膜,然后使用掩模板沉积Ti顶电极,制备出具有Ti/TiO_(2)/p-Si结构的阻变存储器。该器件表现出了稳定的非线性电阻转变特性,该器件具有自整流效应,并且具有较大的开关比(高于10^(3))和非常稳定的循环特性。器件的电阻转变机制为空间电荷限制电流传导和肖特基发射机制。研究表明Ti/TiO_(2)/p-Si器件是一种非常有潜力的下一代非易失性存储器件。 展开更多
关键词 氧化钛 薄膜 阻变存储器
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